IP Library › Granted Patent US 7,122,988

Granted Patent B2

US 7,122,988 · App. 10/526,670 · Granted Oct 17, 2006

Rotation drive device and rotation drive method

Assignee: Tokyo Electron Limited

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Quick Facts

Patent No.: US 7,122,988
App. No.: 10/526,670
Granted: Oct 17, 2006
Kind: B2

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Abstract

This rotation driving apparatus includes a torque generating circuit 72 for generating a torque of a servo motor 30 with voltage supply from a power source 71 and a motor control circuit 73 for controlling rotation of the motor. In the torque generating circuit 72 , a condenser 76 is arranged to detect a level of the supplied voltage and a period of voltage drop. A voltage-drop information detected by the condenser 76 can be transmitted to a host controller 70 . The host controller 70 previously memorizes a power-recovery information having a voltage drop and a time under an instantaneous blackout capable of recovering within a predetermined period and a rotation control pattern information of the motor corresponding to the power-recovery information and further compares the voltage-drop information, the power-recovery information and the rotation control pattern information of the motor with each other. Based on a control signal, the controller 70 controls the rotation of the servo motor 30 . Then, by controlling the rotation in correspondence with the voltage drop during the driving of the motor, it is carried out to suppress increasing of a driving period, improving the throughput and restricting vibration due to a rotational standstill of the motor by the voltage drop.

Claims (42)

1. A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit and controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein

the torque generating circuit includes a voltage detector for detecting a level of the supply voltage and a period of voltage drop, the voltage detector transmitting a voltage-drop information to the controller,

the controller memorizes power-recovery information including a voltage drop and a period thereof under an instantaneous blackout recoverable within a predetermined period, and rotation-control pattern information of the motor corresponding to the power-recovery information, in advance, and

the controller controls rotation of the motor upon comparing the voltage-drop information, the power-recovery information, and the rotation-control pattern information of the motor with each other, the rotation-control pattern information of the motor has ranges of an accelerating rotation, a constant high-speed rotation and a decelerating rotation, such that when the voltage detector detects a voltage drop during the accelerating rotation of the motor, the controller outputs control signals for: decelerating rotation of the motor; next rotating the motor at a constant speed; and after the power recovery, accelerating rotation of the motor.

2. A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit and controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein

the controller controls rotation of the motor upon comparing the voltage-drop information, the power-recovery information, and the rotation-control pattern information of the motor with each other, the rotation-control pattern information of the motor has ranges of an accelerating rotation, a constant high-speed rotation and a decelerating rotation, such that when the voltage detector detects a voltage drop during the accelerating rotation of the motor, the control means outputs control signals for: decelerating rotation of the motor; next rotating the motor at a constant speed; and after the power recovery, compensating the accelerating rotation of the motor at the voltage drop.

3. The rotation driving apparatus as claimed in claim 2 , wherein the accelerating rotation of the motor after the power recovery is carried out by increasing an acceleration rate of the accelerating rotation of the motor in the rotation-control pattern toward a finish time of the accelerating rotation of the motor in the set up rotation-control pattern.

4. The rotation driving apparatus as claimed in claim 2 , wherein

it is set up that the accelerating rotation of the motor after the power recovery conforms to the accelerating rotation of the motor of the set up rotation-control pattern and that a period of the constant high-speed rotation of the motor is equal to a period of the constant high speed rotation of the motor in the set up rotation-control pattern, and

a deceleration rate of the decelerating rotation of the motor is increased so that a finish time of the decelerating rotation of the motor coincides with a finish time of the decelerating rotation of the motor in the set up rotation-control pattern.

5. The rotation driving apparatus as claimed in claim 2 , wherein

the accelerating rotation of the motor after the power recovery is maintained to a higher speed than a speed of the constant high-speed rotation of the motor in the set up rotation-control pattern, and

after rotating the motor at the higher speed, the motor is decelerated so as to coincide with a finish time of the decelerating rotation of the motor in the set up rotation-control pattern.

6. A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit and controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein

the controller controls the rotation of the motor upon comparing the voltage-drop information, the power-recovery information and the rotation-control pattern information of the motor with each other, such that when the voltage detector detects a voltage drop during the accelerating rotation of the motor, the control means outputs control signals for: decelerating rotation of the motor; next rotating the motor at a constant speed; and stopping rotation of the motor if time has passed a period of the instantaneous blackout.

7. A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit and a controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein

the torque generating circuit includes a voltage detector for detecting a level of the supply voltage and a period of voltage drop, the voltage detector transmitting voltage-drop information to the controller,

the controller compares the voltage-drop information and the power-recovery information to determine whether the instantaneous blackout recoverable within a predetermined period has occurred, and controls the rotation of the motor on the basis of the rotation-control pattern information of the motor corresponding to the power-recovery information when the instantaneous blackout has occurred.

