Image sensors
An image sensor is provided. The image sensor includes: a semiconductor substrate including a photoelectric conversion region; a buried transmission gate electrode provided in a transmission gate trench; a fin-type active region provided between a first trench and a second trench which extend into the semiconductor substrate, wherein the fin-type active region includes a first source/drain region, a second source/drain region, and a channel region provided between the first and second source/drain regions; and a first gate electrode covering a top surface and both sidewalls of the fin-type active region, and inner walls of the first trench and the second trench. The channel region, the first source/drain region and the second source/drain region each have a first conductivity type. The photoelectric conversion region and the fin-type active region overlap along a vertical direction.
1 . An image sensor comprising:
a semiconductor substrate comprising a first surface, a second surface opposite to the first surface, and a photoelectric conversion region provided between the first surface and the second surface;
a buried transmission gate electrode provided in a transmission gate trench which extends into the semiconductor substrate from the first surface of the semiconductor substrate;
a fin-type active region provided between a first trench and a second trench which extend from the first surface of the semiconductor substrate into the semiconductor substrate, wherein the fin-type active region comprises a first source/drain region, a second source/drain region, and a channel region provided between the first source/drain region and the second source/drain region; and
a first gate electrode covering a top surface and both sidewalls of the fin-type active region, and inner walls of the first trench and the second trench,
wherein the channel region, the first source/drain region and the second source/drain region each have a first conductivity type, and
wherein the photoelectric conversion region and the fin-type active region overlap along a direction perpendicular to the first surface of the semiconductor substrate.
2 . The image sensor of claim 1 , wherein the first gate electrode comprises:
a first vertical portion provided in the first trench and on a first sidewall of the fin-type active region;
a second vertical portion provided in the second trench and on a second sidewall of the fin-type active region; and
a horizontal portion provided on the top surface of the fin-type active region and integrally connected to the first vertical portion and the second vertical portion.
3 . The image sensor of claim 1 , wherein the first conductivity type is an n-type conductivity type, and
wherein the photoelectric conversion region comprises an n-type impurity.
4 . The image sensor of claim 3 , further comprising:
a lower barrier region provided between a bottom of the fin-type active region and the photoelectric conversion region; and
a lateral barrier region surrounding the fin-type active region,
wherein the lower barrier region comprises a p-type impurity, and the lateral barrier region comprises a p-type impurity or an insulation layer.
5 . The image sensor of claim 4 , further comprising a pixel device isolation layer provided in a pixel trench of the semiconductor substrate and defining a plurality of pixels in the semiconductor substrate,
wherein the lateral barrier region and the lower barrier region are in contact with the pixel device isolation layer.
6 . The image sensor of claim 1 , further comprising:
a gate insulation layer provided between the first gate electrode and the fin-type active region and conformally provided on an inner wall of the first trench and on an inner wall of the second trench;
a lower barrier region provided between a bottom of the fin-type active region and the photoelectric conversion region; and
a lower insulation layer provided in a bottom hole provided between a bottom of the first trench and the lower barrier region and between a bottom of the second trench and the lower barrier region.
7 . The image sensor of claim 6 , wherein the lower insulation layer protrudes outward with respect to sidewalls of the first trench and sidewalls of the second trench, and
wherein the bottom of the first trench and the bottom of the second trench are in contact with the lower insulation layer.
8 . The image sensor of claim 7 , wherein a first portion of the gate insulation layer provided on the bottom of the first trench and a second portion of the gate insulation layer provided on the bottom of the second trench are connected to a top surface of the lower insulation layer.
9 . The image sensor of claim 6 , further comprising a lateral barrier region surrounding the fin-type active region, the first trench, and the second trench,
wherein a bottom of the lateral barrier region is in contact with a top surface of the lower insulation layer.
10 . The image sensor of claim 1 , wherein a bottom surface of the fin-type active region is provided in bottom holes arranged at bottoms of the first trench and the second trench, and
wherein the first gate electrode covers a top surface, the bottom surface, and both sidewalls of the fin-type active region and is provided on the inner walls of the first trench, the inner walls of the second trench, and inner walls of the bottom holes.
