IP Library › Granted Patent US 12,082,447
Granted Patent B2
US 12,082,447 · App. 18/314,915 · Granted Sep 3, 2024

OLED panel with inorganic pixel encapsulating barrier

Inventors: Ji-young Choung (Hwaseong-si, KR); Dieter Haas (San Jose, CA); Yu Hsin Lin (Zhubei, TW); Jungmin Lee (Santa Clara, CA); Seong Ho Yoo (San Ramon, CA); Si Kyoung Kim (Gwangju-si, KR)
Assignee: Applied Materials, Inc.
H10K59/122H10K50/84H10K50/844H10K71/00H10K59/1201
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Quick Facts
Patent No.
US 12,082,447
App. No.
18/314,915
Granted
Sep 3, 2024
Kind
B2
Abstract

Embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic light-emitting diode (OLED) display. The device includes a plurality of sub-pixels, each sub-pixel of the plurality of sub-pixels defined by adjacent pixel-defining layer (PDL) structures with inorganic overhang structures disposed on the PDL structures, each sub-pixel having an anode, organic light-emitting diode (OLED) material disposed on the anode, and a cathode disposed on the OLED material. The device is made by a process including the steps of: depositing the OLED material and the cathode by evaporation deposition, and depositing an encapsulation layer disposed over the cathode.

Claims (52)

1. A method of forming a device, comprising:

positioning a substrate having:

an anode,

adjacent pixel-defining layer (PDL) structures disposed over the substrate, and

inorganic overhang structures defining wells of sub-pixels disposed over an upper surface of the PDL structures, the inorganic overhang structures having an upper portion having a bottom surface contacting and wider than a top surface of a lower portion;

depositing an organic light-emitting diode (OLED) material over the anode;

depositing a cathode over the OLED material, the cathode extending under the inorganic overhang structures adjacent to each sub-pixel and contacting a sidewall of the lower portion of the inorganic overhang structures, a cathode material of the cathode is different from a material of the upper portion;

depositing a first encapsulation layer over the cathode, the first encapsulation layer extends under at least a portion of the inorganic overhang structures past the cathode along the sidewall of the lower portion, and contacts the bottom surface of the upper portion of the inorganic overhang structures; and

depositing a second encapsulation layer over the first encapsulation layer, wherein the second encapsulation layer is disposed within a well of each sub pixel and on the upper portion of the inorganic overhang structures.

2. The method of claim 1 , wherein:

the upper portion comprises a first inorganic material, wherein the first inorganic material is conductive or nonconductive; or

the lower portion comprises a second inorganic material, wherein the second inorganic material is conductive or nonconductive.

3. The method of claim 1 , further comprising an assistant cathode disposed under the lower portion.

4. The method of claim 3 , wherein the cathode contacts a top surface of the assistant cathode.

5. The method of claim 1 , wherein each of the inorganic overhang structures comprises one of:

the upper portion of a non-conductive inorganic material and the lower portion of a conductive inorganic material;

the upper portion of the conductive inorganic material and the lower portion of the conductive inorganic material;

the upper portion of the non-conductive inorganic material, the lower portion of the non-conductive inorganic material, and an assistant cathode disposed under the lower portion; or

the upper portion of the conductive inorganic material, the lower portion of the non-conductive inorganic material, and the assistant cathode disposed under the lower portion.

6. The method of claim 1 , wherein the second encapsulation layer is a global passivation layer.

7. The method of claim 1 , wherein the substrate is a pre-patterned indium tin oxide (ITO) glass substrate.

8. The method of claim 1 , wherein the OLED material comprises a hole injection layer (HIL), a hole transport layer (HTL), an emissive layer (EML), and an electron transport layer (ETL).