8. The rotation driving apparatus as claimed in claim 7 , wherein when the voltage detector detects a voltage drop during the accelerating rotation of the motor, the controller outputs control signals for decelerating rotation of the motor and subsequently rotating the motor at a constant speed.

9. The rotation driving apparatus as claimed in claim 7 , wherein the rotation-control pattern information of the motor has ranges of an accelerating rotation, a constant high-speed rotation and a decelerating rotation, wherein when the voltage detector detects a voltage drop during the accelerating rotation of the motor, the controller outputs control signals for: decelerating rotation of the motor; next rotating the motor at a constant speed; and after the power recovery, accelerating rotation of the motor.

10. The rotation driving apparatus as claimed in claim 7 , wherein the rotation-control pattern information of the motor has ranges of an accelerating rotation, a constant high-speed rotation and a decelerating rotation, wherein when the voltage detector detects a voltage drop during the accelerating rotation of the motor, the control means outputs control signals for: decelerating rotation of the motor; next rotating the motor at a constant speed; and after the power recovery, compensating the accelerating rotation of the motor at the voltage drop.

11. The rotation driving apparatus as claimed in claim 10 , wherein the accelerating rotation of the motor after the power recovery is carried out by increasing an acceleration rate of the accelerating rotation of the motor in the rotation-control pattern toward a finish time of the accelerating rotation of the motor in the set up rotation-control pattern.

12. The rotation driving apparatus as claimed in claim 10 , wherein it is set up that the accelerating rotation of the motor after the power recovery conforms to the accelerating rotation of the motor of the set up rotation-control pattern and that a period of the constant high-speed rotation of the motor is equal to a period of the constant high-speed rotation of the motor in the set up rotation-control pattern, and

13. The rotation driving apparatus as claimed in claim 10 , wherein

the accelerating rotation of the motor after the power recovery is maintained at a higher speed than a speed of the constant high-speed rotation of the motor in the set up rotation-control pattern, and

after rotating the motor at the higher speed, the motor is decelerated so as to coincide with a finish time of the decelerating rotation of the motor in the set up rotation-control pattern.

14. The rotation driving apparatus as claimed in claim 7 , wherein when the voltage detector detects a voltage drop during the accelerating rotation of the motor, the control means outputs control signals for: decelerating rotation of the motor; next rotating the motor at a constant speed; and stopping rotation of the motor if time has passed a period of the instantaneous blackout.

15. A rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, a motor control circuit for controlling rotation of the motor, a rotation detector for detecting a rotating speed of the motor and transmitting a detection signal to the motor control circuit, and a controller for delivering the rotating speed of the motor and a number of revolutions thereof to and from the motor control circuit, wherein

the motor control circuit compares the voltage-drop information and the power-recovery information to determine whether the instantaneous blackout recoverable within a predetermined period has occurred, and controls the rotation of the motor on the basis of the rotation-control pattern information of the motor corresponding to the power-recovery information when the instantaneous blackout has occurred.

16. A rotation driving method for a rotation driving apparatus having a motor at least rotating at a high speed and a low speed, a torque generating circuit for generating a torque of the motor by a supply voltage from a power source, and a voltage detector arranged in the torque generating circuit to detect a level of the supply voltage and a period of a voltage drop, comprising the steps of:

memorizing power-recovery information including the voltage drop and the period of the voltage drop under an instantaneous blackout recoverable within a predetermined period, and rotation-control pattern information of the motor corresponding to the power-recovery information, in advance, and

obtaining voltage-drop information detected by the voltage detector and further comparing the voltage-drop information and the power-recovery information to determine whether the instantaneous blackout recoverable within a predetermined period has occurred, and controlling the rotation of the motor on the basis of the rotation-control pattern information of the motor corresponding to the power-recovery information when the instantaneous blackout has occurred.

17. The rotation driving method as claimed in claim 16 , wherein the step of comparing the voltage-drop information, the power-recovery information and the rotation-control pattern information of the motor with each other is carried out by a controller configured to give and receive both a rotating speed of the motor and a number of revolutions thereof to and from a motor control circuit for controlling the motor through the torque generating circuit.

18. The rotation driving method as claimed in claim 16 , wherein the step of comparing the voltage-drop information, the power-recovery information and the rotation-control pattern information of the motor with each other is carried out by the motor control circuit for controlling the motor through the torque generating circuit.

Assignments (1)

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 4, 2005

From: SATO, HIDEAKI

To: TOKYO ELECTRON LIMITED

Reel/Frame 016919/0099 →

Priority Claims (1)

JP 2002-267770 · Sep 13, 2002 · national

Continuity (1)

Related Publication 20060138985A1 · Jun 29, 2006