Multilayer electrostatic pad
An electrostatic pad includes a first planar array of first electrodes arranged in a first pattern, and a second planar array of second electrodes arranged in a second pattern that is different from the first pattern, wherein the first and second planar arrays are disposed parallel to each other. A third layer of electrically insulative material may be sandwiched between the first and second planar arrays of respective first and second electrodes.
1 . An electrostatic pad, comprising:
a first planar array of first electrodes arranged in a first pattern, wherein the first electrodes that are adjacent to each other in the first planar array are spaced apart from each other, wherein the first electrodes have a first polarity;
a second planar array of second electrodes arranged in a second pattern that is different from the first pattern, wherein the second electrodes that are adjacent to each other in the second planar array are spaced apart from each other, wherein the second electrodes have a second polarity that is opposite the first polarity; and
a third layer of electrically insulative material sandwiched between the first and second planar arrays; and
wherein the second electrodes of the second planar array are offset from the first electrodes of the first planar array in a first direction and a second direction such that the second electrodes are spaced from neighboring first electrodes in the first direction by a first gap and spaced from neighboring first electrodes in the second direction by a second gap.
2 . The electrostatic pad of claim 1 , wherein one of the first and second planar arrays is disposed above the other of the first and second planar arrays.
3 . The electrostatic pad of claim 1 wherein the first and second planar arrays are disposed parallel to each other.
4 . The electrostatic pad of claim 3 , wherein the third layer is in contact with each of the first and second planar arrays of respective first and second electrodes.
5 . The electrostatic pad of claim 3 , wherein the third layer is in contact with respective first and second edges of the first and second electrodes.
6 . The electrostatic pad of claim 1 , wherein the second pattern is an inverse of the first pattern.
7 . The electrostatic pad of claim 1 , wherein the first and second patterns are first and second checkerboard patterns, respectively.
8 . The electrostatic pad of claim 1 , further comprising:
one or more first electrical leads in electrical communication with the first electrodes and one or more second electrical leads in electrical communication with the second electrodes.
9 . The electrostatic pad of claim 8 , wherein the first and second planar arrays of respective first and second electrodes are configured to provide a voltage difference therebetween.
10 . The electrostatic pad of claim 8 , wherein selected ones of the first and second electrodes may be electrified by the respective one or more first and second electrical leads.
11 . The electrostatic pad of claim 1 , wherein:
the first pattern includes a plurality of first rows and first columns defining the first and second directions as mutually orthogonal;
each of the first electrodes has a first length as measured along the first direction and a first width as measured along the second direction;
the first electrodes that are adjacent to each other in the first direction are spaced apart from each other by a first spacing, and the first electrodes that are adjacent to each other in the second direction are spaced apart from each other by a second spacing;
wherein the first spacing is equal to the first length plus twice a gap amount; and
wherein the second spacing is equal to the first width plus twice the gap amount.
12 . The electrostatic pad of claim 11 , further comprising:
a third layer of electrically insulative material sandwiched between the first and second planar arrays, wherein the third layer has a third layer thickness and wherein the gap amount is approximately ten times the third layer thickness.
13 . The electrostatic pad of claim 11 , wherein the gap amount is 0.3 millimeters.
14 . The electrostatic pad of claim 11 , wherein the first and second spacings allow greater than 1.3 kV of voltage difference to be applied between the first and second planar arrays of respective first and second electrodes without arcing between adjacent ones of the first and second electrodes.
15 . The electrostatic pad of claim 11 , wherein first or second electrodes that are diagonally adjacent to each other are spaced apart from each other by a diagonal spacing that is less than twice the first or second spacing.
16 . The electrostatic pad of claim 11 , wherein the first and second spacings are equal to each other, and wherein first or second electrodes that are diagonally adjacent to each other are spaced apart from each other by a diagonal spacing that is less than twice the first or second spacing.
17 . The electrostatic pad of claim 1 , wherein gaps between adjacent ones of the first electrodes and between adjacent ones of the second electrodes are filled with electrically insulative material.
18 . The electrostatic pad of claim 1 , wherein:
the first pattern includes a plurality of first filled cells and a plurality of first empty cells, wherein each of the first electrodes is disposed in a respective one of the first filled cells;
the second pattern includes a plurality of second filled cells and a plurality of second empty cells, wherein each of the second electrodes is disposed in a respective one of the second filled cells; and
each second empty cell is disposed above a respective one of the first filled cells, and
each second filled cell is disposed above a respective one of the first empty cells.
19 . A method of electrostatic adhesion between an electrostatic pad and a sheet of material, comprising:
generating an electric field of alternating positive and negative charges induced on respective first and second electrodes arranged on the electrostatic pad in respective first and second planar arrays that are offset from each other, wherein the second electrodes that are adjacent to each other in the second planar array are spaced apart from each other, wherein the electrostatic pad comprises a third layer of electrically insulative material sandwiched between the first and first and second planar arrays;
bringing the electrostatic pad near or in contact with the sheet;
setting up opposing charges on the sheet due to the electric field; and
electrostatically adhering the sheet to the electrostatic pad; and
wherein the offset between the second electrodes of the second planar array and the first electrodes of the first planar array is in a first direction and a second direction such that the second electrodes are spaced from neighboring first electrodes in the first direction by a first gap and spaced from neighboring first electrodes in the second direction by a second gap.
