IP Library › Granted Patent US 12,189,161
Granted Patent B2
US 12,189,161 · App. 18/362,066 · Granted Jan 7, 2025

Polarizer nanoimprint lithography

Inventors: Bradley R. Williams (Pocatello, ID); R. Stewart Nielson (Pleasant Grove, UT); Anubhav Diwan (Provo, UT); Eric Gardner (Eagle Mountain, UT); Shaun Patrick Ogden (Saratoga Springs, UT); Bob West (Orem, UT)
Assignee: Moxtek, Inc.
G02B5/3041B29D11/00644B29D11/0073G02B5/3058G03F7/0002G03F7/70566B82Y40/00
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Quick Facts
Patent No.
US 12,189,161
App. No.
18/362,066
Granted
Jan 7, 2025
Kind
B2
Abstract

A method of making a polarizer can include applying a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase, then forming this into a different phase including a solid, interconnecting network of the inorganic nanoparticles. This method can improve manufacturability and reducing manufacturing cost. This method can be used to provide an antireflective coating, to provide a protective coating on polarization structures, to provide thin films for optical properties, or to form the polarization structures themselves.

Claims (29)

1. A method of making a polarizer, the method comprising:

providing a polarization device on a substrate, the polarization device including objects arranged in a pattern for polarization of light, and an overcoat layer on a surface of the polarization device farthest from the substrate;

applying an uncured cover layer to an outer surface of the overcoat layer farthest from the polarization device, the uncured cover layer being a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase; and

curing the uncured cover layer to form a cured cover layer, the cured cover layer including a solid, interconnecting network of the inorganic nanoparticles.

2. The method of claim 1 , wherein the objects of the polarization device include wires with channels between adjacent wires, and chemistry of the uncured cover layer and chemistry of the outer surface of the overcoat layer are repellant with respect to each other.

3. The method of claim 1 , wherein the objects of the polarization device include wires with channels between adjacent wires, and a surface tension of the uncured cover layer is greater than a surface energy of the outer surface of the overcoat layer.

4. The method of claim 1 , further comprising, before forming the uncured cover layer into the cured cover layer, imprinting a pattern of structures in the uncured cover layer, the structures sized and shaped to reduce reflection of incident light, to increase heat transfer away from the polarizer, or both.

5. The method of claim 4 , wherein imprinting the pattern of structures in the uncured cover layer includes imprinting separate pixels.

6. The method of claim 1 , wherein the substrate is a first substrate, the method further comprising placing a second substrate onto the uncured cover layer before forming the uncured cover layer into the cured cover layer.

7. The method of claim 1 , wherein the inorganic nanoparticles comprise aluminum oxide.

8. The method of claim 1 , wherein the liquid is a solvent and forming the uncured cover layer into a cured cover layer includes evaporation of at least some liquid.

9. The method of claim 8 , further comprising evaporating remaining liquid to form the uncured cover layer into a solid.

10. A method of making a polarizer, the method comprising:

providing a polarization device on a substrate, the polarization device including objects arranged in a pattern for polarization of light, and an overcoat layer on a surface of the polarization device farthest from the substrate;

applying an uncured cover layer to an outer surface of the overcoat layer farthest from the polarization device, the uncured cover layer being a colloidal suspension including a dispersed phase and a continuous phase; and

curing the uncured cover layer by removing the continuous phase to form a solid, defining a cured cover layer.

11. The method of claim 10 , wherein the objects of the polarization device include wires with channels between adjacent wires, and chemistry of the uncured cover layer and chemistry of the outer surface of the overcoat layer are repellant with respect to each other.

12. The method of claim 10 , wherein the objects of the polarization device include wires with channels between adjacent wires, and a surface tension of the uncured cover layer is greater than a surface energy of the outer surface of the overcoat layer.

13. The method of claim 10 , further comprising, before forming the uncured cover layer into the cured cover layer, imprinting a pattern of structures in the uncured cover layer, the structures sized and shaped to reduce reflection of incident light, to increase heat transfer away from the polarizer, or both.

14. The method of claim 13 , wherein imprinting the pattern of structures in the uncured cover layer includes imprinting separate pixels.

15. The method of claim 10 , wherein the substrate is a first substrate, the method further comprising placing a second substrate onto the uncured cover layer before forming the uncured cover layer into the cured cover layer.

16. A method of making a polarizer, the method comprising:

providing a polarization device on a substrate, the polarization device including objects arranged in a pattern for polarization of light, and an overcoat layer on a surface of the polarization device farthest from the substrate;

applying an uncured cover layer to an outer surface of the overcoat layer farthest from the polarization device, the uncured cover layer being a solution including molecules in a solvent, the solvent including water and an organic liquid, the molecules including metal atoms bonded to reactive groups, where each reactive-group is independently —Cl, —OR 1 , —OCOR 1 , or —N(R 1 ) 2 , and R 1 is an alkyl group; and

reacting the molecules to form a solid of the metal atoms interconnected with each other, defining a cured cover layer.

17. The method of claim 16 , further comprising, before forming the uncured cover layer into the cured cover layer, imprinting a pattern of structures in the uncured cover layer, the structures sized and shaped to reduce reflection of incident light, to increase heat transfer away from the polarizer, or both.

18. The method of claim 17 , wherein imprinting the pattern of structures in the uncured cover layer includes imprinting separate pixels.

19. The method of claim 16 , wherein the substrate is a first substrate, the method further comprising placing a second substrate onto the uncured cover layer before forming the uncured cover layer into the cured cover layer.

20. The method of claim 16 , wherein providing the polarizer includes sputtering the overcoat layer on the polarization device.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 31, 2023
From: WILLIAMS, BRADLEY R.; NIELSON, R. STEWART; DIWAN, ANUBHAV; GARDNER, ERIC; OGDEN, SHAUN PATRICK; WEST, BOB
To: MOXTEK, INC.
Reel/Frame 064433/0294 →
Continuity (4)
Continuation 17359923 · Jun 28, 2021
Continuation 16366932 · Mar 27, 2019
Provisional Application 62656759 · Apr 12, 2018
Related Publication 20230375766A1 · Nov 23, 2023
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