IP Library › Patent Application 60325211
Patent Application Provisional
App. No. 60/325,211 · Confirmation No. 1887

use of phase edges for sub-resolution assist features on high NA, off-axis illumination imaging systems

Provisional Application Expired
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 Code Description Pages PDF
2001-09-28 TRNA Transmittal of New Application 1 View
2001-09-28 SPEC Specification 5 View
2001-09-28 DRW Drawings-only black and white line drawings 11 View
2001-09-28 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
60/325,211
Filed
2001-09-28