Structure including SiOCN layer and method of forming same
A method for forming a layer comprising SiOCN on a substrate is disclosed. An exemplary method includes thermally depositing the layer comprising SiOCN on a surface of the substrate. The layer comprising SiOCN can be used for various applications, including spacers, etch stop layers, and etch resistant layers.
1. A method of forming a structure, the method comprising the steps of:
using a thermal cyclic deposition process, depositing a layer comprising SiOCN on a surface of a substrate,
wherein a temperature of a susceptor within the reaction chamber during the step of depositing the layer comprising SiOCN is between about 300° C. and about 600° C., and
wherein the thermal cyclic deposition process comprises providing a silicon precursor comprising tetramethyl bis(2,2-dimethylhydrazino) disilane.
2. The method of claim 1 , wherein the layer comprising SiOCN is conformally deposited onto the substrate.
3. The method of claim 1 , wherein only a precursor and no reactant are used during the step of depositing a layer comprising SiOCN.