IP Library › Granted Patent US 12,660,646
Granted Patent B2
US 12,660,646 · App. 18/151,583 · Granted Jun 16, 2026

Semiconductor package and method of forming the same

Inventors: Hao-Cheng Hou (Hsinchu, TW); Tsung-Ding Wang (Tainan, TW); Jung Wei Cheng (Hsinchu, TW); Yu-Min Liang (Zhongli City, TW); Chien-Hsun Lee (Chu-tung Town, TW); Shang-Yun Hou (Jubei City, TW); Wei-Yu Chen (Hsinchu, TW); Collin Jordon Fleshman (Hsinchu, TW); Kuo-Lung Pan (Hsinchu, TW); Shu-Rong Chun (Hsinchu, TW); Sheng-Chi Lin (Hsinchu, TW)
Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
H01L23/5385H01L21/561H01L23/3121H01L23/481H01L23/562H01L24/19H01L24/20H01L25/18H01L25/50H10B80/00H01L24/16H01L24/29H01L24/32H01L24/73H01L2224/16227H01L2224/19H01L2224/211H01L2224/2929H01L2224/29386H01L2224/32225H01L2224/73204H01L2924/0503H01L2924/05432H01L2924/05442H01L2924/0665
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,660,646
App. No.
18/151,583
Granted
Jun 16, 2026
Kind
B2
Abstract

A method includes forming a composite package substrate. The formation of the composite package substrate includes encapsulating an interconnect die in an encapsulant, with the interconnect die including a plurality of through-vias therein, and forming a first plurality of redistribution lines (RDLs) and a second plurality of RDLs on opposite sides of the interconnect die. The method further includes bonding an organic package substrate to the composite package substrate, and bonding a first package component and a second package component to the first plurality of RDLs. The first package component and the second package component are electrically interconnected through the interconnect die and the first plurality of RDLs.

Claims (40)

1 . A method comprising:

forming a composite package substrate comprising:

encapsulating an interconnect die in a first encapsulant, wherein the interconnect die comprises a first plurality of through-vias therein; and

forming a first plurality of redistribution lines (RDLs) and a second plurality of RDLs on opposite sides of the interconnect die;

bonding an organic package substrate to the composite package substrate; and

bonding a first package component and a second package component to the first plurality of RDLs, wherein the first package component and the second package component are electrically interconnected through the interconnect die and the first plurality of RDLs.

2 . The method of claim 1 , wherein the first plurality of RDLs and the second plurality of RDLs are interconnected through the first plurality of through-vias.

3 . The method of claim 1 further comprising:

forming a second plurality of through-vias, wherein the second plurality of through-vias are encapsulated in the first encapsulant, and wherein the first plurality of RDLs and the second plurality of RDLs are further interconnected through the second plurality of through-vias.

4 . The method of claim 1 , wherein the organic package substrate and the first package component are on opposite sides of the composite package substrate.

5 . The method of claim 1 , wherein the second plurality of RDLs are formed after the first plurality of RDLs are formed, and wherein the method further comprises bonding the interconnect die to the first plurality of RDLs.

6 . The method of claim 1 , wherein the interconnect die and the first encapsulant collectively form a part of a reconstructed wafer, and wherein both of the first plurality of RDLs and the second plurality of RDLs are formed starting from opposite sides of the reconstructed wafer.

7 . The method of claim 1 further comprising, after the organic package substrate is bonded to the composite package substrate, encapsulating the organic package substrate in a second encapsulant.

8 . The method of claim 7 further comprising encapsulating a stiffener ring in the second encapsulant.

9 . The method of claim 7 further comprising attaching a stiffener ring on the second encapsulant.

10 . The method of claim 7 further comprising:

forming an additional plurality of through-vias on the first plurality of RDLs, wherein the additional plurality of through-vias are further encapsulated in the second encapsulant.

11 . The method of claim 1 further comprising, before the organic package substrate is bonded to the composite package substrate, bonding a passive device die to the composite package substrate, wherein the passive device die is between the organic package substrate and the composite package substrate.

12 . The method of claim 1 , wherein the organic package substrate is a cored substrate comprising a dielectric core and conductive pipes in the dielectric core.

13 . A method comprising:

forming a composite package substrate comprising:

forming a first plurality of redistribution lines (RDLs);

bonding an interconnect die to the first plurality of RDLs, wherein the interconnect die comprises:

a semiconductor substrate; and

a first plurality of through-vias penetrating through the semiconductor substrate;

encapsulating the interconnect die in a first encapsulant; and

forming a second plurality of RDLs on an opposite side of the first encapsulant than the first plurality of RDLs, wherein the first plurality of RDLs are electrically connected to the second plurality of RDLs through the first plurality of through-vias;

bonding a first package component and a second package component over the composite package substrate, wherein the first package component and the second package component are electrically interconnected through the interconnect die; and

bonding a package substrate underlying the composite package substrate.

14 . The method of claim 13 further comprising encapsulating a second plurality of through-vias in the first encapsulant, wherein the first plurality of RDLs are further electrically connected to the second plurality of RDLs through the second plurality of through-vias.

