Patent Application
Provisional
App. No. 60/500,272
· Confirmation No. 6369
Scattering bar OPC application method for sub-half wavelength lithography patterning
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-09-05 | TRNA |
Transmittal of New Application | 1 | View | |
| 2003-09-05 | SPEC |
Specification | 5 | View | |
| 2003-09-05 | CLM |
Claims | 1 | View | |
| 2003-09-05 | DRW |
Drawings-only black and white line drawings | 16 | View | |
| 2003-09-05 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-09-05 | ARTIFACT |
Artifact sheet indicating an item has been filed which cannot be scanned | 1 | View |
Inventors
Thomas Laidig
Santa Clara, CA
Kurt E. Wampler
Santa Clara, CA
Doug Van Den Broeke
Santa Clara, CA
J. Fung Chen
Santa Clara, CA
Prosecution
- Docket No.
- 55071-282
- Confirmation No.
- 6369
Child
Claims priority from a provisional application
→
App. 12/350,919
· US 7,892,707
Filed 2009-01-08
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 13/032,590
· US 8,039,180
Filed 2011-02-22
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 12/071,439
· US 7,485,396
Filed 2008-02-21
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 10/880,376
· US 7,354,681
Filed 2004-06-30
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/500,272
- Filed
- 2003-09-05
External Links