IP Library › Patent Application 62312689
Patent Application Provisional
App. No. 62/312,689 · Confirmation No. 7303

Non-Aqueous Tungsten Compatible Metal Nitride Selective Etchants and Cleaners

Provisional Application Expired
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 Code Description Pages PDF
2017-03-10 OATH Oath or Declaration filed 10 View
2017-03-10 OATH Oath or Declaration filed 16 View
2017-03-10 OATH Oath or Declaration filed 16 View
2016-10-03 OATH Oath or Declaration filed 11 View
2016-04-11 APP.FILE.REC Filing Receipt 3 View
2016-03-24 SPEC Specification 16 View
2016-03-24 CLM Claims 2 View
2016-03-24 ABST Abstract 1 View
2016-03-24 ADS Application Data Sheet 9 View
2016-03-24 WFEE Fee Worksheet (SB06) 2 View
2016-03-24 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
62/312,689
Filed
2016-03-24