IP Library Patent Application 60596173
Patent Application Provisional Small
App. No. 60/596,173 · Confirmation No. 4136

Method and Apparatus for Substrate Handling for a Clean Space Where Processing Tools are Reversibly Removable.

Provisional Application Expired
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Code Description Pages PDF
2022-05-19 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2022-05-17 PA.. Power of Attorney 4 View
2022-05-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-09-06 ADS Application Data Sheet 2 View
2005-09-06 WFEE Fee Worksheet (SB06) 1 View
2005-09-06 OATH Oath or Declaration filed 1 View
2005-09-06 TRNA Transmittal of New Application 3 View
2005-09-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-09-06 SPEC Specification 9 View
2005-09-06 CLM Claims 6 View
2005-09-06 ABST Abstract 1 View
2005-09-06 DRW Drawings-only black and white line drawings 5 View
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Quick Facts
App. No.
60/596,173
Filed
2005-09-06