20 . The method of claim 19 , wherein the opposing charges on the sheet are opposite in polarity from the alternating positive and negative charges induced on the respective first and second electrodes.
21 . An electrostatic pad, comprising:
a first layer of first electrodes arranged in a first pattern of first filled cells and first empty cells, wherein each of the first electrodes is disposed in a respective one of the first filled cells, wherein the first electrodes that are adjacent to each other in the first layer are spaced apart from each other;
a second layer of second electrodes arranged in a second pattern of second filled cells and second empty cells, wherein each of the second electrodes is disposed in a respective one of the second filled cells, wherein the second electrodes that are adjacent to each other in the second layer are spaced apart from each other; and
a third layer of electrically insulative material sandwiched between the first and second layers;
wherein the second pattern is an inverse of the first pattern, and wherein the second layer is oriented above and generally parallel with the first layer; and
wherein the second electrodes of the second layer are offset from the first electrodes of the first layer in a first direction and a second direction such that the second electrodes are spaced from neighboring first electrodes in the first direction by a first gap and spaced from neighboring first electrodes in the second direction by a second gap.
22 . The electrostatic pad of claim 21 , wherein the first and second patterns are first and second checkerboard patterns, respectively.
23 . The electrostatic pad of claim 21 , wherein each second empty cell is disposed above a respective one of the first filled cells, and each second filled cell is disposed above a respective one of the first empty cells.
24 . The electrostatic pad of claim 21 , wherein the third layer is in contact with each of the first and second layers.
25 . The electrostatic pad of claim 21 , further comprising:
one or more first electrical leads in electrical communication with the first electrodes and one or more second electrical leads in electrical communication with the second electrodes.
26 . The electrostatic pad of claim 25 , wherein the first and second layers of respective first and second electrodes are configured to provide a voltage difference therebetween.
27 . The electrostatic pad of claim 25 , wherein one of the first and second layers is configured as a positive polarity layer, and the other of the first and second layers is configured as a negative polarity layer.
28 . The electrostatic pad of claim 25 , wherein selected ones of the first and second electrodes may be electrified by the respective one or more first and second electrical leads.
29 . The electrostatic pad of claim 21 , wherein the third layer is in contact with respective first and second edges of the first and second electrodes.
30 . The electrostatic pad of claim 21 , wherein:
the first pattern includes plurality of first rows and first columns defining the first and second directions as mutually orthogonal;
each of the first electrodes has a first length as measured along the first direction and a first width as measured along the second direction;
the first electrodes that are adjacent to each other in the first direction are spaced apart from each other by a first spacing, and the first electrodes that are adjacent to each other in the second direction are spaced apart from each other by a second spacing;
wherein the first spacing is equal to the first length plus twice a gap amount; and
wherein the second spacing is equal to the first width plus twice the gap amount.
31 . The electrostatic pad of claim 30 , wherein the third layer has a third layer thickness and the gap amount is approximately ten times the third layer thickness.
32 . The electrostatic pad of claim 30 , wherein the gap amount is 0.3 millimeters.
33 . The electrostatic pad of claim 30 , wherein the first and second spacings allow greater than 1.3 kV of voltage difference to be applied between the first and second layers of respective first and second electrodes without arcing between adjacent ones of the first and second electrodes.
34 . The electrostatic pad of claim 30 , wherein the first and second spacings are equal to each other, and wherein first or second electrodes that are diagonally adjacent to each other are spaced apart from each other by a diagonal spacing that is less than twice the first or second spacing.
35 . The electrostatic pad of claim 30 , wherein first or second electrodes that are diagonally adjacent to each other are spaced apart from each other by a diagonal spacing that is less than twice the first or second spacing.
36 . The electrostatic pad of claim 21 , wherein the third layer has a third layer thickness of approximately 25 microns.
37 . The electrostatic pad of claim 21 , wherein gaps between adjacent ones of the first electrodes and between adjacent ones of the second electrodes are filled with electrically insulative material.
38 . An electrostatic pad, comprising:
a first layer of first electrodes arranged in a first planar array having a plurality of first rows and a plurality of first columns defining a plurality of first cells, wherein the first electrodes that are adjacent to each other in the first layer are spaced apart from each other, wherein each of the first electrodes occupies a respective one of the first cells such that the first electrodes are disposed in a first pattern;
a second layer of second electrodes arranged in a second planar array having a plurality of second rows and a plurality of second columns defining a plurality of second cells, wherein the second electrodes that are adjacent to each other in the second layer are spaced apart from each other, wherein each of the second electrodes occupies a respective one of the second cells such that the second electrodes are disposed in a second pattern that is an inverse of the first pattern, wherein the second layer is disposed above and generally parallel with the first layer; and
a third layer of electrically insulative material sandwiched between the first and second layers; and
wherein the second electrodes of the second planar array are offset from the first electrodes of the first planar array in a first direction and a second direction such that the second electrodes are spaced from neighboring first electrodes in the first direction by a first gap and spaced from neighboring first electrodes in the second direction by a second gap.
