Disc Grinding for Semiconductor Wafers on Polishing System
Grind discs for semiconductor polishing systems are provided. In one example, a semiconductor workpiece polishing system includes a platen configured to rotate about an axis. The semiconductor workpiece polishing system further includes a grind disc on the platen, the grind disc has an abrasive surface configured to grind silicon carbide. The semiconductor workpiece polishing system includes a workpiece carrier operable to bring a silicon carbide semiconductor workpiece into contact with the grind disc to implement a grinding operation on the silicon carbide semiconductor workpiece. The grinding operation reduces a thickness of the silicon carbide semiconductor workpiece by at least about 0.5 microns.
1 . A semiconductor workpiece polishing system, the system comprising:
a platen configured to rotate about an axis;
a grind disc on the platen, the grind disc having an abrasive surface containing abrasive material including a plurality of abrasive elements configured to grind silicon carbide;
a workpiece carrier operable to bring a silicon carbide semiconductor workpiece into contact with the grind disc to implement a grinding operation on the silicon carbide semiconductor workpiece, the grinding operation reducing a thickness of the silicon carbide semiconductor workpiece by at least about 1 micron without an abrasive slurry;
wherein the plurality of abrasive elements includes one or more of (i) diamond; (ii) ceramic; (iii) metal nitride; (iv) metal oxide, (v) metal carbide (vi) metalloid nitride; (vii) metalloid oxide; (viii) metalloid carbide; (ix) carbon group nitride; (x) carbon group oxide; or (xi) carbon group carbide.
2 . The semiconductor workpiece polishing system of claim 1 , wherein the grind disc is on a receptacle on the platen, the receptacle configured to hold a polishing pad for the semiconductor workpiece polishing system.
3 . The semiconductor workpiece polishing system of claim 1 , wherein the workpiece carrier is operable to bring the silicon carbide semiconductor workpiece into contact with the grind disc such that an entire surface of the silicon carbide semiconductor workpiece is in contact with the grind disc at the same time.
4 . The semiconductor workpiece polishing system of claim 1 , wherein the grind disc has a thickness in a range of about 2 millimeters to about 40 millimeters.
5 . The semiconductor workpiece polishing system of claim 1 , wherein the grind disc comprises an abrasive containing material.
6 . The semiconductor workpiece polishing system of claim 1 , wherein the grind disc comprises an additive.
7 . The semiconductor workpiece polishing system of claim 6 , wherein the additive is one or more of a lubricant, coagulant, chemical reactant, oxidizing agent, or caustic compound.
8 . The semiconductor workpiece polishing system of claim 6 , wherein the additive is an actuatable additive.
9 . The semiconductor workpiece polishing system of claim 8 , wherein the system comprises an actuator operable to activate the actuatable additive.
10 . The system of claim 1 , wherein the system comprises a coolant delivery system configured to deliver a coolant to a surface of the semiconductor workpiece or the grind disc.
11 . The semiconductor workpiece polishing system of claim 10 , wherein the coolant delivery system comprises an additive delivery system configured to provide an additive to the coolant.
12 .- 20 . (canceled)
21 . The semiconductor workpiece polishing system of claim 1 , wherein the abrasive surface is at least about 75% of a surface area of a first surface of the grind disc, the first surface exposed for grinding the silicon carbide semiconductor workpiece.
22 . The semiconductor workpiece polishing system of claim 1 , wherein the abrasive surface is at least about 95% of a surface area of a first surface of the grind disc, the first surface exposed for grinding the silicon carbide semiconductor workpiece.
23 . The semiconductor workpiece polishing system of claim 1 , wherein the grind disc has a diameter in a range of about 150 millimeters to about 820 millimeters.
24 . (canceled)
25 . The semiconductor workpiece polishing system of claim 5 , wherein the abrasive containing material comprises a ceramic material or an unsintered metal oxide material.
26 . The semiconductor workpiece polishing system of claim 6 , wherein the semiconductor workpiece polishing system further comprises a conditioning head, wherein the conditioning head is configured to provide the additive to the grind disc.
27 . The semiconductor workpiece polishing system of claim 26 , wherein the conditioning head is on a swing arm.
28 . The semiconductor workpiece polishing system of claim 26 , wherein the conditioning head is configured to rotate about an axis.
29 . The semiconductor workpiece polishing system of claim 1 , wherein the workpiece carrier is operable to bring a plurality of silicon carbide semiconductor workpieces into contact with the grind disc for batch processing.
30 . The semiconductor workpiece polishing system of claim 1 , wherein the grinding operation reduces the thickness of the silicon carbide semiconductor workpiece by about 3 microns or greater.
31 . The semiconductor workpiece polishing system of claim 1 , wherein the grinding operation reduces the thickness of the silicon carbide semiconductor workpiece by about 5 microns or greater.
32 . The semiconductor workpiece polishing system of claim 1 , wherein the grinding operation reduces the thickness of the silicon carbide semiconductor workpiece by about 20 microns or greater.
33 . The semiconductor workpiece polishing system of claim 1 , wherein the platen is configured to rotate about the axis at a rotational speed of at least about 120 rpm.