IP Library Patent Application 60596343
Patent Application Provisional
App. No. 60/596,343 · Confirmation No. 4306

Specialized Methods for Substrate Processing for a Clean Space Where Processing Tools are Vertically Oriented.

Provisional Application Expired
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Code Description Pages PDF
2022-05-19 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2022-05-17 PA.. Power of Attorney 4 View
2022-05-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-09-18 OATH Oath or Declaration filed 1 View
2005-09-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-09-18 WFEE Fee Worksheet (SB06) 1 View
2005-09-18 ADS Application Data Sheet 2 View
2005-09-18 TRNA Transmittal of New Application 3 View
2005-09-18 SPEC Specification 16 View
2005-09-18 CLM Claims 19 View
2005-09-18 ABST Abstract 1 View
2005-09-18 DRW Drawings-only black and white line drawings 12 View
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Quick Facts
App. No.
60/596,343
Filed
2005-09-18