Bonding pad structure of a semiconductor device
A bonding pad structure in an integrated circuit (IC) and a method for manufacturing thereof comprises a plurality of dummy patterns deposited in sub-layers of the IC, each dummy pattern being connected via a metal link to a plurality of complementary top surface bonding pads, wherein the dummy patterns and the metal link are constructed during the same process steps used to construct the circuit elements included in the IC, without additional or special process steps. Such an imbedded and anchored bonding pad provides contact reliability for both conductive and non-conductive pads used for the interconnection of integrated circuits in a manner that resists layer separation or de-lamination under pulling stresses that are present on the bonding pads.
1. A structure in a semiconductor integrated circuit having a plurality of electrical devices and a plurality of deposition layers, comprising:
a bonding pad having at least a first interconnection layer and a second interconnection layer integral to each other;
at least one peg integral with the bonding pad, the at least one peg vertically traversing one or more deposition layer of the semiconductor integrated circuit; and
a raised dummy pattern integral with the at least one peg, the raised dummy pattern being a vertically stacked multi-layer dummy pattern including at least an interlayer dielectric layer, and electrode, and a capacitor structure, and having a height equsal to a height of a capacitor of the semiconductor integrated circuit,
wherein the structure provides improved binding between the plurality of deposition layers as well as improved distribution of physical stress on the bonding pad.
2. The structure as claimed in claim 1 , wherein the at least one peg is electrically conductive.
3. The structure as claimed in claim 1 , wherein the at least one peg is made of metal.
4. The structure as claimed in claim 3 , wherein the metal is selected from the group consisting of tungsten, aluminum, copper and nickel.
5. The structure as claimed in claim 1 , wherein a plurality of pegs forming a mesh type pattern is integral with the bonding pad.
6. The structure as claimed in claim 1 , wherein the raised dummy pattern is a raised adhesion layer made of a material selected from the group consisting of metals, metal nitrides, silicides, polysilicon and silicon nitride.
7. The structure as claimed in claim 1 , wherein the height of the capacitor is between about 1 to about 3 microns.