39 . The electrostatic pad of claim 38 , wherein the first and second patterns are first and second checkerboard patterns, respectively.
40 . The electrostatic pad of claim 38 , wherein:
the first pattern includes a plurality of first filled cells and a plurality of first empty cells, wherein each of the first electrodes is disposed in a respective one of the first filled cells;
the second pattern includes a plurality of second filled cells and a plurality of second empty cells, wherein each of the second electrodes is disposed in a respective one of the second filled cells; and
each second empty cell is disposed above a respective one of the first filled cells, and each second filled cell is disposed above a respective one of the first empty cells.
41 . The electrostatic pad of claim 38 , further comprising:
one or more first electrical leads in electrical communication with the first electrodes and one or more second electrical leads in electrical communication with the second electrodes.
42 . The electrostatic pad of claim 41 , wherein the first and second layers of respective first and second electrodes are configured to provide a voltage difference therebetween.
43 . The electrostatic pad of claim 38 , wherein the first rows and first columns define the first and second directions as mutually orthogonal, each of the first electrodes has a first length as measured along the first direction and a first width as measured along the second direction, the first electrodes that are adjacent to each other in the first direction are spaced apart from each other by a first spacing that is equal to the first length plus twice a gap amount, and the first electrodes that are adjacent to each other in the second direction are spaced apart from each other by a second spacing is equal to the first width plus twice the gap amount.
44 . The electrostatic pad of claim 43 , wherein the third layer has a third layer thickness, and the gap amount is approximately ten times the third layer thickness.
45 . The electrostatic pad of claim 43 , wherein the gap amount is 0.3 millimeters.
46 . An electrostatic pad, comprising:
a first planar array of first filled cells and first empty cells arranged in a first pattern, wherein a respective first electrode is disposed within each of the first filled cells, thereby defining a first layer of first electrodes, wherein the first electrodes that are adjacent to each other in the first planar array are spaced apart from each other;
a second planar array of second filled cells and second empty cells arranged in a second pattern that is an inverse of the first pattern, wherein a respective second electrode is disposed within each of the second filled cells, thereby defining a second layer of second electrodes, wherein the second layer is oriented above and generally parallel with the first layer, wherein the second electrodes that are adjacent to each other in the second planar array are spaced apart from each other; and
a third layer of electrically insulative material sandwiched between and in contact with the first and second layers;
wherein each second empty cell is disposed above a respective one of the first filled cells, and each second filled cell is disposed above a respective one of the first empty cells; and
wherein the second electrodes of the second planar array are offset from the first electrodes of the first planar array in a first direction and a second direction such that the second electrodes are spaced from neighboring first electrodes in the first direction by a first gap and spaced from neighboring first electrodes in the second direction by a second gap.
47 . The electrostatic pad of claim 46 , wherein the first and second patterns are first and second checkerboard patterns, respectively.
48 . The electrostatic pad of claim 46 , further comprising:
one or more first electrical leads in electrical communication with the first electrodes and one or more second electrical leads in electrical communication with the second electrodes.
49 . The electrostatic pad of claim 48 , wherein the first and second layers of respective first and second electrodes are configured to provide a voltage difference therebetween.
50 . The electrostatic pad of claim 46 , wherein the first pattern includes plurality of first rows and first columns defining the first and second directions as mutually orthogonal, each of the first electrodes has a first length as measured along the first direction and a first width as measured along the second direction, the first electrodes that are adjacent to each other in the first direction are spaced apart from each other by a first spacing that is equal to the first length plus twice a gap amount, and the first electrodes that are adjacent to each other in the second direction are spaced apart from each other by a second spacing that is equal to the first width plus twice the gap amount.
51 . The electrostatic pad of claim 50 , wherein the third layer has a third layer thickness and the gap amount is approximately ten times the third layer thickness.
52 . The electrostatic pad of claim 50 , wherein the gap amount is 0.3 millimeters.
53 . The method of claim 19 ,
the first electrodes are arranged in a first pattern comprising a plurality of first rows and first columns;
each of the first electrodes has a first length as measured along the first direction and a first width as measured along the second direction;
the first electrodes that are adjacent to each other in the first direction are spaced apart from each other by a first spacing is equal to the first length plus twice a gap amount; and
the first electrodes that are adjacent to each other in the second direction are spaced apart from each other by a second spacing that is equal to the first width plus twice the gap amount.
54 . The electrostatic pad of claim 21 , wherein the first electrodes have a first polarity and the second electrodes have a second polarity that is opposite the first polarity.