Patent Application
Provisional
App. No. 62/237,899
· Confirmation No. 7216
Methods for Depositing a Conformal Metal or Metalloid Silicon Nitride Film
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-10-21 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2015-10-06 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 2 | View | |
| 2015-10-06 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-10-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2015-10-06 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2015-10-06 | SPEC |
Specification | 38 | View | |
| 2015-10-06 | CLM |
Claims | 8 | View | |
| 2015-10-06 | ABST |
Abstract | 1 | View | |
| 2015-10-06 | DRW |
Drawings-only black and white line drawings | 2 | View |
Inventors
Xinjian Lei
Vista, CA
Moo-Sung Kim
Gyunggi-do, KOREA, REPUBLIC OF
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23543
- Docket No.
- 07929Z2 USA
- Confirmation No.
- 7216
Child
PCT
Claims priority from a provisional application
→
PCT/US2016/050874
Filed 2016-09-09
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 15/757,805
· US 11,104,990
Filed 2018-03-06
· Patented Case
Child
Claims priority from a provisional application
→
App. 17/458,183
· US 11,732,351
Filed 2021-08-26
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2016/055737
Filed 2016-10-06
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 15/764,751
· US 12,163,224
Filed 2018-03-29
· Patented Case
RELEASE OF SECURITY INTEREST
Recorded 2019-10-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-02-20
PATENT SECURITY AGREEMENT
Recorded 2016-10-27
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Quick Facts
- App. No.
- 62/237,899
- Filed
- 2015-10-06
External Links