Method of manufacturing vibration element
A method of manufacturing a vibration element includes: a first protective film forming step of forming a first protective film on a first substrate surface of a crystal substrate; a first dry etching step of dry-etching the crystal substrate via the first protective film; a second protective film forming step of forming a second protective film on a second substrate surface of the crystal substrate; and a second dry etching step of dry-etching the crystal substrate via the second protective film. A relationship of T 1 <T 2 <T 3 or T 4 <T 5 <T 6 is satisfied, in which T 1 and T 4 are thicknesses of the first and second protective films in an inter-arm region, respectively, T 2 and T 5 are thicknesses of the first and second protective films in first and second groove forming regions, respectively, and T 3 and T 6 are thicknesses of the first and second protective films in first and second bank portion forming regions, respectively.
1 . A method of manufacturing a vibration element comprising a crystal substrate and including
a first vibration arm and a second vibration arm extending along a first direction and arranged side by side along a second direction intersecting the first direction,
the first vibration arm and the second vibration arm each having a first surface and a second surface in a front and back relationship that are arranged side by side in a third direction intersecting the first direction and the second direction, a bottomed first groove opening to the first surface, and a bottomed second groove opening to the second surface, and
electrodes provided on each of the first vibration arm and the second vibration arm that through application of a drive signal thereto cause the first vibration arm and the second vibration arm to vibrate,
the method comprising:
providing the crystal substrate having a first substrate surface and a second substrate surface in a front and back relationship;
forming a first protective film on the first substrate surface;
dry-etching the first substrate surface of the crystal substrate through the first protective film in a single dry-etching process to simultaneously form the first surface, the bottomed first groove, and a portion of an outer shape of each of the first vibration arm and the second vibration arm;
after dry-etching the first substrate surface forming a second protective film on the second substrate surface; and
dry-etching the second substrate surface of the crystal substrate through the second protective film in a single dry-etching process to simultaneously form the second surface, the bottomed second groove, and remaining portions of the outer shape of each of the first vibration arm and the second vibration arm,
wherein the forming of the first protective film and the forming of the second protective each include applying a protective material to the first substrate surface and the second substrate surface, respectively, exposing the protective material, and developing the protective material such that each of T 1 <T 2 <T 3 and T 4 <T 5 <T 6 are satisfied by the first protective film and the second protective film, respectively, and
the forming of the first protective film and the forming of the second protective film such that each of T 1 <T 2 <T 3 and T 4 <T 5 <T 6 are satisfied are each conducted before the dry-etching of the first substrate surface of the crystal substrate and the dry-etching of the second substrate surface of the crystal substrate, respectively, and
wherein T 1 and T 4 are thicknesses of the first protective film and the second protective film, respectively, along the third direction in an inter-arm region positioned between a first vibration arm forming region in which the first vibration arm is formed and a second vibration arm forming region in which the second vibration arm is formed, respectively,
T 2 and T 5 are thicknesses of the first protective film and the second protective film, respectively, along the third direction in a first groove forming region in which the bottomed first groove is formed and a second groove forming region in which the bottomed second groove is formed, respectively, and
T 3 and T 6 are thicknesses of the first protective film and the second protective film, respectively, along the third direction in regions of the first vibration arm forming region and the second vibration arm forming region excluding the first groove forming region and the second groove forming region, respectively.
2 . The method of manufacturing a vibration element according to claim 1 , wherein
in at least one of the first protective film and the second protective film, T 1 =0 or T 4 =0.
3 . The method of manufacturing a vibration element according to claim 1 , wherein
during the dry-etching of the first substrate surface of the crystal substrate, the dry etching is terminated in a state where the first protective film remains on the first substrate surface, and
the method of manufacturing the vibration element further comprises removing the remaining first protective film.
4 . The method of manufacturing a vibration element according to claim 3 , wherein
during the dry-etching of the second substrate surface of the crystal substrate,
the dry etching is terminated in a state where the second protective film remains on the second substrate surface, and
the method of manufacturing the vibration element further comprises removing the remaining second protective film.
5 . The method of manufacturing a vibration element according to claim 1 , wherein
at least one of the first protective film and the second protective film is a resist film.
6 . The method of manufacturing a vibration element according to claim 1 , wherein
at least one of the first protective film and the second protective film is a metal film.