Substrate treatment apparatus and semiconductor device manufacturing method using the same
A substrate treatment apparatus may include a chucking stage supporting a substrate, a sinusoidal generator supplying a sinusoidal wave to the chucking stage, a non-sinusoidal generator supplying a non-sinusoidal wave to the chucking stage, and a mixer between each of the sinusoidal and non-sinusoidal generators and the chucking stage. The chucking stage may include a chuck body and a plasma electrode in the chuck body. The mixer may include a high pass filter between the sinusoidal generator and the plasma electrode, a low pass filter between the non-sinusoidal generator and the plasma electrode, and a band stop filter between the low pass filter and the plasma electrode.
1. A substrate treatment apparatus, comprising:
a chucking stage supporting a substrate;
a sinusoidal generator configured to supply a sinusoidal wave to the chucking stage;
a non-sinusoidal generator configured to supply a non-sinusoidal wave to the chucking stage; and
a mixer between each of the sinusoidal and non-sinusoidal generators and the chucking stage,
wherein the chucking stage comprises:
a chuck body; and
a plasma electrode in the chuck body, and
wherein the mixer comprises:
a high pass filter placed between the sinusoidal generator and the plasma electrode, and configured to receive the sinusoidal wave from the sinusoidal generator and transmit the sinusoidal wave to the plasma electrode;
a low pass filter placed between the non-sinusoidal generator and the plasma electrode, and configured to receive the non-sinusoidal wave from the non-sinusoidal generator; and
a band stop filter placed between the low pass filter and the plasma electrode, and configured to receive the non-sinusoidal wave from the low pass filter and transmit the non-sinusoidal wave to the plasma electrode.
2. The substrate treatment apparatus of claim 1 , wherein the chucking stage further comprises:
a chucking electrode placed at a level higher than the plasma electrode in the chuck body.
3. The substrate treatment apparatus of claim 2 , further comprising:
a DC power generator configured to supply a DC power to the chucking electrode.
4. The substrate treatment apparatus of claim 2 , wherein the chucking stage further comprises:
a heater placed between the chucking electrode and the plasma electrode in the chuck body.
5. The substrate treatment apparatus of claim 1 , wherein the chucking stage further comprises:
a plasma power delivery rod connected to the mixer by extending downward from the plasma electrode, and configured to supply the sinusoidal wave and the non-sinusoidal wave from the mixer to the plasma electrode.
6. The substrate treatment apparatus of claim 1 , wherein the non-sinusoidal wave has a frequency of 200 kHz to 600 kHz, and
wherein the sinusoidal wave has a frequency of 50 MHz to 70 MHz.
7. The substrate treatment apparatus of claim 1 , further comprising:
a substrate treatment chamber configured to provide a process space,
wherein the chucking stage is placed in the substrate treatment chamber, and
each of the sinusoidal and non-sinusoidal generators is placed outside the substrate treatment chamber.
8. The substrate treatment apparatus of claim 1 , wherein the non-sinusoidal generator has a bipolar output structure.
9. A substrate treatment apparatus, comprising:
a substrate treatment chamber configured to provide a process space;
a chucking stage placed in the substrate treatment chamber, supporting a substrate, and including a plasma electrode;
a sinusoidal generator configured to supply a sinusoidal wave to the plasma electrode;
a non-sinusoidal generator configured to supply a non-sinusoidal wave to the plasma electrode; and
a mixer connected to each of the sinusoidal and non-sinusoidal generators,
wherein the mixer comprises:
a low pass filter placed between the non-sinusoidal generator and the plasma electrode, and configured to receive the non-sinusoidal wave from the non-sinusoidal generator; and
a band stop filter placed between the low pass filter and the plasma electrode, and configured to receive the non-sinusoidal wave from the low pass filter.
10. The substrate treatment apparatus of claim 9 , wherein the mixer further comprises:
a high pass filter placed between the sinusoidal generator and the plasma electrode, and configured to receive the sinusoidal wave from the sinusoidal generator.
11. The substrate treatment apparatus of claim 9 , further comprising:
a shower head, which is placed in the process space and is spaced apart from the chucking stage in an upward direction.
12. The substrate treatment apparatus of claim 9 , wherein the sinusoidal generator, the non-sinusoidal generator, and the mixer are placed outside the process space.
13. The substrate treatment apparatus of claim 12 , wherein the chucking stage is placed in a lower portion of the process space, and wherein the mixer is placed below the substrate treatment chamber.
14. The substrate treatment apparatus of claim 9 , wherein the chucking stage further comprises:
a chuck body supporting the substrate;
a chucking electrode in the chuck body; and
a heater placed between the chucking electrode and the plasma electrode in the chuck body.
15. The substrate treatment apparatus of claim 9 , wherein the chucking stage further comprises:
a plasma power delivery rod connected to the mixer by extending downward from the plasma electrode, and
wherein the non-sinusoidal wave, which is generated by the non-sinusoidal generator, sequentially pass through the low pass filter, the band stop filter, and the plasma power delivery rod and is supplied to the plasma electrode.
16. A method of manufacturing a semiconductor device, the method comprising:
placing a substrate in substrate treatment apparatus;
supplying a non-sinusoidal wave to a plasma electrode of the substrate treatment apparatus; and
supplying a sinusoidal wave to the plasma electrode, wherein:
the supplying of the non-sinusoidal wave to the plasma electrode includes transmitting the non-sinusoidal wave, which is generated by a non-sinusoidal generator, to the plasma electrode through a mixer,
the supplying of the sinusoidal wave to the plasma electrode includes transmitting the sinusoidal wave, which is generated by a sinusoidal generator, to the plasma electrode through the mixer, and
the transmitting of the non-sinusoidal wave to the plasma electrode through the mixer includes allowing the non-sinusoidal wave, which is generated by the non-sinusoidal generator, to pass through a low pass filter and a band stop filter in the mixer.
17. The method of claim 16 , wherein the transmitting of the sinusoidal wave to the plasma electrode through the mixer includes allowing the sinusoidal wave, which is generated by the sinusoidal generator, to pass through a high pass filter in the mixer.
18. The method of claim 16 , wherein the transmitting of the non-sinusoidal wave to the plasma electrode through the mixer includes allowing the non-sinusoidal wave, which is generated by the non-sinusoidal generator, to sequentially pass through the low pass filter and the band stop filter.
19. The method of claim 16 , wherein the supplying of the non-sinusoidal wave to the plasma electrode and the supplying of the sinusoidal wave to the plasma electrode are performed simultaneously.
20. The method of claim 19 , wherein the non-sinusoidal wave and the sinusoidal wave are mixed with each other in the mixer and then are transmitted to the plasma electrode.