Composite filter device
In a composite filter device, a first acoustic wave resonator includes a functional electrode on a first main surface of a first piezoelectric substrate, and a wiring electrode is on the first main surface and is not connected to a signal potential. A support is on the first main surface and surrounds the first acoustic wave resonator. A second piezoelectric substrate is on the support and includes a third main surface closer to the support than a fourth main surface. A second acoustic wave resonator includes a functional electrode on the third main surface. The second acoustic wave resonator is a parallel-arm resonator higher in resonant frequency than any other parallel-arm resonator or a series-arm resonator lower in resonant frequency than any other series-arm resonator. The second acoustic wave resonator and the wiring electrode overlap each other when viewed in plan.
1 . A composite filter device comprising:
a first filter and a second filter each including at least one series-arm resonator and at least one parallel-arm resonator;
a first piezoelectric substrate including a first main surface and a second main surface on opposite sides;
a first acoustic wave resonator including a functional electrode on the first main surface of the first piezoelectric substrate, the first acoustic wave resonator being included in the first filter;
a wiring electrode on the first main surface of the first piezoelectric substrate, the wiring electrode not being connected to a signal potential;
a support on the first main surface of the first piezoelectric substrate and surrounding the first acoustic wave resonator;
a second piezoelectric substrate on the support and including a third main surface and a fourth main surface on opposite sides, the third main surface being closer to the support than the fourth main surface; and
a second acoustic wave resonator including a functional electrode on the third main surface of the second piezoelectric substrate, the second acoustic wave resonator being included in the second filter; wherein
the first acoustic wave resonator and the second acoustic wave resonator are located in a space defined by the first main surface of the first piezoelectric substrate, the third main surface of the second piezoelectric substrate, and the support;
the second acoustic wave resonator is a parallel-arm resonator higher in resonant frequency than any other parallel-arm resonator of the second filter or a series-arm resonator lower in resonant frequency than any other series-arm resonator of the second filter; and
the second acoustic wave resonator and the wiring electrode overlap each other when viewed in plan.
2 . The composite filter device according to claim 1 , wherein the second acoustic wave resonator is a parallel-arm resonator higher in resonant frequency than any other parallel-arm resonator of the second filter.
3 . The composite filter device according to claim 1 , wherein the second acoustic wave resonator is a series-arm resonator lower in resonant frequency than any other series-arm resonator of the second filter.
4 . The composite filter device according to claim 2 , wherein the wiring electrode is connected to a reference potential.
5 . The composite filter device according to claim 2 , wherein the wiring electrode is connected to neither a reference potential nor a signal potential.
6 . The composite filter device according to claim 2 , wherein
the functional electrode of the second acoustic wave resonator is an interdigital transducer electrode including a pair of busbars and a plurality of electrode fingers; and
the wiring electrode overlaps both of the busbars when viewed in plan.
7 . The composite filter device according to claim 2 , further comprising an insulating film on the first main surface of the first piezoelectric substrate; wherein
at least a portion of the wiring electrode is located on the insulating film; and
the wiring electrode and the second acoustic wave resonator overlap each other on the insulating film when viewed in plan.
8 . The composite filter device according to claim 2 , wherein
the wiring electrode is a first wiring electrode;
the composite filter device further comprises a second wiring electrode on the third main surface of the second piezoelectric substrate and not being connected to signal potential;
the first acoustic wave resonator is a parallel-arm resonator higher in resonant frequency than any other parallel-arm resonator of the first filter or a series-arm resonator lower in resonant frequency than any other series-arm resonator of the first filter; and
the first acoustic wave resonator and the second wiring electrode overlap each other when viewed in plan.
9 . The composite filter device according to claim 8 , wherein the first acoustic wave resonator is a parallel-arm resonator higher in resonant frequency than any other parallel-arm resonator of the first filter.
10 . The composite filter device according to claim 8 , wherein the first acoustic wave resonator is a series-arm resonator lower in resonant frequency than any other series-arm resonator of the first filter.
11 . The composite filter device according to claim 1 , wherein each of the first and second piezoelectric substrates is made of piezoelectric material only.
12 . The composite filter device according to claim 1 , wherein each of the first and second piezoelectric substrates is a multilayer substrate including a plurality of piezoelectric layers.
13 . The composite filter device according to claim 1 , wherein the wiring electrode is connected to one of the parallel-arm resonators.
14 . The composite filter device according to claim 1 , wherein the support has a frame structure or includes columnar supports on the first main surface.
15 . The composite filter device according to claim 1 , wherein the second filter is a ladder filter.
16 . The composite filter device according to claim 1 , wherein capacitive coupling is provided between the second acoustic wave resonator and the wiring electrode.
17 . The composite filter device according to claim 6 , wherein reflectors are provided on both sides of the plurality of electrode fingers.
18 . The composite filter device according to claim 1 , wherein one or more of the acoustic wave resonators of the first filter or one or more of the acoustic wave resonators of the second filter are electrically connected to outside via the support or through-via electrodes or bumps.
19 . The composite filter device according to claim 1 , wherein one or more of the acoustic wave resonators of the first filter or one or more of the acoustic wave resonators of the second filter are electrically connected to outside via columnar bodies or through-via electrodes or bumps.
20 . The composite filter device according to claim 1 , wherein the first filter and the second filter each include a longitudinally coupled resonator acoustic wave filter.