Method for manufacturing display apparatus, display apparatus, display module, and electronic device
A high-resolution, high-definition, or large display apparatus is provided. A metal mask is placed over an EL layer and film deposition is performed with the metal mask, whereby an island-shaped counter electrode is formed. Then, the EL layer is processed using the counter electrode as a hard mask. Alternatively, after an EL layer and a counter electrode are formed over an entire surface, processing using a metal mask is performed. An insulating layer that electrically insulates adjacent pixel electrodes from each other is positioned between adjacent light-emitting devices. A resist mask is formed over the insulating layer. A plurality of EL layers and a plurality of counter electrodes overlapping each other over the insulating layer are partly removed using the resist mask, whereby part of the insulating layer is exposed. Thus, the adjacent light-emitting devices are electrically insulated from each other over the insulating layer.
1 . A method for manufacturing a display apparatus, comprising:
forming a first pixel electrode and a second pixel electrode;
forming an insulating layer covering an end portion of the first pixel electrode and an end portion of the second pixel electrode;
forming a first layer over the first pixel electrode, the second pixel electrode, and the insulating layer;
placing a first metal mask comprising a first opening over the first layer so that the first opening overlaps the first pixel electrode;
forming a first counter electrode overlapping the first pixel electrode with the first layer therebetween by performing film deposition with the first metal mask;
removing at least part of a region overlapping the second pixel electrode of the first layer using the first counter electrode as a hard mask;
forming a second layer over the first pixel electrode, the second pixel electrode, and the insulating layer;
placing a second metal mask comprising a second opening over the second layer so that the second opening overlaps the second pixel electrode;
forming a second counter electrode overlapping the second pixel electrode with the second layer therebetween by performing film deposition with the second metal mask;
removing at least part of a region overlapping the first pixel electrode of the second layer using the second counter electrode as a hard mask;
forming, over the first counter electrode and the second counter electrode, a resist mask comprising an opening at a position overlapping the insulating layer;
exposing part of the insulating layer by removing at least part of a region overlapping the insulating layer of at least one of the first layer, the second layer, the first counter electrode, and the second counter electrode using the resist mask; and
forming a first protective layer covering the first counter electrode, the second counter electrode, and the insulating layer.
2 . The method for manufacturing a display apparatus according to claim 1 , further comprising:
before the formation of the first counter electrode, forming a second protective layer overlapping the first pixel electrode with the first layer therebetween by performing film deposition with the first metal mask; and
before the formation of the second counter electrode, forming a third protective layer overlapping the second pixel electrode with the second layer therebetween by performing film deposition with the second metal mask.
3 . The method for manufacturing a display apparatus according to claim 2 ,
wherein a thickness of the second protective layer and a thickness of the third protective layer are different from each other.
4 . The method for manufacturing a display apparatus according to claim 2 ,
wherein at least one of a metal oxide layer comprising indium, gallium, and zinc and a metal oxide layer comprising indium and tin is formed as each of the second protective layer and the third protective layer.
5 . The method for manufacturing a display apparatus according to claim 1 , further comprising:
after the formation of the first counter electrode, forming a fourth protective layer overlapping the first pixel electrode with the first counter electrode therebetween by performing film deposition with the first metal mask.
6 . The method for manufacturing a display apparatus according to claim 5 ,
wherein at least one of a metal oxide layer comprising indium, gallium, and zinc and a metal oxide layer comprising indium and tin is formed as the fourth protective layer.
7 . A method for manufacturing a display apparatus, comprising:
forming a first pixel electrode and a second pixel electrode;
forming an insulating layer covering an end portion of the first pixel electrode and an end portion of the second pixel electrode;
forming a first layer over the first pixel electrode, the second pixel electrode, and the insulating layer;
forming a first counter electrode over the first layer;
placing a first metal mask comprising a first opening over the first counter electrode so that the first opening overlaps the second pixel electrode;
removing at least part of a region overlapping the second pixel electrode of the first layer and the first counter electrode using the first metal mask;
forming a second layer over the first pixel electrode, the second pixel electrode, and the insulating layer;
forming a second counter electrode over the second layer;
placing a second metal mask comprising a second opening over the second counter electrode so that the second opening overlaps the first pixel electrode;
removing at least part of a region overlapping the first pixel electrode of the second layer and the second counter electrode using the second metal mask;
forming, over the first counter electrode and the second counter electrode, a resist mask comprising an opening at a position overlapping the insulating layer;
exposing part of the insulating layer by removing at least part of a region overlapping the insulating layer of at least one of the first layer, the second layer, the first counter electrode, and the second counter electrode using the resist mask; and
forming a first protective layer covering the first counter electrode, the second counter electrode, and the insulating layer.
8 . The method for manufacturing a display apparatus according to claim 7 , further comprising:
forming a second protective layer over the first layer before the formation of the first counter electrode; and
forming a third protective layer over the second layer before the formation of the second counter electrode.
9 . The method for manufacturing a display apparatus according to claim 8 ,
wherein a thickness of the second protective layer and a thickness of the third protective layer are different from each other.
10 . The method for manufacturing a display apparatus according to claim 8 ,
wherein at least one of a metal oxide layer comprising indium, gallium, and zinc and a metal oxide layer comprising indium and tin is formed as each of the second protective layer and the third protective layer.
11 . The method for manufacturing a display apparatus according to claim 7 , further comprising:
forming a fourth protective layer over the first counter electrode before the placement of the first metal mask.
12 . The method for manufacturing a display apparatus according to claim 11 ,
wherein at least one of a metal oxide layer comprising indium, gallium, and zinc and a metal oxide layer comprising indium and tin is formed as the fourth protective layer.