Patent Application
Provisional
App. No. 60/692,574
· Confirmation No. 9012
Method of mask feature pitch decomposition for multiple exposures
Provisional Application Expired
Inventors
Jang Fung Chen
Santa Clara, CA
Jungchul Park
Santa Clara, CA
Duan-Fu Stephen Hsu
Santa Clara, CA
Douglas Van Den Broeke
Santa Clara, CA
Thomas Laidig
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20277
- Docket No.
- 055071-0476
- Confirmation No.
- 9012
from
ASML MASKTOOLS B.V.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-07
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 60/692,574
- Filed
- 2005-06-22
External Links