IP Library › Granted Patent US 12,490,520
Granted Patent B2
US 12,490,520 · App. 18/357,247 · Granted Dec 2, 2025

PNP controlled ESD protection device with high holding voltage and snapback

Inventor: Jing-Ying Chen (Taipei, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H10D89/713
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Quick Facts
Patent No.
US 12,490,520
App. No.
18/357,247
Granted
Dec 2, 2025
Kind
B2
Abstract

An ESD protection device protects a circuit from TLPs between a first terminal and a second terminal. The device includes an NPN discharge structure and a PNP triggering device. The first terminal is coupled to the p-doped emitter and the n-doped base of the PNP triggering device and also the n-doped emitter of the NPN discharge structure. The second terminal is coupled to the n-doped collector of the NPN discharge structure. The p-doped collector of the PNP triggering device is coupled to the p-doped base of the NPN discharge structure. A TLP causes base-collector junction breakdown in the PNP triggering device, which results in a current through the PNP triggering device. That current is injected into the base of the NPN discharge structure, which results in a larger discharge current through the NPN discharge structure. The device provides high holding voltage ESD protection device with snapback.

Claims (52)

1 . A device, comprising:

an integrated chip having a first terminal, a second terminal, a semiconductor substrate, and an electrostatic discharge (ESD) protection device, the ESD protection device comprising an NPN discharge structure and a PNP triggering device;

wherein the NPN discharge structure comprises an n-doped emitter, a p-doped base, and an n-doped collector, each of which is formed in the semiconductor substrate;

the PNP triggering device comprises a p-doped emitter, an n-doped base, and a p-doped collector, each of which is formed in the semiconductor substrate;

the first terminal is coupled by a first coupling to the p-doped emitter, by a second coupling to the n-doped base, and by a third coupling to the n-doped emitter;

the second terminal is coupled by a fourth coupling to the n-doped collector;

the p-doped collector is coupled by a fifth coupling to the p-doped base; and

the first coupling, the second coupling, the third coupling, the fourth coupling, and the fifth coupling respectively comprise a first, a second, a third, a fourth, and a fifth conductor formed outside the semiconductor substrate.

2 . The device of claim 1 , wherein the first coupling, the second coupling, the third coupling, the fourth coupling, and the fifth coupling each comprise a part of a metal interconnect structure for the integrated chip.

3 . The device of claim 1 , wherein the ESD protection device is structured so that a positive pulse of sufficient magnitude applied between the first terminal and the second terminal causes a junction between the n-doped base and the p-doped collector to break down resulting in a first current from the n-doped base to the p-doped collector, which in turn causes a second current from the p-doped emitter to the p-doped collector that is channeled into the p-doped base and discharges through the n-doped collector, which in turn causes a third current from the n-doped emitter to the n-doped collector.

4 . The device of claim 1 , wherein the p-doped base is floating with respect to the first terminal and the second terminal.

5 . The device of claim 1 , wherein:

the p-doped base is isolated from the first terminal by the n-doped emitter; and

the p-doped base is isolated from the second terminal by the n-doped collector.

6 . The device of claim 1 , wherein a holding voltage for the ESD protection device is determined by a width of the p-doped base.

7 . The device of claim 1 , wherein the p-doped emitter comprises a heavily p-doped contact region that forms a junction with the n-doped base.

8 . The device of claim 1 , wherein:

the n-doped emitter comprises a first heavily n-doped contact region coupled to the first terminal;

the n-doped collector comprises a second heavily n-doped contact region coupled to the second terminal;

the n-doped emitter at a first junction with the p-doped base has a lower N-doping than the first heavily n-doped contact region; and

the n-doped collector at a second junction with the p-doped base has a lower N-doping than the second heavily n-doped contact region.

9 . The device of claim 1 , wherein the second coupling, which is from the first terminal to the n-doped base, comprises a buried n-doped layer within the semiconductor substrate.

10 . The device of claim 1 , wherein the NPN discharge structure and the PNP triggering device occupy distinct areas of the semiconductor substrate.

11 . The device of claim 1 , further comprising:

a PN diode formed in the semiconductor substrate;

wherein the PN diode comprises an n-doped region coupled to the first terminal and a p-doped region coupled to the second terminal; and

the n-doped region provides junction isolation between the second terminal and the p-doped base.

12 . The device of claim 11 , wherein the ESD protection device is structured so that a negative pulse of sufficient magnitude applied between the first terminal and the second terminal is discharged through the PN diode.

13 . The device of claim 11 , wherein the n-doped region overlaps the n-doped base.

14 . The device of claim 11 , wherein the n-doped region overlaps the n-doped emitter.

15 . An integrated chip, comprising:

a semiconductor substrate comprising a first terminal, a second terminal, and an electrostatic discharge (ESD) protection device coupled between the first terminal and the second terminal, the ESD protection device comprising an NPN discharge structure activated by a PNP triggering device;

wherein the NPN discharge structure and the PNP triggering device are formed in the semiconductor substrate;

the NPN discharge structure comprises a first n-doped region and a second n-doped region separated by a p-doped region;

the PNP triggering device comprises a first p-doped region and a second p-doped region separated by an n-doped region; and

a metal interconnect structure disposed above the semiconductor substrate, wherein the metal interconnect structure couples:

the first terminal to the first n-doped region of the NPN discharge structure;

the second terminal to the second n-doped region of the NPN discharge structure;

the p-doped region of the NPN discharge structure to the first p-doped region of the PNP triggering device; and

the second terminal to the n-doped region and the second p-doped region of the PNP triggering device.

16 . The integrated chip of claim 15 , further comprising:

a PN diode formed in the semiconductor substrate;

wherein a p-doped region of the PN diode is coupled to the first terminal; and

an n-doped region of the PN diode is coupled to the second terminal.

17 . The integrated chip of claim 16 , wherein the n-doped region of the PN diode overlaps the n-doped region of the PNP triggering device and the first n-doped region of the NPN discharge structure.

18 . An integrated chip, comprising:

a semiconductor substrate;

an electrostatic discharge protection device comprising an NPN bipolar junction transistor and a PNP bipolar junction transistor, wherein the NPN bipolar junction transistor comprises an n-doped emitter, a p-doped base, and an n-doped collector, and the PNP bipolar junction transistor comprises a p-doped emitter, an n-doped base, and a p-doped collector; and

a metal interconnect structure comprising a first metal structure, a second metal structure, and a third metal structure over the semiconductor substrate, wherein the first metal structure couples an anode terminal to the p-doped emitter, the n-doped base, and the n-doped emitter, the second metal structure couples a cathode terminal to the n-doped collector, and the third metal structure couples the p-doped collector to the p-doped base;

wherein the p-doped collector and the p-doped base are physically separated from one another.

19 . The integrated chip of claim 18 , wherein the NPN bipolar junction transistor surrounds the PNP bipolar junction transistor.

20 . The integrated chip of claim 18 , further comprising a p-doped region in the semiconductor substrate, wherein the second metal structure couples the cathode terminal to the p-doped region.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 24, 2023
From: CHEN, JING-YING
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 064353/0062 →
Continuity (2)
Division 17168295 · Feb 5, 2021
Related Publication 20230369315A1 · Nov 16, 2023
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