Memory structures and methods of forming the same
A structure including a semiconductor layer having a body region of a first conductivity type and a first electrode including a doped region of a second conductivity type in the semiconductor layer is provided. The doped region is adjacent to the body region. The doped region includes a first portion and a second portion extending laterally from the first portion. The first portion has a first width and the second portion has a second width. The first width is greater than the second width. A ferroelectric layer is arranged on the semiconductor layer over the body region. A second electrode is arranged on the ferroelectric layer. The first portion and the second portion of the doped region partially underlap the second electrode.
1. A structure for a non-volatile memory device, comprising:
a semiconductor layer having a body region of a first conductivity type;
a first electrode including a doped region of a second conductivity type in the semiconductor layer, the doped region is adjacent to the body region, the doped region comprises a first portion and a second portion extending laterally from the first portion, wherein the first portion has a first width and the second portion has a second width, the first width is greater than the second width;
a ferroelectric layer on the semiconductor layer over the body region; and
a second electrode on the ferroelectric layer, wherein the first portion and the second portion of the doped region partially underlap the second electrode, and a first side surface of the first portion and a first side surface of the second portion of the doped region does not underlap the second electrode.
2. The structure of claim 1 , wherein the second portion extends from the first portion in a first direction and the first width and the second width are taken in a second direction.
3. The structure of claim 2 , wherein the first direction and the second direction are parallel to a top surface of the semiconductor layer.
4. The structure of claim 2 , wherein the second direction is perpendicular to the first direction.
5. The structure of claim 1 , wherein the first side surface of the first portion and the first side surface of the second portion are laterally offset from a sidewall of the second electrode by different distances.
6. The structure of claim 1 , wherein the first side surface of the second portion adjoins a second side surface of the first portion to form an edge portion of the doped region.
7. The structure of claim 6 , wherein the first side surface of the second portion, the second side surface of the first portion and the edge portion of the doped region does not underlap the second electrode.
8. The structure of claim 1 , wherein the first portion and the second portion of the doped region constitute an L-shaped configuration.
9. The structure of claim 1 , further comprising a contact disposed over the first portion of the doped region.
10. The structure of claim 1 , wherein the doped region is adjacent to a first sidewall of the second electrode, and the first electrode further comprises a second doped region in the semiconductor layer adjacent to a second sidewall opposite to the first sidewall of the second electrode, the second doped region is of the second conductivity type.
11. The structure of claim 10 , wherein the second doped region comprises a first portion and a second portion extending laterally from the first portion, wherein the first portion has a third width and the second portion has a fourth width, the third width is greater than the fourth width, and the first portion and the second portion of the second doped region partially underlap the second electrode.
12. The structure of claim 11 , wherein the doped region and the second doped region are commonly coupled.
13. The structure of claim 1 , wherein the doped region further comprises a third portion, the second portion is between the first portion and the third portion, the third portion has a third width, wherein the third width is greater than the second width.
14. The structure of claim 13 , wherein the first side surface of the first portion and a first side surface of the third portion are laterally offset from a sidewall of the second electrode by a greater distance than the first side surface of the second portion of the doped region.
15. The structure of claim 1 , wherein the second electrode has at least first and second opposing sidewalls, and third and fourth opposing sidewalls, and the doped region underlaps each of the first, second, third and fourth sidewalls of the second electrode.
16. The structure of claim 1 , wherein the doped region further comprises a third portion extending laterally from the first portion, the third portion has a third width, wherein the first width is greater than the third width, and the third portion of the doped region partially underlaps the second electrode.
17. A structure for a non-volatile memory device, comprising:
a semiconductor layer having a body region of a first conductivity type;
a doped region of a second conductivity type in the semiconductor layer, the doped region is adjacent to the body region, the doped region comprises a first portion and a second portion extending laterally from the first portion, wherein the first portion has a first width and the second portion has a second width, the first width is greater than the second width;
a dielectric on the semiconductor layer over the body region; and
an electrode on the dielectric, wherein the first portion and the second portion of the doped region partially underlap the electrode, and a first side surface of the first portion and a first side surface of the second portion of the doped region does not underlap the electrode.
18. The structure of claim 17 , wherein the second portion extends from the first portion in a first direction and the first width and the second width are taken in a second direction.
19. The structure of claim 17 , wherein the first direction and the second direction are parallel to a top surface of the semiconductor layer.
20. A method of forming a structure, comprising:
forming a first electrode including a doped region of a second conductivity type in a semiconductor layer, the doped region is adjacent to a body region of a first conductivity type in the semiconductor layer, the doped region comprises a first portion and a second portion extending laterally from the first portion, wherein the first portion has a first width and the second portion has a second width, the first width is greater than the second width;
forming a ferroelectric layer on the semiconductor layer over the body region; and
forming a second electrode on the ferroelectric layer, wherein the first portion and the second portion of the doped region partially underlap the second electrode, and a first side surface of the first portion and a first side surface of the second portion of the doped region does not underlap the second electrode.