Patent Application
Provisional
App. No. 61/866,918
· Confirmation No. 4344
SILICON IMPLANTATION IN SUBSTRATES AND PROVISION OF SILICON PRECURSOR COMPOSITIONS THEREFOR
Inventors:
Ying Tang, Joseph D. Sweeney, Tianniu Chen, James J. Mayer, Richard S. Ray, Oleg Byl, Sharad N. Yedave, Robert Kaim
Applicant:
Advanced Technology Materials, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-09-06 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-08-16 | SPEC |
Specification | 30 | View | |
| 2013-08-16 | CLM |
Claims | 15 | View | |
| 2013-08-16 | ABST |
Abstract | 1 | View | |
| 2013-08-16 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2013-08-16 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-08-16 | ADS |
Application Data Sheet | 8 | View | |
| 2013-08-16 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-08-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Ying Tang
Brookfield, CT
Joseph D. Sweeney
Winsted, CT
Tianniu Chen
Rocky Hill, CT
James J. Mayer
Fischer, TX
Richard S. Ray
New Milford, CT
Oleg Byl
Southbury, CT
Sharad N. Yedave
Danbury, CT
Robert Kaim
Brookline, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23448
- Docket No.
- 2771-1156-PRV
- Confirmation No.
- 4344
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-02-04
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
from
CHEN, TIANNIU,
MAYER, JAMES J.,
SWEENEY, JOSEPH D.,
KAIM, ROBERT,
BYL, OLEG,
TANG, YING,
YEDAVE, SHARAD N.,
RAY, RICHARD S.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-03-12
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Quick Facts
- App. No.
- 61/866,918
- Filed
- 2013-08-16
External Links