IP Library › Patent Application 60366544
Patent Application Provisional
App. No. 60/366,544 · Confirmation No. 8963

Chromeless phase lithography (CPL) pattern definition by spatial frequency doubling

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2002-03-25 TRNA Transmittal of New Application 1 View
2002-03-25 SPEC Specification 2 View
2002-03-25 DRW Drawings-only black and white line drawings 3 View
2002-03-25 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
App. No.
60/366,544
Filed
2002-03-25