15 . The method of claim 13 further comprising disposing a second encapsulant comprising portions on opposite sidewalls of the package substrate.

16 . The method of claim 13 , wherein first sidewalls of the package substrate are vertically aligned to respective second sidewalls of the composite package substrate.

17 . The method of claim 13 , wherein the composite package substrate comprises first sidewalls laterally recessed from respective second sidewalls of the package substrate.

18 . A method comprising:

bonding a composite package substrate underlying a first device die and a second device die, the composite package substrate comprising:

an interconnect die electrically interconnecting the first device die and the second device die; and

a molding compound encapsulating the interconnect die therein; and

joining a package substrate underlying the composite package substrate, wherein the package substrate is electrically connected to the first device die through the interconnect die, wherein the composite package substrate is joined to the package substrate through solder regions, and wherein the solder regions are in physical contact with both of the composite package substrate and the package substrate.

19 . The method of claim 18 further comprising molding a plurality of through-vias in the molding compound, wherein the plurality of through-vias electrically connect a plurality of conductive features over the interconnect die to the package substrate.

20 . The method of claim 18 further comprising attaching a stiffener ring to the composite package substrate.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 1, 2023
From: HOU, HAO-CHENG; WANG, TSUNG-DING; CHENG, JUNG WEI; LIANG, YU-MIN; LEE, CHIEN-HSUN; HOU, SHANG-YUN; CHEN, WEI-YU; FLESHMAN, COLLIN JORDON; PAN, KUO-LUNG; CHUN, SHU-RONG; LIN, SHENG-CHI
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 063496/0233 →
Continuity (3)
Provisional Application 63375440 · Sep 13, 2022
Provisional Application 63322852 · Mar 23, 2022
Related Publication 20230307375A1 · Sep 28, 2023
References Cited (46)
US 8361842B2 · Yu et al. · 2013 [cited by applicant]
US 8680647B2 · Yu et al. · 2014 [cited by applicant]
US 8703542B2 · Lin et al. · 2014 [cited by applicant]
US 8759964B2 · Pu et al. · 2014 [cited by applicant]
US 8778738B1 · Lin et al. · 2014 [cited by applicant]
US 8785299B2 · Mao et al. · 2014 [cited by applicant]
US 8803306B1 · Yu et al. · 2014 [cited by applicant]
US 8809996B2 · Chen et al. · 2014 [cited by applicant]
US 8829676B2 · Yu et al. · 2014 [cited by applicant]
US 8877554B2 · Tsai et al. · 2014 [cited by applicant]
US 9653442B2 · Yu · 2017 [cited by examiner]
US 10115647B2 · Huang · 2018 [cited by examiner]
US 10720401B2 · Ting · 2020 [cited by examiner]
US 11094635B2 · Chang et al. · 2021 [cited by applicant]
US 11355463B2 · Wu et al. · 2022 [cited by applicant]
US 11955442B2 · Wu et al. · 2024 [cited by applicant]
US 20110291288A1 · Wu et al. · 2011 [cited by applicant]
US 20130026468A1 · Yoshimuta et al. · 2013 [cited by applicant]
US 20130062760A1 · Hung et al. · 2013 [cited by applicant]
US 20130062761A1 · Lin et al. · 2013 [cited by applicant]
US 20130168848A1 · Lin et al. · 2013 [cited by applicant]
US 20130307140A1 · Huang et al. · 2013 [cited by applicant]
US 20140203429A1 · Yu et al. · 2014 [cited by applicant]
US 20140225222A1 · Yu et al. · 2014 [cited by applicant]
US 20140252646A1 · Hung et al. · 2014 [cited by applicant]
US 20140264930A1 · Yu et al. · 2014 [cited by applicant]
US 20160197037A1 · Starkston et al. · 2016 [cited by applicant]
US 20170110407A1 · Chaware et al. · 2017 [cited by applicant]
US 20190109122A1 · Ong et al. · 2019 [cited by applicant]
US 20200043853A1 · Kim et al. · 2020 [cited by applicant]
US 20200402816A1 · Lin · 2020 [cited by examiner]
US 20210020574A1 · Yu et al. · 2021 [cited by applicant]
US 20210193579A1 · Ganesan et al. · 2021 [cited by applicant]
US 20210313271A1 · Tsai et al. · 2021 [cited by applicant]
US 20210366863A1 · Wu et al. · 2021 [cited by applicant]
US 20230307375A1 · Hou · 2023 [cited by examiner]
US 20230343765A1 · Jeng · 2023 [cited by examiner]
US 20240071847A1 · Liao · 2024 [cited by examiner]
US 20240071849A1 · Chen · 2024 [cited by examiner]
US 20240162166A1 · Huang · 2024 [cited by examiner]
US 20240234273A1 · Liu · 2024 [cited by examiner]
US 20240274590A1 · Yu · 2024 [cited by examiner]
KR 20200027419A · 2020 [cited by applicant]
KR 20210133106A · 2021 [cited by applicant]
KR 20210143633A · 2021 [cited by applicant]
TW 202139402A · 2021 [cited by applicant]