IP Library › Granted Patent US 12,228,404
Granted Patent B2
US 12,228,404 · App. 18/333,821 · Granted Feb 18, 2025

Drive and sense balanced, semi-coupled 3-axis gyroscope

Inventors: Doruk Senkal (San Jose, CA); Robert Hennessy (San Jose, CA); Houri Johari-Galle (San Jose, CA); Joseph Seeger (Menlo Park, CA)
Assignee: INVENSENSE, INC.
G01C19/5712G01C19/5747G01C19/5762
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,228,404
App. No.
18/333,821
Granted
Feb 18, 2025
Kind
B2
Abstract

A dynamically balanced 3-axis gyroscope architecture is provided. Various embodiments described herein can facilitate providing linear and angular momentum balanced 3-axis gyroscope architectures for better offset stability, vibration rejection, and lower part-to-part coupling.

Claims (29)

1. A method, comprising:

transducing a first component of angular velocity associated with motion of a microelectromechanical systems (MEMS) device around a first axis with at least one frame gyroscope; and

transducing a second component of angular velocity associated with motion of the MEMS device around a second axis with at least two proof masses, wherein the first axis and the second axis are orthogonal, and wherein the at least two proof masses are driven into oscillation via at least two drive shuttles coupled to the at least one frame gyroscope, and wherein the at least two drive shuttles are configured to be constrained to a motion associated with the at least two drive shuttles in a plane defined by the at least two drive shuttles.

2. The method of claim 1 , further comprising:

transducing a third component of angular velocity associated with motion of the MEMS device around a third axis with at least one paddle gyroscope coupled to the at least one frame gyroscope.

3. The method of claim 1 , further comprising:

rejecting, at least in part, stress transmitted from a package associated with the MEMS device to the MEMS device with a stress isolation frame coupled to the MEMS device.

4. The method of claim 1 , wherein the transducing the second component of angular velocity comprises forcing respective pairs of the at least two proof masses, comprising four proof masses, into anti-phase motion as a result of the second component of angular velocity applied to the MEMS device, via coupling mechanisms between the respective pairs.

5. The method of claim 1 , further comprising:

at least one of exciting drive motion associated with the oscillation via a set of drive combs coupled to at least one of the at least one frame gyroscope or the at least two drive shuttles, or sensing the drive motion associated with the oscillation.

6. The method of claim 5 , further comprising:

transmitting the drive motion between the at least one frame gyroscope and the at least two drive shuttles via at least one flexible coupling configured to minimize transmission of motion, which is orthogonal to the motion associated with the at least to drive shuttles, of the at least one frame gyroscope to the at least two drive shuttles.

7. A method, comprising:

forming a first set of gyroscopes comprising at least one frame gyroscope configured to sense a first component of angular velocity associated with a microelectromechanical systems (MEMS) device around a first axis;

forming a set of drive shuttles comprising respective guided masses and coupled to the at least one frame gyroscope; and

forming a second set of gyroscopes comprising at least two proof masses coupled with respective ones of the set of drive shuttles and configured to sense a second component of angular velocity associated with the MEMS device around a second axis, wherein the first axis and the second axis are orthogonal, and wherein the at least two proof masses are configured to be driven into oscillation via respective drive shuttles coupled to the at least one frame gyroscope.

8. The method of claim 7 , further comprising:

forming a third set of gyroscopes comprising at least one paddle gyroscope coupled to the at least one frame gyroscope and configured to sense a third component of angular velocity associated with the MEMS device around a third axis that is orthogonal to the first axis and the second axis.

9. The method of claim 8 , further comprising:

coupling the at least one paddle gyroscope to the at least two proof masses via the at least one frame gyroscope.

10. The method of claim 8 , further comprising:

forming the first set of gyroscopes comprising two frame gyroscopes configured to sense the first component of angular velocity associated with the MEMS device around the first axis;

forming the set of drive shuttles comprising four drive shuttles coupled to the two frame gyroscopes;

forming the second set of gyroscopes comprising four proof masses configured to sense the second component of angular velocity associated with the MEMS device around the second axis; and

forming the third set of gyroscopes comprising two paddle gyroscopes configured to sense the third component of angular velocity associated with the MEMS device around the third axis.