9. A method of forming a device, comprising:

positioning a substrate having:

an anode,

adjacent pixel-defining layer (PDL) structures disposed over the substrate, and

inorganic overhang structures defining wells of sub-pixels disposed over an upper surface of the PDL structures, the inorganic overhang structures having an upper portion having a bottom surface contacting and wider than a top surface of a lower portion, wherein

the upper portion comprises a first inorganic material, wherein the first inorganic material is conductive or nonconductive; or

the lower portion comprises a second inorganic material, wherein the second inorganic material is conductive or nonconductive;

depositing an organic light-emitting diode (OLED) material over the anode;

depositing a cathode over the OLED material, the cathode extending under the inorganic overhang structures adjacent to each sub-pixel and contacting a sidewall of the lower portion of the inorganic overhang structures, a cathode material of the cathode is different from a material of the upper portion;

depositing a first encapsulation layer over the cathode, the first encapsulation layer extends under at least a portion of the inorganic overhang structures past the cathode along the sidewall of the lower portion, and contacts the bottom surface of the upper portion of the inorganic overhang structures; and

depositing a second encapsulation layer over the first encapsulation layer, wherein the second encapsulation layer is disposed within a well of each sub pixel and on the upper portion of the inorganic overhang structures.

10. The method of claim 9 , further comprising an assistant cathode disposed under the lower portion.

11. The method of claim 10 , wherein the cathode contacts a top surface of the assistant cathode.

12. The method of claim 9 , wherein each of the inorganic overhang structures comprises one of:

the upper portion of a non-conductive inorganic material and the lower portion of a conductive inorganic material;

the upper portion of the conductive inorganic material and the lower portion of the conductive inorganic material;

the upper portion of the non-conductive inorganic material, the lower portion of the non-conductive inorganic material, and an assistant cathode disposed under the lower portion; or

the upper portion of the conductive inorganic material, the lower portion of the non-conductive inorganic material, and the assistant cathode disposed under the lower portion.

13. The method of claim 9 , wherein the second encapsulation layer is a global passivation layer.

14. The method of claim 9 , wherein the substrate is a pre-patterned indium tin oxide (ITO) glass substrate.

15. The method of claim 9 , wherein the OLED material comprises a hole injection layer (HIL), a hole transport layer (HTL), an emissive layer (EML), and an electron transport layer (ETL).

16. A method of forming a device, comprising:

positioning a substrate having:

an anode,

adjacent pixel-defining layer (PDL) structures disposed over the substrate, and

inorganic overhang structures defining wells of sub-pixels disposed over an upper surface of the PDL structures, the inorganic overhang structures having an upper portion having a bottom surface contacting and wider than a top surface of a lower portion;

depositing an organic light-emitting diode (OLED) material over the anode;

depositing a cathode over the OLED material, the cathode extending under the inorganic overhang structures adjacent to each sub-pixel and contacting a sidewall of the lower portion of the inorganic overhang structures, a cathode material of the cathode is different from a material of the upper portion;

depositing an encapsulation layer over the cathode, the encapsulation layer extends under at least a portion of the inorganic overhang structures past the cathode along the sidewall of the lower portion, and contacts the bottom surface of the upper portion of the inorganic overhang structures; and

disposing a global passivation layer over the encapsulation layer, wherein the global passivation layer is disposed within a well of each sub pixel and on the upper portion of the inorganic overhang structures.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 10, 2023
From: CHOUNG, JI-YOUNG; HAAS, DIETER; LIN, YU HSIN; LEE, JUNGMIN; YOO, SEONG HO; KIM, SI KYOUNG
To: APPLIED MATERIALS, INC.
Reel/Frame 063591/0944 →
Continuity (9)
Continuation 18049868 · Oct 26, 2022
Continuation 18049825 · Oct 26, 2022
Continuation 17498482 · Oct 11, 2021
Continuation 17193321 · Mar 5, 2021
Continuation 17193347 · Mar 5, 2021
Provisional Application 63084445 · Sep 28, 2020
Provisional Application 63075028 · Sep 4, 2020
Provisional Application 63075025 · Sep 4, 2020
Related Publication 20230284484A1 · Sep 7, 2023
Cited By (1)
US 12,751,121