Structures for low temperature bonding using nanoparticles
A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.
1. A bonded structure, comprising:
a first component including a substrate having a first dielectric surface and a first conductive feature at the first dielectric surface, the first conductive feature comprising a first barrier layer thereover; and
a second component including a substrate having a second dielectric surface and a second conductive feature at the second dielectric surface, the second conductive feature comprising a second barrier layer thereover, wherein:
the first dielectric surface is directly bonded to the second dielectric surface without an underfill, and
the first conductive feature is bonded to second conductive feature by way of a conductive bond region between the first and second barrier layers, the conductive bond region comprising a different material from the first and second barrier layers, wherein the bond region comprises structural evidence of conductive nanoparticles employed in bonding the first conductive feature to the second conductive feature, and the side surfaces of the bond region are more rough than side surfaces of the first and second conductive features.
2. The structure of claim 1 , wherein the first conductive feature and the second conductive feature each comprise copper.
3. The structure of claim 1 , further comprising microvoids within the bond region, wherein the microvoids have a maximum width below 0.5 micron.
4. The structure of claim 1 , wherein the bond region comprises copper.
5. The structure of claim 1 , wherein the bond region comprises at least one metal selected from the group consisting of copper, gold, nickel, silver and a combination of metals, and the bond region comprises structural evidence of conductive nanoparticles employed in bonding the first conductive feature to the second conductive feature.
6. The structure of claim 1 , wherein the barrier layers each comprise a barrier metal.
7. The structure of claim 6 , wherein the barrier metal comprises a nickel or a nickel alloy.
8. A first electronic element configured for directly bonding with a second electronic element, the first electronic element comprising:
a substrate having a first dielectric surface configured to directly bond with a second dielectric surface of the second electronic element;
a conductive feature at the dielectric surface;
a barrier layer over the conductive feature; and
a conductive nanoparticle layer over the barrier layer such that the barrier layer is between the conductive feature and the conductive nanoparticle layer, the conductive nanoparticle layer configured to directly bond with a second conductive feature at the second dielectric surface of the second electronic element.
9. The electronic element of claim 8 , wherein the conductive feature is recessed below the dielectric surface.
10. The electronic element of claim 9 , wherein the conductive feature comprises copper.
11. The electronic element of claim 9 , wherein the barrier layer comprises a barrier metal.
12. The electronic element of claim 8 , wherein conductive nanoparticles of the conductive particle layer have long dimensions smaller than 100 nm.
13. The electronic element of claim 8 , further comprising an array of the conductive feature, each of the conductive features being recessed below the dielectric surface and including the barrier layer and the conductive nanoparticle layer thereover.
14. The electronic element of claim 8 , wherein the barrier layer comprises a layer of nanoparticles.
15. A first electronic element configured for directly bonding with a second electronic element, the first electronic element comprising:
a substrate having a first dielectric surface structured for directly bonding with a second dielectric surface of the second electronic element;
a conductive feature at the first dielectric surface; and
a conductive nanoparticle layer for directly bonding with a second conductive feature at the second dielectric surface of the second electronic element, wherein nanoparticles of the nanoparticle layer are smaller than grains of the conductive feature.
16. The electronic element of claim 15 , further comprising a barrier layer between the conductive feature and the conductive nanoparticle layer.
17. The electronic element of claim 16 , wherein the barrier layer lines a recess between an upper surface of the conductive feature and the first dielectric surface.