Semiconductor structure with source/drain multi-layer structure and method for forming the same
A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes a gate structure formed over a fin structure, and a source/drain (S/D) epitaxial layer formed in the fin structure and adjacent to the gate structure. The semiconductor structure also includes a S/D silicide layer formed on the S/D epitaxial layer, and the S/D silicide layer has a first width, the S/D epitaxial layer has a second width, and the first width is smaller than the second width. The semiconductor structure includes a dielectric spacer between the gate structure and the S/D silicide layer, and a top surface of the dielectric spacer is lower than a top surface of the gate structure.
1. A semiconductor structure, comprising:
a gate structure formed over a fin structure, wherein the gate structure comprises a gate dielectric layer;
a source/drain (S/D) epitaxial layer formed in the fin structure and adjacent to the gate structure;
a S/D silicide layer formed on the S/D epitaxial layer, wherein the S/D silicide layer has a first width, the S/D epitaxial layer has a second width, and the first width is smaller than the second width; and
a dielectric spacer between the gate structure and the S/D silicide layer, wherein a top surface of the dielectric spacer is lower than a top surface of the gate structure, and an interface between the dielectric spacer and the S/D epitaxial layer is higher than a bottommost surface of the gate dielectric layer, wherein a topmost surface of the gate dielectric layer is higher than a top surface of the dielectric spacer.
2. The semiconductor structure as claimed in claim 1 , wherein the S/D epitaxial layer comprises a first S/D epitaxial layer and a second S/D epitaxial layer, and atop surface of the second epitaxial layer is higher than a top surface of the first epitaxial layer.
3. The semiconductor structure as claimed in claim 2 , wherein the top surface of the second S/D epitaxial layer is in direct contact with a bottom surface of the dielectric spacer.
4. The semiconductor structure as claimed in claim 2 , wherein the first S/D epitaxial layer comprises a silicon epitaxial layer with a first N-type dopant, and the second S/D epitaxial layer comprises a silicon epitaxial layer with a second N-type dopant that is different from the first N-type dopant.
5. The semiconductor structure as claimed in claim 4 , wherein an atomic radius of the first N-type dopant is greater than an atomic radius of the second N-type dopant.
6. The semiconductor structure as claimed in claim 1 , further comprising:
a contact plug formed over the S/D epitaxial layer, wherein the contact plug is separated from the dielectric spacer by a dielectric layer.
7. The semiconductor structure as claimed in claim 1 , further comprising:
a gate spacer formed on a sidewall surface of the gate structure, wherein a top surface of the dielectric spacer is lower than a top surface of the gate spacer.
8. The semiconductor structure as claimed in claim 1 , wherein the dielectric spacer has a curved top surface.
9. The semiconductor structure as claimed in claim 1 , wherein a bottom surface of the dielectric spacer is higher than a top surface of the fin structure.
10. The semiconductor structure as claimed in claim 1 , further comprising:
a gate spacer formed on a sidewall surface of the gate structure, wherein the interface is higher than a bottom surface of the gate spacer.
11. A semiconductor structure, comprising:
a gate structure formed over a fin structure, wherein the gate structure comprises a gate dielectric layer and a gate electrode layer;
a source/drain (S/D) epitaxial layer formed in the fin structure and adjacent to the gate structure, wherein the S/D epitaxial layer comprises a first S/D epitaxial layer and a second S/D epitaxial layer, and a top surface of the second epitaxial layer is higher than a top surface of the first epitaxial layer; and
a dielectric spacer between the gate structure and the S/D epitaxial layer, wherein a bottom surface of the dielectric spacer is higher than a bottommost surface of the gate dielectric layer, wherein an interface between the first S/D epitaxial layer and the second S/D epitaxial layer is aligned with a sidewall surface of the dielectric spacer.
12. The semiconductor structure as claimed in claim 11 , wherein the dielectric spacer is not in direct contact with the gate dielectric layer.
13. The semiconductor structure as claimed in claim 11 , further comprising:
a contact plug formed over the S/D epitaxial layer, wherein the contact plug is separated from the dielectric spacer by a dielectric layer.
14. The semiconductor structure as claimed in claim 13 , wherein a top surface of the dielectric spacer is lower than a top surface of the contact plug.
15. The semiconductor structure as claimed in claim 11 , wherein the first S/D epitaxial layer is doped with a first N-type dopant, and the second S/D epitaxial layer is doped with a second N-type dopant that is different from the first N-type dopant, and an atomic radius of the first N-type dopant is greater than an atomic radius of the second N-type dopant.
16. A method for forming a semiconductor structure, comprising:
forming a gate structure over a fin structure;
forming a source/drain (S/D) structure adjacent to the gate structure;
forming a blocking layer covering a top surface of the S/D structure;
forming a dielectric spacer on the top surface of the S/D structure and adjacent to the gate structure, wherein a topmost surface of the dielectric spacer is lower than a top surface of the gate structure;
after forming the dielectric spacer, removing the blocking layer from the top surface of the S/D structure;
forming a dielectric layer over the dielectric spacer and the gate structure;
removing a portion of the S/D structure to form an opening, wherein the opening extends from a top surface of the dielectric layer to a position lower than a top surface of the S/D structure; and
forming a contact plug in the opening.
17. The method for forming a semiconductor structure as claimed in claim 16 , further comprising:
forming a S/D silicide layer in the opening before forming the contact plug, wherein the S/D silicide layer is separated from the gate structure by the dielectric spacer.
18. The method for forming a semiconductor structure as claimed in claim 16 , further
forming a gate spacer over the fin structure and on a sidewall surface of the gate structure before forming the S/D structure; and
forming the dielectric spacer on a sidewall of the gate spacer, wherein the topmost surface of the dielectric spacer is lower than a top surface of the gate spacer.
19. The method for forming a semiconductor structure as claimed in claim 16 , wherein the S/D structure comprises a first S/D epitaxial layer and a second epitaxial layer, and the dielectric spacer is higher than a top surface of the first S/D epitaxial layer.
20. The method for forming a semiconductor structure as claimed in claim 16 , further comprising:
performing a plasma etching process to remove a portion of the dielectric spacer from a top surface of the dielectric spacer.