Strained Si/SiGe/SOI islands and processes of making same
A process of making a strained silicon-on-insulator structure is disclosed. A recess is formed in a substrate to laterally isolate an active area. An undercutting etch forms a bubble recess under the active area to partially vertically isolate the active area. A thermal oxidation completes the vertical isolation by use of a minifield oxidation process. The recess is filled to form a shallow trench isolation structure. An active device is also disclosed that is achieved by the process. A system is also disclosed that uses the active device.
1. A process comprising:
above a substrate, forming a strained silicon layer above a semiconductive silicon compound layer;
forming a recess in the substrate to laterally isolate the strained silicon layer; and
vertically isolating the strained silicon layer from the substrate by undercutting the semiconductive silicon compound layer and filling an area under the semiconductive silicon compound layer with an electrical insulator completely separating the strained silicon layer from the semiconductive silicon compound.
2. The process according to claim 1 , wherein vertically isolating the strained silicon layer precedes forming the strained silicon layer by undercutting a portion of the substrate to form isolated substrate islands.
3. The process according to claim 1 , wherein vertically isolating the strained silicon layer precedes forming the strained silicon layer by undercutting a portion of the substrate to form isolated substrate islands, and wherein forming a strained silicon layer further includes:
forming the semiconductive silicon compound layer by implanting material in the substrate.
4. The process according to claim 1 , wherein vertically isolating the strained silicon layer precedes forming the strained silicon layer by undercutting a portion of the substrate to form isolated substrate islands, and wherein forming a strained silicon layer further includes:
growing the semiconductive silicon compound layer upon the substrate; and
growing the strained silicon layer upon the semiconductive silicon compound layer.
5. The process according to claim 1 , following forming a recess, further including:
forming a gate above the strained silicon layer.
6. A process comprising:
above a substrate, forming a strained silicon layer above a semiconductive silicon compound layer;
forming a recess in the substrate to laterally isolate the strained silicon layer; and
vertically isolating the strained silicon layer from the substrate by undercutting, wherein vertically isolating further includes:
forming a spacer in the recess; and
isotropically etching in the recess under conditions to undercut the spacer.
7. The process according to claim 6 , wherein vertically isolating further includes:
forming an oxide in the substrate.
8. The process according to claim 6 , wherein vertically isolating further includes:
isotropically etching under conditions to cause faceting of the substrate at the undercut.
9. The process according to claim 6 , wherein vertically isolating further includes:
forming an oxide in the semiconductive substrate, the process further including:
filling the recess with a shallow-trench dielectric.
10. The process according to claim 6 , wherein forming a strained silicon layer above a semiconductive silicon compound layer includes solid-phase epitaxial formation of the strained silicon layer.
11. A process comprising:
forming a relaxed SiGe layer above a substrate;
forming a strained silicon layer above the relaxed SiGe layer;
forming at least one recess in the substrate to laterally isolate the strained silicon layer; and
vertically isolating the strained silicon layer from the substrate by undercutting the relaxed layer and filling an area under the relaxed SiGe layer with an electrical insulator completely separating the strained silicon layer from the substrate.
12. The process according to claim 11 , wherein vertically isolating the strained silicon layer precedes forming the strained silicon layer by undercutting a portion of the substrate to form isolated substrate islands.
13. The process according to claim 11 , wherein vertically isolating the strained silicon layer precedes forming the strained silicon layer by undercutting a portion of the substrate to form isolated substrate islands, and wherein forming the strained silicon layer includes implanting to form the relaxed SiGe layer above the substrate.
14. The process according to claim 11 , wherein vertically isolating the strained silicon layer precedes forming the strained silicon layer by undercutting a portion of the substrate to form isolated substrate islands, and wherein forming the strained silicon layer includes growing the relaxed SiGe layer above the substrate, and growing the strained silicon layer above the relaxed SiGe layer.
15. A process comprising:
forming a relaxed SiGe layer above a substrate;
forming a strained silicon layer above the relaxed SiGe layer;
forming at least one recess in the substrate to laterally isolate the strained silicon layer; and
vertically isolating the strained silicon layer from the substrate by undercutting, wherein vertically isolating further includes:
forming a spacer in the at least one recess;
isotropically etching in the at least one recess under conditions to undercut the spacer; and
forming an oxide in the substrate.
16. The process according to claim 15 , wherein forming an oxide in the substrate further including:
filling the at least one recess with a shallow-trench dielectric.
17. The process according to claim 15 , wherein forming a relaxed SiGe layer above a substrate includes forming a graded relaxed SiGe layer.
18. The process according to claim 15 , further including:
forming at least one junction in the strained silicon layer; and
forming a storage device above the at least one junction.
19. A process of forming an active area, comprising:
forming a deep implantation in a substrate below a top surface of the substrate;
forming a semiconductive silicon compound layer above the deep implantation;
forming a strained silicon layer above the semiconductive silicon compound layer;
forming a recess in the substrate to laterally isolate the strained silicon layer; and
vertically isolating the strained silicon layer from the substrate by undercutting.
20. The process according to claim 19 , wherein vertically isolating the strained silicon layer includes forming a thermal oxide in the recess that undercuts the strained silicon layer.
21. The process according to claim 19 , wherein vertically isolating the strained silicon layer includes:
conducting an undercutting etch in the recess to partially undercut the strained silicon layer; and
forming a thermal oxide in the recess that completely undercuts the strained silicon layer.
22. A process comprising:
forming a recess in a substrate to form an active area precursor;
partially undercutting the active area precursor;
forming an oxide in the undercutting to fully undercut the active area precursor;
forming a semiconductive silicon compound layer above and on the active area precursor;
forming a strained silicon layer above and on the semiconductive silicon compound layer; and
forming at least one junction in the strained silicon layer.
23. The process according to claim 22 , wherein forming the strained silicon layer includes ion implantation below the strained silicon layer.
24. The process according to claim 22 , wherein forming the strained silicon layer includes growing the strained silicon layer upon a semiconductive silicon compound layer.
25. The process according to claim 22 , wherein forming the oxide includes forming a thermal oxide.
26. A method of assembling an electrical device comprising:
above a substrate, forming a strained silicon layer above a semiconductive silicon compound layer;
forming a recess in the substrate to laterally isolate the strained silicon layer;
vertically isolating the strained silicon layer from the substrate by undercutting; and
forming at least one junction in the strained silicon layer.
27. The method according to claim 26 , further including:
configuring the strained silicon layer in an array of similar strained silicon layers.
28. The method according to claim 26 , further including:
configuring the strained silicon layer in an array of similar strained silicon layers; and
forming a data storage device above the strained silicon layer.
29. The method according to claim 26 further including:
configuring the strained silicon layer in an array of similar strained silicon layers;
forming a data storage device above the strained silicon layer; and
placing the array in a chip package.
30. The method according to claim 26 further including:
configuring the strained silicon layer in an array of similar strained silicon layers;
forming a data storage device above the strained silicon layer;
placing the array in a chip package; and
placing the chip package into a host, wherein the host includes a chip set.
31. The method according to claim 26 further including:
configuring the strained silicon layer in an array of similar strained silicon layers;
forming a data storage device above the strained silicon layer;
placing the array in a chip package;
placing the chip package into a host, wherein the host includes a chip set; and
incorporating the chip set into an electronic system.