IP Library Granted Patent US 1,107,669
Granted Patent S1
US 1,107,669 · App. 29/792,965 · Granted Dec 30, 2025

Processing chamber purge plate

Inventor: Hans Peter Nygren (Newark, CA)
Assignee: LAM RESEARCH CORPORATION
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Quick Facts
Patent No.
US 1,107,669
App. No.
29/792,965
Granted
Dec 30, 2025
Kind
S1
Claims (1)

The ornamental design for a processing chamber purge plate, as shown and described.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 2, 2022
From: NYGREN, HANS PETER
To: LAM RESEARCH CORPORATION
Reel/Frame 059785/0650 →
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