11 . The image sensor of claim 1 , wherein the fin-type active region comprises a first fin-type active region and a second fin-type active region spaced apart from each other, and
wherein the first gate electrode covers both sidewalls and a top surface of the first fin-type active region and both sidewalls and a top surface of the second fin-type active region.
12 . The image sensor of claim 11 , further comprising a lower barrier region provided between a bottom of the first fin-type active region and the photoelectric conversion region, and between a bottom of the second fin-type active region and the photoelectric conversion region.
13 . The image sensor of claim 1 , wherein the fin-type active region comprises a first fin-type active region and a second fin-type active region spaced apart from each other,
wherein a bottom surface of the first fin-type active region and a bottom surface of the second fin-type active region are defined by bottom holes, and
wherein the first gate electrode covers both sidewalls, a top surface, and the bottom surface of the first fin-type active region and both sidewalls, a top surface, and the bottom surface of the second fin-type active region.
14 . The image sensor of claim 1 , wherein the buried transmission gate electrode comprises:
a first buried transmission gate electrode arranged in a first transmission gate trench; and
a second buried transmission gate electrode arranged in a second transmission gate trench that is spaced apart from the first transmission gate trench.
15 . The image sensor of claim 1 , wherein, when viewed in plan, the buried transmission gate electrode has a ring shape, and
wherein the buried transmission gate electrode at least partially surrounds a floating diffusion region provided in the semiconductor substrate.
16 . An image sensor comprising:
a semiconductor substrate comprising a first surface, a second surface opposite to the first surface, and a photoelectric conversion region provided between the first surface and the second surface;
a buried transmission gate electrode provided in a transmission gate trench which extends into the semiconductor substrate from the first surface of the semiconductor substrate;
a fin-type active region provided between a first trench and a second trench which extend into the semiconductor substrate from the first surface of the semiconductor substrate, wherein the fin-type active region comprises a first portion which extends in a first direction parallel to the first surface of the semiconductor substrate, a second portion which extends in a second direction parallel to the first surface of the semiconductor substrate and different from the first direction, a bent portion connected between the first portion and the second portion, and an n-type impurity; and
a first gate electrode covering a top surface and both sidewalls of the fin-type active region.
17 . The image sensor of claim 16 , wherein the first gate electrode comprises:
a first gate portion covering the first portion of the fin-type active region;
a second gate portion covering the second portion of the fin-type active region; and
a gate bent portion covering the bent portion of the fin-type active region.
18 . The image sensor of claim 16 , wherein, when viewed in plan, the fin-type active region and the first gate electrode each have an L shape.
19 . The image sensor of claim 16 , wherein the fin-type active region further comprises a third portion provided between the first portion and the second portion, and
wherein the third portion extends in a third direction offset from each of the first direction and the second direction by more than 90 degrees and less than 180 degrees.
20 . An image sensor comprising:
a semiconductor substrate comprising a first surface, a second surface opposite to the first surface, a plurality of pixels separated by pixel trenches formed in the semiconductor substrate, and photoelectric conversion regions provided in the plurality of pixels, respectively;
a buried transmission gate electrode provided in a transmission gate trench which extends into the semiconductor substrate from the first surface of the semiconductor substrate;
a floating diffusion region provided on one edge portion of the buried transmission gate electrode in the semiconductor substrate;
a fin-type active region provided between a first trench and a second trench which extend into the semiconductor substrate from the first surface of the semiconductor substrate, wherein the fin-type active region comprises a first portion which extends in a first direction parallel to the first surface of the semiconductor substrate, a second portion which extends in a second direction parallel to the first surface of the semiconductor substrate and different from the first direction, a bent portion connected between the first portion and the second portion, and an n-type impurity;
a first gate electrode provided in the first trench and the second trench, covering a top surface and both sidewalls of the fin-type active region, and comprising a first gate portion covering the first portion of the fin-type active region, a second gate portion covering the second portion of the fin-type active region, and a gate bent portion covering the bent portion of the fin-type active region; and
a lower barrier region provided between a bottom of the fin-type active region and the photoelectric conversion regions.