Electric heater for a semiconductor processing apparatus
An electric heater has multiple zones, wherein the multiple zones include at least one zone which is subject to high loading (e.g. bottom zone) and, at least one zone is a non-metal heating element, and the rest of the zones (e.g. middle zone and top zone) are metal resistance heating elements of light gauge overbent.
1. A cylindrically shaped multi-zone electric heater for a semiconductor processing equipment,
wherein the heater comprises multiple zones aligned to form a cylindrical shape and the multiple zones include at least one zone which is subject to high loading, the said at least one zone comprises a non-metal heating element, and the rest of the zones comprise metal resistance heating elements.
2. The electric heater for a semiconductor processing equipment as claimed in claim 1 ,
wherein the one or more zones of which heating elements are non-metal heating elements correspond to the said at least one end zone.
3. The electric heater for a semiconductor processing equipment as claimed in claim 1 ,
wherein the metal resistance heating element is of light gauge wire overbent.
4. The electric heater for a semiconductor processing equipment as claimed in claim 1 ,
wherein the non-metal resistance heating element is of molybdenum-di-silicide.
5. The electric heater for a semiconductor processing equipment as claimed in claim 1 ,
wherein each zone comprises a heating element and one or more blocks which hold the heating elements and consist of thermal insulation bodies, the blocks being replaceable in block unit.
6. The electric heater for a semiconductor processing equipment as claimed in claim 2 ,
wherein the metal resistance heating element is of light gauge wire overbent.
7. The electric heater for a semiconductor processing equipment as claimed in claim 2 ,
wherein the non-metal resistance heating element is of molybdenum-di-silicide.
8. The electric heater for a semiconductor processing equipment as claimed in claim 2 ,
wherein each zone comprises a heating element and one or more blocks which hold the heating elements and consist of thermal insulation bodies, the blocks being replaceable in block unit.