Position detection apparatus, position detection method, exposure apparatus, device manufacturing method, and substrate

1. An apparatus for detecting a position of a target mark included in an object, said apparatus comprising:

a unit which senses an image of the object, the object having a plurality of marks including the target mark with respect to each unit region of the object, the target mark being used for specifying a position of a corresponding unit region, each of the plurality of marks comprising a first mark and a feature of a region outside of the first mark, the feature corresponding to a structure previously formed on the object for identifying a positional relationship between the first mark and the target mark;

a unit which extracts the first mark and the feature in an image sensed by said sensing unit; and

a unit which detects a position of the target mark based on a position of the first mark and the feature.

2. An apparatus according to claim 1 , wherein the feature corresponds to an auxiliary mark associated with the first mark.

3. An apparatus according to claim 2 , wherein the plurality of the first marks have different auxiliary marks, respectively.

4. An apparatus according to claim 2 , wherein the auxiliary mark is connected to the first mark.

5. An apparatus according to claim 2 , wherein the auxiliary mark is surrounded by the first mark.

6. An apparatus according to claim 1 , wherein the feature corresponds to relative positions of the plurality of the first marks.

7. An apparatus according to claim 1 , wherein the feature corresponds to a position of the first mark relative to the target mark.

8. An apparatus according to claim 1 , wherein the object is a substrate on which a device is to be formed.

9. An apparatus according to claim 8 , further comprising a stage unit which positions the substrate.

10. An apparatus according to claim 9 , further comprising a unit which controls positioning of the substrate by said stage unit based on the position of the target mark detected by said detecting unit.

11. An apparatus for exposing a substrate to radiant energy, said apparatus comprising:

a stage unit which positions the substrate;

a unit which senses an image of the substrate, the substrate having a plurality of marks including a target mark with respect to each unit region of the substrate, the target mark being used for specifying a position of a corresponding unit region, each of the plurality of marks comprising a first mark and a feature of a region outside of the first mark, the feature corresponding to a structure previously formed on the substrate for identifying a positional relationship between the first mark and the target mark;

a unit which extracts the first mark and the feature in an image sensed by said sensing unit;

a unit which detects a position of the target mark based on a position of the first mark and the feature; and

a unit which controls said stage unit so as to position the substrate based on the position of the target mark.

12. A method of detecting a position of a target mark included in an object, said method comprising steps of:

sensing an image of the object, the object having a plurality of marks including the target mark with respect to each unit region of the object, the target mark being used for specifying a position of a corresponding unit region, each of the plurality of marks comprising a first mark and a feature of a region outside of the first mark, the feature corresponding to a structure previously formed on the object for identifying a positional relationship between the first mark and the target mark;

extracting the first mark and the feature in an image sensed in said sensing step; and

detecting a position of the target mark based on a position of the first mark and the feature.

13. A method of manufacturing a device, said method comprising steps of:

sensing an image of a substrate;, the substrate having a plurality of marks including a target mark with respect to each unit region of the substrate, the target mark being used for specifying a position of a corresponding unit region, each of the plurality of marks comprising a first mark and a feature of a region outside of the first mark, the feature corresponding to a structure previously formed on the substrate for identifying a positional relationship between the first mark and the target mark;

extracting the first mark and the feature in an image sensed in said sensing step;

detecting a position of the target mark based on a position of the first mark and the feature; and

transferring a pattern concerning the device to the substrate based on the position of the target mark.