IP Library Granted Patent US 10,396,757
Granted Patent B2
US 10,396,757 · App. 15/454,951 · Granted Aug 27, 2019

Acoustic wave device

Inventors: Naoki Kakita (Tokyo, JP); Takuma Kuroyanagi (Tokyo, JP)
Assignee: TAIYO YUDEN CO., LTD.
H03H9/64H01L23/528H01L23/5226H01L23/53214H01L23/53228H01L23/53242H03H9/0576H03H9/14544H01L2224/16225
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Quick Facts
Patent No.
US 10,396,757
App. No.
15/454,951
Granted
Aug 27, 2019
Kind
B2
Abstract

An acoustic wave device includes: a first piezoelectric substrate; a first IDT that includes a plurality of first electrode fingers and is located on a first surface of the first piezoelectric substrate; a second piezoelectric substrate that is located above the first surface; and a second IDT that is located on a second surface of the second piezoelectric substrate, and includes a plurality of second electrode fingers that are non-parallel to the plurality of first electrode fingers, the second surface of the second piezoelectric substrate facing the first surface across an air gap.

Claims (39)

1. An acoustic wave device comprising:

a first piezoelectric substrate;

a plurality of first IDTs that are located on a first surface of the first piezoelectric substrate, each of the plurality of first IDTs including a plurality of first electrode fingers;

a second piezoelectric substrate that is located above the first surface; and

a plurality of second IDTs that are located on a second surface of the second piezoelectric substrate, each of the plurality of second IDTs including a plurality of second electrode fingers, the second surface of the second piezoelectric substrate facing the first surface across an air gap,

wherein:

extension directions of the plurality of first electrodes of the plurality of first IDTs are parallel to each other and extend in a first extension direction;

extension directions of the plurality of second electrodes of the plurality of second IDTs are parallel to each other and extend in a second extension direction; and

the first extension direction is non-parallel to the second extension direction.

2. The acoustic wave device according to claim 1 , wherein

an angle between the first extension direction and the second extension direction in plan view is 30° or greater and 150° or less.

3. The acoustic wave device according to claim 1 , wherein

an angle between the first extension direction and the second extension direction in plan view is approximately 90°.

4. The acoustic wave device according to claim 1 , wherein

a distance between the plurality of first IDTs and the plurality of second IDTs is less than at least one of a thickness of the first piezoelectric substrate and a thickness of the second piezoelectric substrate.

5. The acoustic wave device according to claim 1 , further comprising

a ring-shaped sealing portion that is formed so as to surround the plurality of first IDTs and the plurality of second IDTs, and seals the plurality of first IDTs and the plurality of second IDTs in the air gap.

6. The acoustic wave device according to claim 1 , wherein:

the plurality of first IDTs are aligned in the first extension direction; and

the plurality of second IDTs are aligned in the second extension direction.

7. The acoustic wave device according to claim 6 , wherein

the plurality of the first IDTs are connected in series, and the plurality of the second IDTs are connected in series.

8. The acoustic wave device according to claim 6 , further comprising:

a transmit filter that is located on the first piezoelectric substrate, and includes a plurality of first series resonators connected in series between a common terminal and a transmit terminal, and one or more first parallel resonators connected in parallel between the common terminal and the transmit terminal; and

a receive filter that is located on the second piezoelectric substrate, and includes a plurality of second series resonators connected in series between the common terminal and a receive terminal, and one or more second parallel resonators connected in parallel between the common terminal and the receive terminal, wherein

the plurality of first series resonators include the plurality of the first IDTs, respectively, and

the plurality of second series resonators include the plurality of the second IDTs, respectively.

9. The acoustic wave device according to claim 1 , wherein:

each of the plurality of first IDTs includes a first bus bar to witch the plurality of first electrode fingers of a corresponding first IDT are connected;

each of the plurality of second IDTs includes a second bus bar to witch the plurality of second electrode fingers of s corresponding second IDT are connected;

extension directions of first bus bars of the plurality of first IDTs are parallel to each other and extend in a third extension direction;

extension directions of second bus bars of the plurality of second IDTs are parallel to each other and extend in a fourth extension direction; and

the third extension direction is non-parallel to the fourth extension direction.

10. The acoustic wave device according to claim 9 , wherein:

the first extension direction is perpendicular to the third extension direction; and

the second extension direction is perpendicular to the fourth extension direction.

11. The acoustic wave device according to claim 1 , wherein:

a part of the plurality of the first IDTs overlaps a part of the plurality of the second IDTs and remaining part of the plurality of the first IDTs does not overlaps the plurality of the second IDTs in plan view, and

a part of the plurality of the second IDTs overlaps a part of the plurality of the first IDTs, and remaining part of the plurality of the second IDTs does not overlaps the plurality of the first IDTs in plan view.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 9, 2017
From: KAKITA, NAOKI; KUROYANAGI, TAKUMA
To: TAIYO YUDEN CO., LTD.
Reel/Frame 041533/0087 →
Priority Claims (1)
JP 2016-076882 · Apr 6, 2016 · national
Continuity (1)
Related Publication 20170294895A1 · Oct 12, 2017
Cited By (2)
US 12,301,210 US 12,542,536