X-ray analysis apparatus and method
This invention provides an X-ray analysis apparatus and method capable of simply and accurately determining the position of analysis in a sample from an optical image of it without lowering the sensitivity and/or the spatial resolution in light element analysis. The X-ray analysis apparatus of the present invention irradiates a sample with X-rays narrowed down by means of an X-ray guide member from above the sample in which said sample is directly irradiated with X-rays from said X-ray guide member and an optical image of said sample is obtained in the direction coaxial with said X-ray guide member.
1. An X-ray analysis apparatus comprising:
an X-ray guide member for narrowing and guiding X-rays from above a sample toward a surface of the sample such that said sample is directly irradiated with the X-rays along a first path; and
an optical reflective surface for receiving light reflected from said surface along a second path having a perimeter with an inwardly extending cut portion with the X-ray guide member extending through the cut portion and beyond the reflective surface,
wherein said first path and said second path are substantially coaxial.
2. An X-ray analysis apparatus comprising:
an X-ray guide member having a first end and a second end for irradiating a sample from above a surface of the sample along a path, wherein said second end is narrower than said first end;
a mirror comprising an X-ray guide member through-insertion portion and a reflecting surface, the mirror positioned above the sample such that the reflecting surface faces toward the sample at a specified angle with respect to the path, wherein a lower end of the X-ray guide member is positioned through said X-ray guide member through-insertion portion to protrude beyond said reflecting surface; and
a collective lens having a large numerical aperture for converging light reflected by said reflecting surface in a direction making a specified angle with said reflecting surface onto a sample observing means.
3. The X-ray analysis apparatus according to claim 2 , wherein a parabolic mirror having its focus point near a position of the sample is provided proximate the X-ray guide member between said mirror and the sample.
4. An X-ray analysis apparatus according to claim 2 wherein said second end of the X-ray guide member extends through said X-ray guide member through-insertion portion to protrude from the reflecting surface face to a position adjacent a surface of the sample.
5. An X-ray analysis apparatus according to claim 4 wherein said through-insertion portion is one of a shallow cut portion extending inward from a perimeter of the mirror, a deep cut portion extending inward from a perimeter of the mirror and a gap extending through and dividing the mirror into a plurality of mirrors.
6. An X-ray analysis apparatus comprising:
an X-ray guide member having a first end and a second end for irradiating a sample from above a surface of the sample along a path, wherein said second end is narrower than said first end;
a concave mirror having an aperture formed therein for receiving a portion of the X-ray guide member and a reflecting surface located above the sample, such that the reflecting surface faces the sample, the X-ray guide member extends through and protrudes from said reflecting surface; and
a sample observing means for receiving light reflected by and focused by said reflecting surface.
7. An X-ray analysis apparatus comprising:
an X-ray guide member for transmitting X-rays to a sample;
a reflective surface having a through-hole formed therein for receiving a portion of said X-ray guide member that extends through and protrudes from said reflective surface; and
an optical light receiving apparatus for receiving optical light from said reflective surface.
8. The X-ray analysis apparatus of claim 7 , further comprising a detector for detecting fluorescent X-rays emanating from the sample.
9. The X-ray analysis apparatus of claim 7 , further comprising an irradiation chamber formed above the sample and encompassing said portion of said X-ray guide member and said reflective surface.
10. The X-ray analysis apparatus of claim 7 , wherein said X-ray guide member comprises an anti-reflection coating.
11. The X-ray analysis apparatus of claim 7 , further comprising a collective lens between said reflective surface and said optical light receiving apparatus.
12. The X-ray analysis apparatus of claim 11 , wherein said collective lens has a numerical aperture value greater than about 0.1.
13. The X-ray analysis apparatus of claim 7 , wherein said X-ray guide member comprises a collimator.
14. The X-ray analysis apparatus of claim 13 , wherein said collimator comprises a double-pinhole collimator cylinder.
15. The X-ray analysis apparatus of claim 7 , wherein said reflective surface comprises a plurality of reflecting members.
16. The X-ray analysis apparatus of claim 7 , wherein said reflective surface comprises a curved surface configured to focus said optical light onto said optical light receiving apparatus.
17. The X-ray analysis apparatus of claim 7 , wherein said optical light receiving apparatus comprises an optical fiber.
18. The X-ray analysis apparatus of claim 7 , wherein said optical light receiving apparatus comprises a CCD camera.
19. The X-ray analysis apparatus of claim 7 , further comprising a mirror proximate said portion of said X-ray guide member and between the sample and said reflective surface, said mirror configured to receive light from the sample and reflect the light as a parallel beam onto said reflective surface.
20. The X-ray analysis apparatus of claim 7 , wherein said X-ray guide member comprises an X-ray guide tube.
21. An X-ray analysis apparatus for irradiating a sample with X-rays and providing a visual image of the sample comprising:
an X-ray guide member for transmitting X-rays to the sample along an elongated conduit;
a reflective surface having one of a shallow cut portion extending inward from a perimeter of the reflective surface and a deep cut portion extending inward from a perimeter of the reflective surface, the respective cut portions are configured to extend on either side of the elongated conduit of the X-ray guide member as it protrudes from the reflective surface, the reflective surface reflects light forming an image of the sample; and
an optical light receiving apparatus for receiving reflected light from the reflective surface and forming an image of the sample.
22. An X-ray analysis apparatus comprising:
an X-ray guide member for transmitting X-rays to a surface of the sample such that said sample is directly irradiated with the X-rays along a first path; and
an optical reflective surface for receiving light reflected from said surface along a second path having a perimeter with an inwardly extending cut portion with the X-ray guide member extending through the cut portion and beyond the reflective surface,
wherein said first path and said second path are substantially coaxial.
23. An X-ray analysis apparatus for irradiating a sample with X-rays and visible light comprising:
a source of X-rays;
an elongated X-ray guide member having at least a progressively narrower conduit with an exit portion to emit a narrow X-ray beam operatively connected to the source of the X-rays;
a sample stage for positioning a sample;
an X-ray detector operatively positioned to detect an interaction of the X-rays and a sample on the sample stage;
a visible light reflector with a reflective surface for imaging a sample on the sample stage having a portion for receiving an intermediate portion of the elongated X-ray guide member with the X-ray guide member exit portion spaced from the reflective surface adjacent the sample stage; and
a visible light image detector for receiving an image of the sample.
24. The X-ray analysis apparatus according to claim 23 wherein the X-ray guide member exit portion is spaced to block stray visible light while providing a clear field of view for the X-ray detector.