11. The method of claim 7 , further comprising:

attaching the MEMS device to a package associated with the MEMS device with a stress isolation frame configured to reject, at least in part, stress transmitted from the package to the MEMS device.

12. The method of claim 7 , further comprising:

at least one of forming a set of drive combs configured to excite drive motion associated with the oscillation coupled to at least one of the at least one frame gyroscope or the at least two drive shuttles, or forming a set of sense combs configured to sense the drive motion associated with the oscillation.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 13, 2023
From: SENKAL, DORUK; HENNESSY, ROBERT; JOHARI-GALLE, HOURI; SEEGER, JOSEPH
To: INVENSENSE, INC.
Reel/Frame 063933/0551 →
Continuity (10)
Division 17138392 · Dec 30, 2020
Division 15940810 · Mar 29, 2018
Continuation In Part 15865189 · Jan 8, 2018
Continuation 14678774 · Apr 3, 2015
Continuation In Part 14472143 · Aug 28, 2014
Continuation In Part 14041810 · Sep 30, 2013
Continuation 13235296 · Sep 16, 2011
Provisional Application 62529401 · Jul 6, 2017
Provisional Application 62001474 · May 21, 2014
Related Publication 20230324176A1 · Oct 12, 2023
References Cited (154)
US 4510802A · Peters · 1985 [cited by applicant]
US 5349855A · Bernstein et al. · 1994 [cited by applicant]
US 5481914A · Ward · 1996 [cited by applicant]
US 5895850A · Buestgens · 1999 [cited by applicant]
US 5992233A · Clark · 1999 [cited by applicant]
US 6067858A · Clark et al. · 2000 [cited by applicant]
US 6230563B1 · Clark et al. · 2001 [cited by applicant]
US 6250156B1 · Seshia et al. · 2001 [cited by applicant]
US 6508122B1 · McCall et al. · 2003 [cited by applicant]
US 6520017B1 · Schoefthaler et al. · 2003 [cited by applicant]
US 6845669B2 · Acar et al. · 2005 [cited by applicant]
US 6892575B2 · Nasiri et al. · 2005 [cited by applicant]
US 6939473B2 · Nasiri et al. · 2005 [cited by applicant]
US 7036372B2 · Chojnacki et al. · 2006 [cited by applicant]
US 7250112B2 · Nasiri et al. · 2007 [cited by applicant]
US 7284430B2 · Acar et al. · 2007 [cited by applicant]
US 7437933B2 · Durante et al. · 2008 [cited by applicant]
US 7458263B2 · Nasiri et al. · 2008 [cited by applicant]
US 8042394B2 · Coronato et al. · 2011 [cited by applicant]
US 8042396B2 · Coronato et al. · 2011 [cited by applicant]
US 8069726B2 · Seeger et al. · 2011 [cited by applicant]
US 8141424B2 · Seeger et al. · 2012 [cited by applicant]
US 8322213B2 · Trusov et al. · 2012 [cited by applicant]
US 8539835B2 · Seeger et al. · 2013 [cited by applicant]
US 20030200804A1 · Johnson · 2003 [cited by applicant]
US 20040211258A1 · Geen · 2004 [cited by applicant]
US 20050066728A1 · Chojnacki et al. · 2005 [cited by applicant]
US 20050072231A1 · Chojnacki et al. · 2005 [cited by applicant]
US 20050081631A1 · Weinberg et al. · 2005 [cited by applicant]
US 20050081633A1 · Nasiri et al. · 2005 [cited by applicant]
US 20050199061A1 · Acar et al. · 2005 [cited by applicant]
US 20060070441A1 · Durante et al. · 2006 [cited by applicant]
US 20060112764A1 · Higuchi · 2006 [cited by applicant]
US 20060219006A1 · Nasiri et al. · 2006 [cited by applicant]
US 20070214883A1 · Durante et al. · 2007 [cited by applicant]
US 20070240508A1 · Watson · 2007 [cited by applicant]
US 20070266785A1 · Cadarelli · 2007 [cited by applicant]
US 20080000296A1 · Johnson · 2008 [cited by applicant]
US 20080115579A1 · Seeger et al. · 2008 [cited by applicant]
US 20080190199A1 · Prandi et al. · 2008 [cited by applicant]
US 20090019933A1 · Sung et al. · 2009 [cited by applicant]
US 20090064780A1 · Coronato et al. · 2009 [cited by applicant]
