Device for liquid treatment of disk-shaped objects
A device is suggested which includes a carrier ( 1 ) for receiving the disk-shaped object ( 10 ), a liquid supply device ( 17 ) for applying liquid onto a disk-shaped object ( 10 ) located on the carrier ( 1 ), and a liquid catch ring ( 2 ), which is positioned essentially coaxially around the carrier ( 1 ) and is rotatable around the axis of the liquid catch ring ( 2 ).
1. A device for treating disk-shaped objects ( 10 ) using liquids, including:
1.1 a carrier ( 1 ) for receiving the disk-shaped object;
1.2 a liquid supply device ( 17 ) for applying liquid onto a disk-shaped object located on the carrier; and
1.3 a liquid catch ring ( 2 ), which is positioned substantially coaxially to the carrier ( 1 ) and is rotatable around the axis of the liquid catch ring, the liquid catch ring being movable relative to the carrier,
wherein at least two annular chambers ( 4 , 4 ′), having openings facing inward and in which liquid thrown off of the liquid catch ring ( 2 ) may be collected, are positioned around the liquid catch ring ( 2 ), and
wherein the openings facing inward are positioned one below the other, and devices ( 25 ) are provided for axial displacement of chambers ( 4 , 4 ′) and liquid catch ring ( 2 ) in relation to one another.
2. The device according to claim 1 , wherein at least a part of the outer surface ( 7 ) of the liquid catch ring ( 2 ) has the shape of a cylindrical sleeve.
3. The device according to claim 1 , wherein the at least two annular chambers ( 4 , 4 ′) and the carrier ( 1 ) are not displaceable in relation to one another in the axial direction.
4. The device according to claim 1 , wherein the liquid catch ring is rotatable in relation to the carrier.
5. The device according to claim 1 , wherein the carrier ( 1 ) is rotatable.
6. The device according to claim 5 , wherein the radial passages ( 5 ) are located at the points of the liquid catch ring ( 2 ) at which the diameter (D) of inner surface ( 6 ) is at least locally greatest (Dmax).
7. The device according to claim 1 , wherein the diameter (D) of the inner surface ( 6 ) of the liquid catch ring ( 2 ) varies in the axial direction.
8. The device according to claim 7 , wherein the inner surface ( 6 ) of the liquid catch ring ( 2 ) is implemented as conical.
9. The device according to claim 7 , wherein a floor ( 7 ), which rises radially inward, is shaped onto the bottom end of the liquid catch ring ( 2 ).
10. The device according to claim 1 , wherein the liquid catch ring ( 2 ) has radial passages ( 5 ), through which the liquid may be conveyed radially outward.