Granted Patent B2

US 12,411,502 · App. 18/481,298 · Granted Sep 9, 2025

Inventors: Daniel T. Mudd (Reno, NV); Marshall B. Grill (Reno, NV); Norman L. Batchelor, II (Sparks, NV); Sean Joseph Penley (Sparks, NV); Michael Maeder (Reno, NV); Patti J. Mudd (Reno, NV); Zachariah Ezekiel McIntyre (Houston, TX); Tyler James Wright (Reno, NV); Matthew Eric Kovacic (Reno, NV); Christopher Bryant Davis (Georgetown, TX)

Assignee: ICHOR SYSTEMS, INC.

G05D7/0126F16K27/003G01F1/6842G01F1/6847G01F15/002G05D7/0635G05D7/0682

Abstract

Claims (35)

1. A method of manufacturing a semiconductor device, the method comprising:

a) supplying a gas to a gas inlet of a gas flow control apparatus, the gas flow control apparatus comprising:

a gas flow path extending from the gas inlet to a gas outlet;

a proportional valve operably coupled to the gas flow path;

an on/off valve operably coupled to the gas flow path between the proportional valve and the gas outlet, a volume of the gas flow path being defined between the proportional valve and the on/off valve; and

a flow restrictor having a flow impedance operably coupled to the gas flow path and located between the proportional valve and the gas outlet;

b) pressurizing the volume with the gas to a target pre-flow pressure by opening the proportional valve while the on/off valve is in an off-state, the target pre-flow pressure selected, in view of the flow impedance of the flow restrictor, to achieve the predetermined flow rate;

c) opening the on/off valve by moving the on/off valve to an on-state, thereby delivering the gas to the gas outlet at the predetermined flow rate; and

d) flowing the gas from the gas outlet to a semiconductor manufacturing process.

2. The method of claim 1 wherein the gas flow control apparatus further comprises a controller, the controller generating a gas flow activation signal at a first time prior to step b), the gas flow activation signal comprising data identifying a turn on time, step c) occurring at the turn on time.

3. The method according to claim 2 , wherein the controller comprises an apparatus controller and a system controller, the system controller transmitting the gas flow activation signal to the apparatus controller.

4. The method according to claim 2 , wherein the gas flow activation signal further comprises data identifying the predetermined flow rate.

5. The method according to claim 1 , further comprising a controller, the controller generating a gas flow activation signal at a first time prior to step b), the gas flow activation signal comprising data instructing the controller to open the on/off valve upon receipt of a trigger signal, step c) occurring at a turn on time in response to the trigger signal.

6. The method according to claim 1 , wherein after step b) and prior to step c), the volume is pressurized to the target pre-flow pressure and the proportional valve is closed.

7. The method according to claim 1 , wherein step c) occurs as soon as the volume reaches the target pre-flow pressure.

8. The method according to claim 7 , wherein the proportional valve has a flow rate substantially equal to the predetermined flow rate when step c) occurs.

9. The method according to claim 1 , wherein the gas flow control apparatus further comprises a bleed valve and a bleed outlet, the bleed valve configured to vent gas from the volume to the bleed outlet when the bleed valve is in an on state and wherein the bleed valve is transitioned to an on state during step b).

10. The method according to claim 9 , wherein the proportional valve has a flow rate substantially equal to the predetermined flow rate when step c) occurs.

11. The method according to claim 1 , wherein step c) occurs before the volume reaches the target pre-flow pressure.

12. The method according to claim 1 , wherein a priming period between step b) and step c) is constant regardless of the predetermined flow rate.

13. The method according to claim 1 , wherein a priming period between step b) and step c) varies depending on the predetermined flow rate.

14. A method of manufacturing a semiconductor device, the method comprising:

a) supplying a gas to a gas inlet of a gas flow control apparatus;

b) generating, with a controller, a gas flow activation signal at a first time that comprises data identifying a second time at which the gas is to be delivered from a gas outlet of a gas flow path of the gas flow control apparatus at a predetermined flow rate, the first time being prior to the second time and a priming period being defined between the first and second times;

c) upon receipt of the gas flow activation signal, the controller adjusting one or more components of the gas flow control apparatus to achieve a primed condition of the gas in a volume of the gas flow path during the priming period, the primed condition selected to achieve the predetermined flow rate, the gas being prohibited from exiting the gas outlet of the gas flow path during the priming period; and

d) delivering the gas from the volume at the second time via the gas outlet of the gas flow path to a semiconductor manufacturing process.

15. The method according to claim 14 , wherein a delivered flow rate of gas from the gas outlet stabilizes within 2% of the predetermined flow rate within 100 milliseconds after step d).

16. The method according to claim 14 , wherein the controller comprises an apparatus controller and a system controller, the system controller transmitting the gas flow activation signal to the apparatus controller.

17. A method of manufacturing a semiconductor device, the method comprising:

a) supplying a gas to a gas inlet of a gas flow control apparatus;

b) priming, in a volume of a gas flow path and during a priming period, the gas to a primed condition, the primed condition selected to achieve the predetermined flow rate, the gas being prohibited from exiting a gas outlet of the gas flow path during the priming period; and

c) delivering the gas from the volume of the gas flow control apparatus to a semiconductor manufacturing process subsequent to the priming period.

18. The method according to claim 17 , wherein the volume of the gas path is defined by a proportional valve and an on/off valve, the on/off valve prohibiting the gas from exiting the gas outlet and the proportional valve priming the volume during the priming period.

19. The method according to claim 17 , further comprising a controller, the controller comprising an apparatus controller and a system controller, the system controller transmitting a gas flow activation signal to the apparatus controller at the beginning of the priming period.

20. The method according to claim 19 , wherein the gas flow activation signal includes data identifying a time at which the gas is to be delivered from the gas outlet of the gas flow path at the predetermined flow rate.

Assignments (2)

Continuity (15)

References Cited (326)