Semiconductor structure and method of manufacturing the same
A semiconductor structure includes a substrate, a dielectric layer, a connection layer and wire layers. The dielectric layer is disposed on a surface of the substrate and includes vias showing the surface. The connection layer is disposed on the dielectric layer, a first connection portion of the connection layer is located in the vias and connected to the surface, a second connection portion of the connection layer is connected to the dielectric layer. A first ground portion of the ground metal layer is connected to the first connection portion of the connection layer, and a second ground portion of the ground metal layer is connected to the second connection portion of the connection layer. Each of the wire layers is disposed on the second connection portion of the connection layer, and the second ground portion is located between the adjacent wire layers.
1. A semiconductor structure comprising:
a substrate including a surface;
a dielectric layer disposed on the surface and including a plurality of vias which expose the surface;
a connection layer disposed on the dielectric layer, a first connection portion of the connection layer is located in the plurality of vias and connected to the surface, a second connection portion of the connection layer is connected to the dielectric layer;
a ground metal layer disposed on the connection layer, a first ground portion of the ground metal layer is connected to the first connection portion of the connection layer, a second ground portion of the ground metal layer is connected to the second connection portion of the connection layer; and
a plurality of wire layers each disposed on the second connection portion of the connection layer, the second ground portion is located between the adjacent wire layers.
2. The semiconductor structure in accordance with claim 1 , wherein the dielectric layer, the first connection portion and the first ground portion are located on a first horizontal height, the second connection portion, the second ground portion and the plurality of wire layers are located on a second horizontal height which is higher than the first horizontal height.
3. The semiconductor structure in accordance with claim 2 , wherein the substrate includes a plurality of conductive pads which are disposed on the surface of the substrate, each of the plurality of conductive pads is exposed by one of the plurality of vias of the dielectric layer, the connection layer is connected to each of the plurality of conductive pads via one of the plurality of vias, and each of the plurality of wire layers is connected to each of the plurality of conductive pads by the connection layer.
4. The semiconductor structure in accordance with claim 2 , wherein the first ground portion is connected to the second ground portion by the connection layer.
5. The semiconductor structure in accordance with claim 4 , wherein there is no current signal passing through the ground metal layer.
6. A method of manufacturing a semiconductor structure comprising the steps of:
providing a substrate including a surface;
forming a dielectric layer on the surface of the substrate, the dielectric layer includes a plurality of vias which expose the surface;
forming a connection layer on the dielectric layer, a part of the connection layer is located in the plurality of vias of the dielectric layer and connected to the surface, a part of the connection layer is connected to the dielectric layer;
forming a patterned photoresist on the connection layer, the patterned photoresist includes a plurality of openings which expose the connection layer;
forming a metal layer in the plurality of openings of the patterned photoresist, the metal layer is connected to the connection layer which visible through the plurality of openings, and a part of the metal layer is located in one of the plurality of vias of the dielectric layer;
removing the patterned photoresist to expose the connection layer covered by the patterned photoresist; and
etching the connection layer using the metal layer as a mask, the etched connection layer includes a first connection portion and a second connection portion, the first connection portion is located in the plurality of vias and connected to the surface, the second connection portion is connected to the dielectric layer, wherein the metal layer includes a ground metal layer and a plurality of wire layers, a first ground portion of the ground metal layer is connected to the first connection portion of the connection layer, a second ground portion of the ground metal layer is connected to the second connection portion of the connection layer, each of the plurality of wire layers is disposed on the second connection portion of the connection layer, and the second ground portion is located between the adjacent wire layers.
7. The method in accordance with claim 6 , wherein the dielectric layer, the first connection portion and the first ground portion are located on a first horizontal height, the second connection portion, the second ground portion and the plurality of wire layers are located on a second horizontal height which is higher than the first horizontal height.
8. The method in accordance with claim 7 , wherein the substrate includes a plurality of conductive pads which are disposed on the surface of the substrate, each of the plurality of conductive pads is exposed by one of the plurality of vias of the dielectric layer, the connection layer is connected to each of the plurality of conductive pads via one of the plurality of vias, and each of the plurality of wire layers is connected to each of the plurality of conductive pads by the connection layer.
9. The method in accordance with claim 7 , wherein the first ground portion is connected to the second ground portion by the connection layer.
10. The method in accordance with claim 9 , wherein there is no current signal passing through the ground metal layer.