Patent Application
Provisional
App. No. 62/517,365
· Confirmation No. 2563
PLASMA STRIP TOOL WITH UNIFORMITY CONTROL
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2017-06-16 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-06-09 | PA.. |
Power of Attorney | 2 | View | |
| 2017-06-09 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2017-06-09 | ADS |
Application Data Sheet | 9 | View | |
| 2017-06-09 | SPEC |
Specification | 12 | View | |
| 2017-06-09 | CLM |
Claims | 1 | View | |
| 2017-06-09 | DRW |
Drawings-only black and white line drawings | 18 | View | |
| 2017-06-09 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2017-06-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-06-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Shawming Ma
Sunnyvale, CA
Vladimir Nagorny
Tracy, CA
Dixit V. Desai
Pleasanton, CA
Ryan M. Pakulski
Discovery Bay, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-254-P
- Confirmation No.
- 2563
Child
Claims priority from a provisional application
→
App. 17/387,393
Filed 2021-07-28
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 17/026,401
Filed 2020-09-21
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/020103
Filed 2018-02-28
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/020107
Filed 2018-02-28
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 15/888,257
· US 11,201,036
Filed 2018-02-05
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/892,723
Filed 2018-02-09
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 15/851,922
· US 10,790,119
Filed 2017-12-22
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/888,283
Filed 2018-02-05
· Abandoned -- After Examiner's Answer or Board of Appeals Decision
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/020096
Filed 2018-02-28
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/020098
Filed 2018-02-28
· RO PROCESSING COMPLETED-PLACED IN STORAGE
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-07-24
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Quick Facts
- App. No.
- 62/517,365
- Filed
- 2017-06-09
External Links