Semiconductor device and method for forming the same
View Patent ↗A semiconductor device includes a substrate, a semiconductor fin, a gate structure, a source structure, a drain structure, a source contact, and a drain contact. The semiconductor fin extends upwardly from the substrate. The gate structure extends across the semiconductor fin. The source structure is on the semiconductor fin. The drain structure is on the semiconductor fin, in which the source and drain structures are respectively on opposite sides of the gate structure in a plan view. The source contact lands on the source structure and forms a rectangular pattern in the plan view. The drain contact lands on the drain structure and forms a circular pattern in the plan view, in which the rectangular pattern of the source contact has a length greater than a longest dimension of the circular pattern of the drain contact.
1 . A semiconductor device, comprising:
a transistor comprising:
a substrate;
a semiconductor fin extending upwardly from the substrate;
a gate structure of the transistor extending across the semiconductor fin along a direction;
a source structure of the transistor on the semiconductor fin;
a drain structure of the transistor on the semiconductor fin, wherein the source and drain structures are respectively on opposite sides of the gate structure;
a source contact landing on the source structure; and
a drain contact landing on the drain structure, wherein the source contact and the drain contact have different lengths along the direction, and have different profiles in a plan view.
2 . The semiconductor device of claim 1 , wherein, in the plan view, the source contact has a rectangular profile, and the drain contact has a circular profile.
3 . The semiconductor device of claim 1 , wherein the source contact has a longer length than the drain contact along the direction.
4 . The semiconductor device of claim 1 , wherein in a cross section view, a maximal width of the source contact is greater than a maximal width of the source structure.
5 . The semiconductor device of claim 1 , wherein the drain contact has a longer length than the source contact along the direction.
6 . The semiconductor device of claim 1 wherein the source contact extends beyond a longitudinal end of the gate structure when viewed in a first cross-section taken along the direction.
7 . The semiconductor device of claim 1 wherein the drain contact extends beyond a longitudinal end of the gate structure when viewed in a first cross-section taken along the direction.
8 . The semiconductor device of claim 1 , further comprising
a source via landing on the source contact, a drain via landing on the drain contact,
a first metal line in contact with the source via landing; and
a second metal line in contact with the drain via landing,
wherein the first and second metal lines extend along a second direction substantially parallel to the semiconductor fin.
9 . The semiconductor device of claim 8 wherein source contact extends in the direction past a longitudinal side of the second metal line.
10 . A semiconductor device, comprising:
a transistor comprising:
a first fin extending in a first direction and having a first epitaxial structure and a second epitaxial structure:
a gate extending in a second direction perpendicular to the first direction, wherein the first and second epitaxial structures are respectively on opposite sides of the gate in a plan view;
a first contact in direct contact with the first epitaxial structure and laterally extending beyond a longitudinal end of the gate when viewed in a first cross-section taken along the second direction; and
a second contact in direct contact with the second epitaxial structure, wherein, in the plan view, the first contact and the second contact have different lengths along the second direction.
11 . The semiconductor device of claim 10 , wherein the first contact has a bottom end in contact with a side surface of the first epitaxial structure.
12 . The semiconductor device of claim 10 , further comprising a first via landing on the first contact and a second via landing on the second contact.
13 . The semiconductor device of claim 12 further comprising a metal line in contact with the second via and extending along a lengthwise direction of the semiconductor fin, wherein the first contact extends past a longitudinal side of the metal line.
14 . The semiconductor device of claim 13 wherein the metal line overlaps the semiconductor fin.
15 . The semiconductor device of claim 13 further comprising a second metal line extending parallel to the metal line and in contact with the first via.
16 . A semiconductor device, comprising:
a transistor comprising:
a first fin extending in a first direction and having a first source and a first drain;
a gate extending in a second direction perpendicular to the first direction, wherein the first source and the first drain are respectively on opposite sides of the gate in a plan view;
a first source contact in direct contact with the first source; and
a first drain contact in direct contact with the first drain and laterally extending beyond a longitudinal end of the gate when viewed in a first cross-section taken along the second direction,
wherein, in the plan view, the first source contact and the first drain contact have different lengths along the second direction.
17 . The semiconductor device of claim 16 , wherein the drain contact has a longer length than the source contact along the direction.
18 . The semiconductor device of claim 16 , further comprising
a source via landing on the source contact, a drain via landing on the drain contact,
a first metal line in contact with the source via landing; and
a second metal line in contact with the drain via landing,
wherein the first and second metal lines extend along a second direction substantially parallel to the semiconductor fin.