IP Library › Granted Patent US 6,876,022
Granted Patent B2
US 6,876,022 · App. 10/306,592 · Granted Apr 5, 2005

Junction-isolated depletion mode ferroelectric memory devices

Assignee: Micron Technology, Inc.
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Quick Facts
Patent No.
US 6,876,022
App. No.
10/306,592
Granted
Apr 5, 2005
Kind
B2
Abstract

Depletion-mode ferroelectric transistors are adapted for use as non-volatile memory cells. Various embodiments are described having a diode interposed between the bit line and a source/drain region of the transistor for added margin against read disturb. Various additional embodiments are described having an array architecture such that two memory cells sharing the same bit line also share the same program line. Using this configuration, non-selected cells are readily supplied with gate/source voltages sufficient to maintain the cells in a deactivated state during read and write operations on selected cells.

Claims (47)

1. A ferroelectric memory cell, comprising:

a control gate formed overlying a ferroelectric layer;

a first source/drain region having a first conductivity type;

a second source/drain region having the first conductivity type;

a channel region interposed between the first and second source/drain regions and having the first conductivity type; and

a well coupled to the second source/drain region and having a second conductivity type, wherein the second conductivity type is opposite the first conductivity type and wherein the well is isolated from the control gate.

2. The ferroelectric memory cell of claim 1 , further comprising:

a gate dielectric layer interposed between the channel region and the ferroelectric layer; and

a floating gate interposed between the gate dielectric layer and the ferroelectric layer.

3. The ferroelectric memory cell of claim 2 , wherein the floating gate comprises a conductive material.

4. The ferroelectric memory cell of claim 3 , wherein the conductive material includes at least one material selected from the group consisting of conductively-doped polysilicon, metal silicides, metals and metal alloys.

5. The ferroelectric memory cell of claim 4 , wherein the floating gate comprises a metal layer overlying a conductively-doped polysilicon layer.

6. The ferroelectric memory cell of claim 1 , wherein the ferroelectric layer comprises a material selected from the group consisting of strontium bismuth tantalite, lead zirconium titanate, lanthanum-doped lead zirconium titanate, lithium niobate and metal oxides having a perovskite crystalline structure.

7. The ferroelectric memory cell of claim 1 , further comprising:

a gate dielectric layer interposed between the channel region and the ferroelectric layer;

wherein the ferroelectric layer is overlying and adjoining the gate dielectric layer.

8. The ferroelectric memory cell of claim 1 , wherein the ferroelectric layer is overlying and adjoining the channel region.

9. A ferroelectric memory cell, comprising:

a control gate formed overlying a ferroelectric layer;

a first source/drain region having a first conductivity type;

a second source/drain region having the first conductivity type;

a channel region interposed between the first and second source/drain regions and having the first conductivity type; and

a well having a second conductivity type formed in the second source/drain region, wherein the second conductivity type is opposite the first conductivity type and wherein the well is isolated from the control gate.

10. The ferroelectric memory cell of claim 9 , further comprising:

a gate dielectric layer interposed between the channel region and the ferroelectric layer; and

a conductive floating gate interposed between the gate dielectric layer and the ferroelectric layer.

11. The ferroelectric memory cell of claim 9 , wherein the ferroelectric layer comprises a material selected from the group consisting of strontium bismuth tantalite, lead zirconium titanate, lanthanum-doped lead zirconium titanate, lithium niobate and metal oxides having a perovskite crystalline structure.

12. The ferroelectric memory cell of claim 9 , further comprising:

a gate dielectric layer interposed between the channel region and the ferroelectric layer;

wherein the ferroelectric layer is overlying and adjoining the gate dielectric layer.

13. The ferroelectric memory cell of claim 9 , wherein the ferroelectric layer is overlying and adjoining the channel region.

14. The ferroelectric memory cell of claim 9 , wherein the ferroelectric memory cell is formed on a silicon-on-insulator substrate.

15. The ferroelectric memory cell of claim 9 , wherein the well is interposed between the second source/drain region and a bit line coupled to the memory cell.

16. A memory cell, comprising:

a ferroelectric layer formed overlying a first well region having a first conductivity type, wherein the first well region is formed in a substrate having a second conductivity type opposite the first conductivity type;

a control gate formed overlying the ferroelectric layer and coupled to a word line;

a first source/drain region having the first conductivity type formed in the first well region and coupled to a program line;

a second source/drain region having the first conductivity type formed in the first well region;

a channel region having the first conductivity type formed in the first well region and interposed between the first and second source/drain regions; and

a second well region having the second conductivity type formed in the first well region and coupled to the second source/drain region, wherein the second well region is isolated from the control gate.

17. A memory cell, comprising:

a ferroelectric layer formed overlying a first well region having a first conductivity type, wherein the first well region is formed overlying a substrate and wherein a layer of dielectric material is interposed between the first well region and the substrate;

a control gate formed overlying the ferroelectric layer and coupled to a word line;

a first source/drain region having the first conductivity type formed in the first well region and coupled to a program line;

a second source/drain region having the first conductivity type formed in the first well region;

a channel region having the first conductivity type formed in the first well region and interposed between the first and second source/drain regions; and

a second well region having the second conductivity type formed in the first well region and coupled to the second source/drain region, wherein the second well region is isolated from the control gate.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
Continuity (2)
Division 0965255700 · Aug 31, 2000
Related Publication 20030086287A1 · May 8, 2003