System and method for residual voltage control of electrostatic chucking assemblies
Described herein is a substrate carrier comprising electrostatic chuck panels and using the same. The electrostatic chuck panels may include electrodes with interleaved segments. Further, the electrodes of each electrostatic chuck panel may be driven with chucking voltages having opposite polarities.
1. A substrate carrier comprising:
a first electrostatic chuck panel comprising:
a first electrode residing in a single plane and adapted to be driven with a chucking voltage having a first polarity; and
a second electrode residing in a single plane and adapted to be driven with a chucking voltage having a second polarity different than the first polarity; and
a second electrostatic chuck panel disposed adjacent to the first electrostatic chuck panel and comprising:
a first electrode residing in a single plane and adapted to be driven with the chucking voltage having the second polarity, the first electrode of the second electrostatic chuck panel is disposed adjacent to the first electrode of the first electrostatic chuck panel; and
a second electrode residing in a single plane and adapted to be driven with the chucking voltage having the first polarity, wherein the first polarity is different than the second polarity.
2. The substrate carrier of claim 1 , further comprising:
a third electrostatic chuck panel disposed adjacent to the first electrostatic chuck panel and comprising:
a first electrode residing in a single plane and adapted to be driven with the chucking voltage having the second polarity, and disposed adjacent to the first electrode of the first electrostatic chuck panel; and
a second electrode residing in a single plane and adapted to be driven with the chucking voltage having the first polarity; and
a fourth electrostatic chuck panel disposed adjacent to the second electrostatic chuck panel and comprising:
a first electrode residing in a single plane and adapted to be driven with a chucking voltage having the first polarity, and disposed adjacent to the first electrode of the second electrostatic chuck panel; and
a second electrode residing in a single plane and adapted to be driven with a chucking voltage having the second polarity.
3. The substrate carrier of claim 1 , wherein:
the first electrode of the first electrostatic chuck panel comprises a first plurality of segments connected at first corners;
the second electrode of the first electrostatic chuck panel comprises a second plurality of segments connected at second corners;
a first segment of the first plurality of segments and a second segment of the second plurality of segments are adjacent and parallel to each other and are separated by a first distance; and
a first corner of the first corners has a first side and is adjacent to a second corner of the second corners having a second side, the first corner is separated from the second corner by a second distance and has a first radius.
4. The substrate carrier of claim 3 , wherein the first distance is about equal to the second distance.
5. The substrate carrier of claim 1 , wherein the first electrode of the first electrostatic chuck panel comprises a first plurality of segments disposed on a first dielectric layer, and the second electrode of the first electrostatic chuck panel comprises a second plurality of segments disposed on a second dielectric layer over the first dielectric layer, and wherein a horizontal spacing between the first plurality of segments and the second plurality of segments is greater than or equal to zero.
6. The substrate carrier of claim 1 , wherein a height of the first and second electrodes of the first electrostatic chuck panel is in a range of about 6 um to about 9 um, and a height of the first and second electrodes of the second electrostatic chuck panel is in a range of about 6 um to about 9 um.
7. The substrate carrier of claim 1 , wherein a distance between the first electrode of the first electrostatic chuck panel and the first electrode of the second electrostatic chuck panel is less than six times a distance between the first electrode and the second electrode of the first electrostatic chuck panel.