US 20090114016A1 · Nasiri et al. · 2009 [cited by applicant]
US 20090193892A1 · Seeger · 2009 [cited by applicant]
US 20090260437A1 · Blomqvist · 2009 [cited by applicant]
US 20100024548A1 · Cardarelli · 2010 [cited by examiner]
US 20100064805A1 · Seeger et al. · 2010 [cited by applicant]
US 20100071467A1 · Nasiri et al. · 2010 [cited by applicant]
US 20100095768A1 · Acar et al. · 2010 [cited by applicant]
US 20100199764A1 · Hammer · 2010 [cited by applicant]
US 20100218605A1 · Blomqvist et al. · 2010 [cited by applicant]
US 20100222998A1 · Blomqvist · 2010 [cited by applicant]
US 20100251800A1 · Mueck · 2010 [cited by applicant]
US 20100313657A1 · Trusov et al. · 2010 [cited by applicant]
US 20110061460A1 · Seeger et al. · 2011 [cited by applicant]
US 20110146402A1 · Donadel et al. · 2011 [cited by applicant]
US 20110167891A1 · Geen · 2011 [cited by examiner]
US 20120216612A1 · Seeger et al. · 2012 [cited by applicant]
US 20120272711A1 · Supino et al. · 2012 [cited by applicant]
US 20120291548A1 · Kanemoto · 2012 [cited by applicant]
US 20130019680A1 · Kittilsland et al. · 2013 [cited by applicant]
US 20130068018A1 · Seeger et al. · 2013 [cited by applicant]
US 20130086985A1 · Lin · 2013 [cited by applicant]
US 20130180334A1 · Coronato et al. · 2013 [cited by applicant]
US 20130192365A1 · Zhuang et al. · 2013 [cited by applicant]
US 20130233048A1 · Anac et al. · 2013 [cited by applicant]
US 20130239686A1 · Cazzaniga et al. · 2013 [cited by applicant]
US 20130283908A1 · Geen · 2013 [cited by examiner]
US 20140366631A1 · Seeger et al. · 2014 [cited by applicant]
US 20170023363A1 · Cazzaniga et al. · 2017 [cited by applicant]
US 20170167876A1 · Coronato et al. · 2017 [cited by applicant]
US 20170343351A1 · Tormalehto · 2017 [cited by applicant]
CN 1782713A · 2006 [cited by applicant]
CN 101663586A · 2010 [cited by applicant]
CN 101855516A · 2010 [cited by applicant]
CN 101987718A · 2011 [cited by applicant]
CN 102959405A · 2013 [cited by applicant]
CN 103033177A · 2013 [cited by applicant]
CN 103076012A · 2013 [cited by applicant]
CN 103221778A · 2013 [cited by applicant]
CN 103245340A · 2013 [cited by applicant]
CN 103797331A · 2014 [cited by applicant]
CN 104931032A · 2015 [cited by applicant]
CN 105091875A · 2015 [cited by applicant]
CN 105683710A · 2016 [cited by applicant]
EP 1568968A2 · 2005 [cited by applicant]
EP 2570770A2 · 2013 [cited by applicant]
EP 2899503A1 · 2015 [cited by applicant]
KR 100374431B1 · 2003 [cited by applicant]
KR 1020130084950A · 2013 [cited by applicant]
WO 2009130554A2 · 2009 [cited by applicant]
Ex Parte Quayle Action received for U.S. Appl. No. 17/138,392 dated Feb. 21, 2023, 40 pages. [cited by applicant]
Extended European search report received for European Patent Application No. 22212811.8 dated Mar. 9, 2023, 8 pages. [cited by applicant]
Extended European search report received for European Patent Application No. 22212809.2 dated Mar. 9, 2023, 10 pages. [cited by applicant]
Office Action received for Chinese Patent Application Serial No. 201880058031.9 dated Feb. 28, 2023, 24 pages (Including English Translation). [cited by applicant]
Notice of Intent to Grant for European Patent Application No. 18745779.1, mailed Feb. 17, 2022, 86 pages. [cited by applicant]
Notice of Intent to Grant for European Patent Application No. 20193687.9, mailed Feb. 23, 2022, 85 pages. [cited by applicant]
Decision to Grant received for European Patent application No. 18745779.1 dated Jun. 30, 2022, 3 pages. [cited by applicant]
Decision to Grant received for European Patent application No. 20193687.9 dated Jun. 30, 2022, 3 pages. [cited by applicant]
