Vertical nonvolatile memory device having hydrogen diffusion barrier layer and manufacturing method thereof
A vertical nonvolatile memory device may include a peripheral circuit portion including a memory cell driving circuit and connection wiring; a first hydrogen diffusion barrier layer above the peripheral circuit portion; a first insulating layer above the first hydrogen diffusion barrier layer; a common source line layer above the first insulating layer; a second hydrogen diffusion barrier layer above the first insulating layer; and a memory cell stack structure above the common source line layer and the second hydrogen diffusion barrier layer.
1 . A vertical nonvolatile memory device comprising:
a peripheral circuit portion including a memory cell driving circuit and connection wiring;
a first hydrogen diffusion barrier layer above the peripheral circuit portion;
a first insulating layer above the first hydrogen diffusion barrier layer;
a common source line layer above the first insulating layer;
a second hydrogen diffusion barrier layer above the first insulating layer; and
a memory cell stack structure above the common source line layer and the second hydrogen diffusion barrier layer,
wherein the memory cell stack structure includes a plurality of gate electrodes and a plurality of interlayer insulating layers, which are alternately stacked on top of each other, wherein a lowermost one of the plurality of gate electrodes is on top of a lowermost one of the plurality of interlayer insulating layers.
2 . The vertical nonvolatile memory device of claim 1 , wherein
the second hydrogen diffusion barrier layer covers sidewalls of the common source line layer and an exposed portion of the first insulating layer, and
the exposed portion of the first insulating layer is not covered by the common source line layer such that the exposed portion of the first insulating layer is exposed by the common source line layer.
3 . The vertical nonvolatile memory device of claim 2 , further comprising:
a hydrogen diffusion barrier filling layer on the second hydrogen diffusion barrier layer, wherein
the hydrogen diffusion barrier filling layer fills a space between the sidewalls of the common source line layer.
4 . The vertical nonvolatile memory device of claim 3 , wherein a material of the second hydrogen diffusion barrier layer is the same as a material of the hydrogen diffusion barrier filling layer.
5 . The vertical nonvolatile memory device of claim 4 , wherein the second hydrogen diffusion barrier layer and the hydrogen diffusion barrier filling layer each include silicon nitride.
6 . The vertical nonvolatile memory device of claim 3 , wherein
the hydrogen diffusion barrier filling layer includes at least one of Al 2 O 3 , Cr 2 O 3 , Er 2 O 3 , and SiN x , and
the second hydrogen diffusion barrier layer includes silicon nitride.
7 . The vertical nonvolatile memory device of claim 1 , wherein
the second hydrogen diffusion barrier layer is between the first insulating layer and the common source line layer.
8 . The vertical nonvolatile memory device of claim 7 , further comprising:
a hydrogen diffusion barrier filling layer filling a space between sidewalls of the common source line layer.
9 . The vertical nonvolatile memory device of claim 8 , wherein a material of the second hydrogen diffusion barrier layer is the same as a material of the hydrogen diffusion barrier filling layer.
10 . The vertical nonvolatile memory device of claim 9 , wherein the second hydrogen diffusion barrier layer and the hydrogen diffusion barrier filling layer include silicon nitride.
11 . The vertical nonvolatile memory device of claim 8 , wherein
the hydrogen diffusion barrier filling layer includes at least one of Al 2 O 3 , Cr 2 O 3 , Er 2 O 3 , and SiN x , and
the second hydrogen diffusion barrier layer includes silicon nitride.
12 . The vertical nonvolatile memory device of claim 1 , wherein the first hydrogen diffusion barrier layer and the second hydrogen diffusion barrier layer independently include at least one of Al 2 O 3 , Cr 2 O 3 , Er 2 O 3 , and SiN x .
13 . A manufacturing method of a vertical nonvolatile memory device, comprising:
forming a first hydrogen diffusion barrier layer and a first insulating layer above a peripheral circuit portion, the peripheral circuit portion including a memory cell driving circuit and a connection wiring;
forming a preliminary common source line layer above the first insulating layer;
patterning the preliminary common source line layer to form a patterned preliminary common source line layer, the patterned preliminary common source line layer exposing sidewalls of the patterned preliminary common source line layer and the first insulating layer between the sidewalls of the patterned preliminary common source line layer;
forming a preliminary second hydrogen diffusion barrier layer above the patterned preliminary common source line layer;
forming a preliminary filling insulating layer filling a space between the sidewalls of the patterned preliminary common source line layer and above the preliminary second hydrogen diffusion barrier layer;
performing a planarization process on a structure including the preliminary filling insulating layer and the preliminary second hydrogen diffusion barrier layer to provide a planarized structure including planarized portions of the preliminary filling insulating layer and the preliminary second hydrogen diffusion barrier layer; and
forming a memory cell stack structure above the planarized structure.
14 . The manufacturing method of claim 13 , wherein
the preliminary filling insulating layer includes silicon oxide, and
the preliminary second hydrogen diffusion barrier layer includes silicon nitride.
15 . The manufacturing method of claim 13 , wherein
the preliminary filling insulating layer includes at least one of Al 2 O 3 , Cr 2 O 3 , Er 2 O 3 , and SiN x , and
the preliminary second hydrogen diffusion barrier layer includes silicon nitride.
16 . The manufacturing method of claim 13 , wherein
the preliminary second hydrogen diffusion barrier layer is formed of a same material as the preliminary filling insulating layer, and
the forming the preliminary second hydrogen diffusion barrier layer and the forming the preliminary filling insulating layer are performed at a same time.
17 . The manufacturing method of claim 16 , wherein the preliminary second hydrogen diffusion barrier layer includes silicon nitride and the preliminary filling insulating layer includes silicon nitride.
18 . A manufacturing method of a vertical nonvolatile memory device, comprising:
sequentially forming a preliminary first hydrogen diffusion barrier layer, a preliminary first insulating layer, and a preliminary second hydrogen diffusion barrier layer above a peripheral circuit portion including a memory cell driving circuit and a connection wiring;
forming a first hydrogen diffusion barrier layer, a first insulating layer, and a second hydrogen diffusion barrier layer having a via hole or a contact hole by photo-etching the preliminary first hydrogen diffusion barrier layer, the preliminary first insulating layer, and the preliminary second hydrogen diffusion barrier layer;
forming a preliminary common source line layer above the second hydrogen diffusion barrier layer;
forming a patterned preliminary common source line layer by patterning the preliminary common source line layer to expose sidewalls of the preliminary common source line layer and the second hydrogen diffusion barrier layer between the sidewalls;
forming a preliminary filling insulating layer above the patterned preliminary common source line layer, the preliminary filling insulating layer filling a space between sidewalls of the patterned preliminary common source line layer; and
performing a planarization process on the preliminary filling insulating layer.
19 . The manufacturing method of claim 18 , wherein
the preliminary filling insulating layer includes silicon oxide, and
the second hydrogen diffusion barrier layer includes silicon nitride.
20 . The manufacturing method of claim 18 , wherein
the preliminary filling insulating layer includes at least one of Al 2 O 3 , Cr 2 O 3 , Er 2 O 3 , and SiN x , and
the second hydrogen diffusion barrier layer includes silicon nitride.