System in which plural controlled devices and main control device are connected via network
In a system, a plurality of controlled devices, including a first controlled device and a second controlled device, and a main control device configured to control the plurality of controlled devices are connected via a network. The main control device includes a communicator configured to transmit and receive a data frame including a plurality of data areas via the network in a predetermined cycle, and a setter configured to set a structure of the data frame. The setter has a function of setting the same data area in the data frame as a data area in which the first controlled device should write data and a data area from which the second controlled device should read data.
1 . A system comprising:
a plurality of controlled devices including a first controlled device and a second controlled device; and
a main control device connected to the plurality of controlled devices via a network and configured to control the plurality of controlled devices, the main control device including:
a communicator configured to transmit and receive a data frame including a plurality of data areas via the network in a predetermined cycle; and
a setter configured to set a structure of the data frame, wherein the setter includes a function of setting a same data area in the data frame where the first controlled device writes data and where the second controlled device reads data.
2 . The system according to claim 1 , wherein the second controlled device reads, from the same data area, data written by the first controlled device, and executes processing corresponding to the data.
3 . The system according to claim 1 , wherein the same data area is an area specified by one data offset in the data frame.
4 . The system according to claim 1 , wherein write of data in the same data area by the first controlled device and read of data from the same data area by the second controlled device are performed in a same cycle.
5 . The system according to claim 1 , wherein the first controlled device writes data representing a state of the first controlled device in the same data area.
6 . The system according to claim 1 , wherein the setter sets the same data area based on network configuration information representing a configuration of the network.
7 . The system according to claim 6 , wherein:
the communicator provides, by service data object communication, to the first controlled device, information representing a data area in which the first controlled device should write data, and
the communicator provides, by service data object communication, to the second controlled device, information representing a data area from which the second controlled device should read data.
8 . The system according to claim 1 , wherein the main control device and the plurality of controlled devices are connected to form a daisy chain.
9 . The system according to claim 8 , wherein in the daisy chain, the first controlled device is arranged between the main control device and the second controlled device.
10 . The system according to claim 1 , further comprising a plurality of units configured to be controlled by the plurality of controlled devices, respectively.
11 . The system according to claim 10 , wherein the plurality of units form part of a substrate processing device configured to process a substrate.
12 . The system according to claim 11 , wherein the substrate processing device comprises a lithography device configured to form a pattern on the substrate.
13 . An article manufacturing method comprising obtaining an article from a substrate by processing the substrate using a system defined in claim 11 .
14 . A system comprising:
a main control device connected to a plurality of controlled devices, which includes a first controlled device and a second controlled device, via a network and configured to control the plurality of controlled devices, wherein the main control device includes:
a communicator configured to communicate a data frame including a plurality of data areas via a network in a predetermined cycle; and
a setter configured to set a structure of the data frame, wherein the setter-includes a function of setting a same data area in the data frame where the first controlled device writes data and where the second controlled device reads data.
15 . A control method for a system including a plurality of controlled devices including a first controlled device and a second controlled device, and a main control device connected to the plurality of controlled devices via a network and configured to control the plurality of controlled devices, the method comprising:
causing the main control device to communicate a data frame including a plurality of data areas via the network in a predetermined cycle;
causing the main control device to set a structure of the data frame including setting a same data area in the data frame where the first controlled device writes data where the second controlled device reads data.
16 . The method according to claim 15 , further comprising causing the second controlled device to read data assigned to the second controlled device from the data frame and execute processing corresponding to the data.
17 . The method according to claim 15 , wherein the same area is an area specified by one data offset in the data frame.
18 . The method according to claim 15 , wherein write of data in the same data area by the first controlled device and read of data from the same data area by the second controlled device are performed in a same cycle.
19 . A non-transitory computer readable medium storing a program for causing a computer to execute control according to a control method defined in claim 15 .
20 . The system according to claim 1 , wherein:
the system is an exposure device,
the first controlled device is one of a mask stage controller, a projection controller, or a substrate stage controller, and
the second controlled device is another of the mask stage controller, the projection controller, or the substrate stage controller.
21 . The system according to claim 1 , wherein the structure of the data frame set by the setter allows the first controlled device to write input data and the second controlled device to read the input data, as output data, without intervention of the main control device within a single cycle processing, during which:
the communicator transmits the data frame to the first controlled device;
the first controlled device transmits the received data frame, with the input data written by the first controlled device in the same data area of the data frame, to the second controlled device; and
the second controlled device reads the output data from the same data area of the received data frame and transmits the received data frame to the communicator, via the first controlled device.