International Search Report and Written Opinion received for International Application No. PCT/US2012/054411 dated Dec. 24, 2012, 8 pages. [cited by applicant]
Non-Final Office Action received for U.S. Appl. No. 13/235,296 dated Dec. 26, 2013, 38 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 13/235,296 dated May 9, 2014, 21 pages. [cited by applicant]
Non-Final Office Action received for U.S. Appl. No. 13/862,352, dated May 10, 2016, 25 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 14/041,810 dated Apr. 20, 2015, 37 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 14/041,810 dated Jun. 24, 2015, 27 pages. [cited by applicant]
Non-Final Office Action received for U.S. Appl. No. 14/472,143 dated Apr. 20, 2015, 41 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 14/472,143, dated Nov. 12, 2015, 27 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 14/472,143, dated Dec. 18, 2015, 19 pages. [cited by applicant]
Communication pursuant to Article 94(3) received for European Patent Application No. 12832613.9 dated Dec. 10, 2015, 5 pages. [cited by applicant]
Extended European Search Report received for European Patent Application No. 12832613.9 dated Feb. 2, 2015, 6 pages. [cited by applicant]
Partial European Search Report received for European U.S. Appl. No. 15/167,772 dated Oct. 26, 2015, 7 pages. [cited by applicant]
Extended European Search Report received for European U.S. Appl. No. 15/167,772 dated Feb. 11, 2016, 15 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 14/472,143, dated Mar. 28, 2016, 29 pages. [cited by applicant]
First Office Action received for Korean Patent Application No. 10-2015-0070468 dated Mar. 16, 2017, 4 pages (including English translation). [cited by applicant]
First Office Action received for Chinese Patent Application No. 201510258053.8 dated Aug. 1, 2017, 25 pages (including English translation). [cited by applicant]
First Office Action received for Chinese Patent Application No. 201280045067.6, dated Nov. 14, 2014, 28 pages (including English translation). [cited by applicant]
Second Office Action received for Chinese Patent Application No. 201280045067.6 dated Jul. 21, 2015, 8 pages (including English translation). [cited by applicant]
First Office Action received for Chinese Patent Application No. 201410505767.X, dated Dec. 5, 2016, 34 pages (including English translation). [cited by applicant]
Second Office Action received for Chinese Patent Application No. 201410505767.X dated Jun. 13, 2017, 23 pages (including English translation). [cited by applicant]
Extended European Search Report received for European Patent Application No. 14182956.4 dated May 15, 2015, 10 pages. [cited by applicant]
Communication pursuant to Article 94(3) received for European Patent Application No. 14182956.4 dated Mar. 15, 2016, 7 pages. [cited by applicant]
Extended European Search Report received for European Patent Application No. 17156131.9 dated Mar. 17, 2017, 8 pages. [cited by applicant]
Non-Final Office Action received for U.S. Appl. No. 14/678,774 dated Jan. 13, 2017, 35 pages. [cited by applicant]
Extended European Search Report received for European Patent Application No. 17174612.6 dated Oct. 11, 2017, 9 pages. [cited by applicant]
First Office Action received for Korean Patent Application No. 10-2014-7009829 dated Apr. 3, 2015, 6 pages (including English translation). [cited by applicant]
First Office Action received for Korean Patent Application No. 10-2014-0128112 dated Jan. 28, 2016, 11 pages (including English translation). [cited by applicant]
Decision to Grant a Patent received for Korean Patent Application No. 10-2014-0128112 dated Oct. 31, 2016, 2 pages (including English translation). [cited by applicant]
