Polishing Pad Assembly for Electrochemical Mechanical Polishing
An example polishing system, such as an electrochemical mechanical polishing (ECMP) system, includes a polishing pad assembly having a polishing pad. The example polishing system includes a bias source. The example polishing system includes a workpiece carrier operable to bring the semiconductor workpiece into contact with the polishing pad. In some implementations, the polishing pad assembly is operable to provide an electrically conductive path for one or more charge carriers to the bias source.
1 . A polishing system for a semiconductor workpiece, comprising:
a polishing pad assembly comprising a polishing pad;
a bias source;
a workpiece carrier operable to bring the semiconductor workpiece into contact with the polishing pad, and
wherein the polishing pad assembly is operable to provide an electrically conductive path for one or more charge carriers to the bias source.
2 . The polishing system of claim 1 , further comprising a delivery system operable to deliver an electrolyte to the polishing pad, wherein the bias source is electrically coupled to the electrolyte through the electrically conductive path of the polishing pad.
3 . The polishing system of claim 2 , wherein the bias source is coupled to the polishing pad assembly through a conductive path in the workpiece carrier.
4 . The polishing system of claim 1 , further comprising:
an electrically conductive support layer in the polishing pad assembly, wherein the electrically conductive path is coupled to the bias source least partially through the electrically conductive support layer.
5 . The polishing system of claim 1 , further comprising:
an adhesive layer, wherein the electrically conductive path is coupled to the bias source at least partially through the adhesive layer.
6 . The polishing system of claim 1 , wherein polishing pad assembly is on a platen, wherein the electrically conductive path is coupled to the bias source at least partially through the platen.
7 . The polishing system of claim 1 , wherein the electrically conductive path of the polishing pad assembly comprises one or more voids in the polishing pad, the one or more voids operable to accommodate an electrolyte.
8 . The polishing system of claim 7 , wherein the one or more voids comprise at least one of: (i) one or more pores; (ii) one or more perforations; (iii) one or more apertures; or (iv) one or more gaps between segments of the polishing pad.
9 . The polishing system of claim 1 , wherein the electrically conductive path of the polishing pad has a resistivity in a range of about 1 microOhm/cm 2 to about 500 Ohm/cm 2 through a thickness of the polishing pad.
10 . The polishing system of claim 1 , wherein the electrically conductive path of the polishing pad has a sheet resistance in a range of about 6 microOhm·m/m to about 200.0 Ohm·m/m in a radial direction of the polishing pad.
11 . The polishing system of claim 1 , wherein the electrically conductive path is at least partially in a lateral direction of the polishing pad.
12 . The polishing system of claim 1 , wherein the polishing pad comprises an abrasive containing surface.
13 . The polishing system of claim 1 , wherein the polishing pad comprises one or more electrically conductive structures.
14 . The polishing system of claim 1 , wherein the workpiece is coupled to the bias source through a conductive path in the workpiece carrier.
15 . The polishing system of claim 1 , wherein the polishing pad comprises a first zone and a second zone.
16 . The polishing system of claim 15 , wherein the first zone and the second zone are each coupled to a different bias source.
17 . The polishing system of claim 15 , wherein the first zone has a different sheet resistance or a different resistivity relative to the second zone.
18 . The polishing system of claim 1 , wherein the semiconductor workpiece comprises silicon carbide.
19 . A polishing pad for a semiconductor workpiece, comprising:
a composite material; and
one or more conductive structures to provide an electrically conductive path through the polishing pad.
20 . A method for polishing a surface of a workpiece, the method comprising:
providing the surface of the workpiece on a polishing pad assembly;
providing an electrolyte onto a surface of the polishing pad assembly; and
providing a bias between the workpiece and the electrolyte through an electrically conductive path at least partially through the polishing pad assembly.