Patent Application
Provisional
App. No. 60/609,243
· Confirmation No. 5233
Full-chip manufacturing reliability check and correction (MRC2)-the first step to DFM with low K1 lithography
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2006-01-06 | PET.DEC.OIPE |
Petition decision routed to the Office of Patent Application Processing(OPAP) to act on the decision or continue prosecution | 1 | View | |
| 2005-12-19 | CFILE |
Request for Corrected Filing Receipt | 6 | View | |
| 2005-12-19 | PET.OP |
Petition for review by the Office of Petitions | 3 | View | |
| 2005-12-09 | PETDEC |
Petition Decision | 1 | View | |
| 2005-12-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2005-11-15 | PET.OP |
Petition for review by the Office of Petitions | 5 | View | |
| 2005-11-01 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2005-10-27 | CFILE |
Request for Corrected Filing Receipt | 4 | View | |
| 2004-12-07 | PA.. |
Power of Attorney | 1 | View | |
| 2004-09-14 | TRNA |
Transmittal of New Application | 1 | View | |
| 2004-09-14 | SPEC |
Specification | 6 | View | |
| 2004-09-14 | APPENDIX |
Appendix to the specification | 37 | View | |
| 2004-09-14 | APPENDIX |
Appendix to the specification | 2 | View | |
| 2004-09-14 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Michael Hsu
Santa Clara, CA
Thomas Laidig
Santa Clara, CA
Kurt E. Wampler
Santa Clara, CA
Duan-Fu Stephen Hsu
Santa Clara, CA
Xuelong Shi
Santa Clara, CA
Douglas Van Den Broeke
Santa Clara, CA
Jang Fung Chen
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Docket No.
- 55071-403
- Confirmation No.
- 5233
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
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Quick Facts
- App. No.
- 60/609,243
- Filed
- 2004-09-14
External Links