Granted Patent B2

US 12,273,051 · App. 18/081,493 · Granted Apr 8, 2025

Inventors: Thorsten Meiss (Darmstadt, DE); Alexander Sendobry (Muhltal, DE)

Assignee: Applied Materials, Inc.

H02N15/00

Abstract

Claims (56)

1. An apparatus for contactless transportation of a carrier, comprising:

the carrier, being a substrate carrier or a mask carrier;

a linear reluctance motor for providing both a contactless levitation and a contactless drive of the carrier, comprising:

one or more linear stators defining a transportation track for the carrier;

a mover connected to the carrier; and

a set of electromagnets and a first magnetic material, wherein the one or more linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and the one or more linear stators include the first magnetic material; and

a controller connected to the set of electromagnets.

2. The apparatus of claim 1 , wherein the controller is configured to control at least one electromagnet of the set of electromagnets to generate a magnetic field interacting with the first magnetic material to provide both a reluctance-based vertical force and a reluctance-based drive force acting on the mover.

3. The apparatus of claim 2 , wherein the reluctance-based vertical force and the reluctance-based drive force are individually controllable.

4. The apparatus of claim 2 , wherein the set of electromagnets includes a first electromagnet, wherein the controller is configured to:

control a first current in the first electromagnet to control a magnitude of the reluctance-based vertical force; and

control a second current in the first electromagnet to control a magnitude of the reluctance-based drive force.

5. The apparatus of claim 2 , further comprising:

one or more sensors for sensing at least a position of the carrier with respect to a transportation direction of the carrier,

the controller being configured to control the reluctance-based drive force in response to a signal provided by the one or more sensors to position the carrier in a target position with respect to the transportation direction.

6. The apparatus of claim 1 ,

wherein the set of electromagnets includes one or more first electromagnets and one or more second electromagnets, wherein the one or more first electromagnets face the one or more second electromagnets with respect to a transversal direction,

wherein the controller is configured to:

control the one or more first electromagnets and/or the one or more second electromagnets to provide a reluctance-based transversal force acting on the mover, wherein the reluctance-based transversal force is configured to position the carrier in a target position with respect to the transversal direction.

7. The apparatus of claim 1 , wherein at least one of the one or more linear stators includes a first comb structure and a second comb structure, wherein the first comb structure includes N first teeth forming first stator poles and the second comb structure includes N second teeth forming second stator poles, wherein each first tooth of the first comb structure faces a corresponding second tooth of the second comb structure.

8. The apparatus of claim 1 , wherein at least one of the one or more linear stators includes stator poles, wherein the mover includes mover poles, wherein:

at least one stator pole includes a pattern having a plurality of protrusions, a plurality of openings or a variation of magnetic properties configured for a contactless fine-alignment of the carrier; and/or

at least one mover pole includes a pattern having a plurality of protrusions, a plurality of openings or a variation of magnetic properties configured for a contactless fine-alignment of the carrier.

9. The apparatus of claim 1 , further comprising a vacuum chamber.

10. The apparatus of claim 1 , wherein the carrier is a substrate carrier including a slit for receiving a substrate.

11. The apparatus of claim 1 , wherein the mover includes:

a first set of mover poles forming a linear arrangement extending in a first direction for providing a movement of the carrier in the first direction; and

a second set of mover poles forming a linear arrangement extending in a second direction for providing a movement of the carrier in the second direction.

12. The apparatus of claim 1 , wherein at least one linear stator of the one or more linear stators includes one or more stator poles that are inclined with respect to a vertical direction.

13. The apparatus of claim 1 , wherein the mover includes a set of mover poles arranged to provide a reluctance-based angular force for moving the carrier over an angle.

14. A processing system for processing a substrate, comprising:

the apparatus for contactless transportation of a carrier according to claim 1 , the carrier being a substrate carrier; and

a processing device,

wherein the linear reluctance motor is configured to contactlessly transport the carrier to a processing position, wherein in the processing position the carrier is arranged for processing of a substrate supported by the carrier using the processing device.

15. A method for contactless transportation of a carrier, comprising:

controlling at least one electromagnet of a set of electromagnets of a linear reluctance motor, the linear reluctance motor comprising:

one or more linear stators defining a transportation track for the carrier, the carrier being a substrate carrier or a mask carrier;

a mover connected to the carrier;

the set of electromagnets; and

a first magnetic material,

wherein the one or more linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and the one or more linear stators include the first magnetic material,

wherein the at least one electromagnet is controlled to generate a magnetic field interacting with the first magnetic material to provide both a reluctance-based vertical force and a reluctance-based drive force acting on the mover.

16. The method of claim 15 , wherein the set of electromagnets includes a first electromagnet, wherein the method further comprises:

controlling a first current in the first electromagnet to control a magnitude of the reluctance-based vertical force; and

controlling a second current in the first electromagnet to control a magnitude of the reluctance-based drive force.

17. The method of claim 15 , further comprising:

sensing a position of the carrier with respect to a transportation direction using one or more sensors; and

controlling the reluctance-based drive force in response to a signal provided by the one or more sensors to position the carrier in a target position with respect to the transportation direction.

18. The method of claim 15 ,

wherein the set of electromagnets includes one or more first electromagnets and one or more second electromagnets, wherein the one or more first electromagnets face the one or more second electromagnets with respect to a transversal direction,

wherein the method further comprises:

controlling the one or more first electromagnets and/or the one or more second electromagnets to provide a reluctance-based transversal force acting on the mover, wherein the reluctance-based transversal force is configured to position the carrier in a target position with respect to the transversal direction.

19. The method of claim 15 , further comprising:

contactlessly transporting the carrier to a processing position using the linear reluctance motor; and

in the processing position, processing a substrate supported by the carrier using a processing device.

20. The method of claim 15 , wherein the method is a method for contactless transportation of a carrier in a vacuum chamber, wherein the one or more linear stators and the mover are disposed at least partially in the vacuum chamber.

Assignments (2)

Continuity (1)

References Cited (128)