Third Office Action received for Chinese Patent Application No. 201410505767.X dated Sep. 29, 2017, 8 pages (including English translation). [cited by applicant]
Communication pursuant to Article 94(3) received for European Patent Application No. 15167772.1 dated May 22, 2018, 7 pages. [cited by applicant]
Second Office Action received for Chinese Patent Application No. 201510258053.8 dated Jul. 17, 2018, 9 pages (including English translation). [cited by applicant]
Decision to Grant a Patent received for Korean Patent Application Serial No. 10-2015-0070468 dated Oct. 30, 2017, 2 pages (including English translation). [cited by applicant]
International Search Report and Written Opinion for International Application No. PCT/US2018/040822 mailed on Nov. 21, 2018, 20 pages. [cited by applicant]
European Office Action received for EP Application No. 17174612.6 dated Jun. 11, 2019, 5 pages. [cited by applicant]
European Office Action received for EP Application No. 15167772.1 dated Apr. 11, 2019, 8 pages. [cited by applicant]
Indian Office Action received for IN Application No. 1375/DEL/2015 dated Sep. 12, 2018, 6 pages. [cited by applicant]
European Office Action received for EP Application No. 187745779.1 dated Feb. 18, 2020, 3 pages. [cited by applicant]
Non- Final Office Action received for U.S. Appl. No. 15/644,534 dated Jan. 31, 2019, 25 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 15/644,534 dated May 8, 2019, 25 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 15/644,534 dated Jul. 8, 2019, 8 pages. [cited by applicant]
European Office Action received for European Application No. 15167772.1 dated Sep. 22, 2020, 5 pages. [cited by applicant]
Non-Final Office Action received for U.S. Appl. No. 15/940,810 dated Jun. 2, 2020, 30 pages. [cited by applicant]
Notification to Grant Patent Rights for Invention received for Chinese Patent Application No. 201280045067.6 dated Feb. 22, 2016, 4 pages (including English translation). [cited by applicant]
Intention to Grant received for European Patent Application No. 12832613.9 dated Dec. 22, 2016, 92 pages. [cited by applicant]
Decision to Grant received for European Patent application No. 12832613.9 dated May 11, 2017, 2 pages. [cited by applicant]
Intention to Grant received for European Patent Application No. 14182956.4 dated May 25, 2018, 72 pages. [cited by applicant]
Communication pursuant to Article 94(3) EPC received for European Patent Application No. 18745779.1 dated Jan. 22, 2021, 5 pages. [cited by applicant]
Extended European Search Report received for E.P Patent Application Serial No. 20193687.9 dated Jan. 26, 2021, 12 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 15/940,810 dated Sep. 30, 2020, 19 pages. [cited by applicant]
Communication pursuant to Article 94(3) EPC received for European Patent Application No. 17156131.9 dated Nov. 2, 2018, 7 pages. [cited by applicant]
Notice of Allowance received for U.S. Appl. No. 17/138,392 dated Jun. 6, 2023, 48 pages. [cited by applicant]
Communication under Rules 71(3) EPC received for EP Patent Application Serial No. 15167772.1 dated May 4, 2023, 45 pages. [cited by applicant]
Decision to Grant a Patent received for European Patent Application Serial No. 15167772.1 dated Aug. 10, 2023, 3 pages. [cited by applicant]
Decision to Grant a Patent received for Chinese Patent Application Serial No. 201880058031.9 dated Jul. 21, 2023, 4 pages(Original Copy Only). [cited by applicant]
Second Office Action received for Chinese Patent Application Serial No. 201880027814.0 dated Jul. 21, 2023, 5 pages. [cited by applicant]