Multi-stack susceptor reactor for high-throughput superconductor manufacturing
A vapor deposition reactor apparatus, systems and methods for deposition of thin films, particularly high-temperature superconducting (HTS) coated conductors, utilize multi-sided susceptors and susceptor pairs for increased production throughput. The reactors may also be configured in multi-stack arrangements of the susceptors within a single reactor chamber for additional throughput gains.
1 . A method for producing a superconductor on an elongated substrate tape, the method comprising:
providing a deposition chamber housing a precursor inlet showerhead, an outlet port, and a heated substrate susceptor having more than one tape contacting surface comprising upper and lower surfaces of the susceptor;
maintaining said deposition chamber under vacuum conditions via evacuation by the outlet port;
heating each tape contacting surface of said susceptor with at least one heater element;
translating the elongated substrate tape through a deposition zone within the chamber, wherein the substrate tape slidably contacts each of the more than one tape contacting surfaces of the susceptor;
introducing precursor materials into the deposition chamber via the precursor showerhead; and
depositing at least one layer of a thin film upon the elongated substrate tape.
2 . The method of claim 1 , wherein the more than one tape contacting surfaces of the susceptor further comprise more than one raised section each with a width substantially the width of the elongated substrate tape and each raised section extends vertically from the upper surface of a main body of the susceptor and lengthwise along the length of the main body of the susceptor such that two adjacent raised sections form a channel.
3 . The method of claim 1 , wherein the elongated substrate tape winds around the susceptor more than once.
4 . The method of claim 1 , wherein the elongated substrate tape is comprised of more than one parallel tape translating together.
5 . The method of claim 1 , wherein the least one layer of the deposited thin film is a superconducting YBCO layer.
6 . A method for producing a superconductor on an elongated substrate tape, the method comprising:
providing a deposition chamber housing a precursor inlet showerhead, an outlet port, and a pair of opposing one-sided susceptors;
maintaining said deposition chamber under vacuum conditions via evacuation by the outlet port;
heating tape contacting surfaces of each susceptor with a heater element;
translating the elongated substrate tape through a deposition zone within the chamber, wherein the substrate tape slidably contacts the upper surface of one of the pair of opposing one-sided susceptors and the lower surface of the second of the pair of opposing one-sided susceptors;
introducing precursor materials into the deposition chamber via the precursor showerhead; and
depositing at least one layer of a thin film upon the elongated substrate tape.
7 . The method of claim 6 , wherein the pair of opposing susceptors are coupled together.
8 . The method of claim 6 , wherein the pair of opposing susceptors further comprises a dividing plate located between the pair of opposing susceptors.
9 . The method of claim 6 , wherein the pair of opposing susceptors are separated by a vertical distance (d).
10 . The method of claim 6 , wherein each opposing susceptor further comprises more than one raised section each with a width substantially the width of the elongated substrate tape and each raised section extends vertically from the upper surface of a main body of the susceptor and lengthwise along the length of the main body of the susceptor such that two adjacent raised sections form a channel.
11 . The method of claim 6 , wherein the elongated substrate tape winds around the pair of opposing susceptors more than once.
12 . The method of claim 6 , wherein the elongated substrate tape is comprised of more than one parallel tape translating together.
13 . The method of claim 12 , wherein each elongated substrate tape winds around the pair of opposing susceptors more than once.
14 . The method of claim 6 , wherein the deposited thin film is a superconducting YBCO layer.