Short-channel Schottky-barrier MOSFET device and manufacturing method
A MOSFET device and method of fabricating is provided. The MOSFET device and method of fabricating utilizes Schottky barrier contacts for source and/or drain contact fabrication within the context of a MOSFET device structure to eliminate the requirement for halo/pocket implants and shallow source/drain extensions to control short channel effects. Additionally, the MOSFET device and method unconditionally eliminates the parasitic bipolar gain associated with MOSFET fabrication, reduces manufacturing costs, tightens control of device performance parameters, and provides for superior device characteristics.
1. A short-channel length MOSFET device, comprising:
channel dopants in a semiconductor substrate such that dopant concentration varies significantly in a vertical direction and is generally constant in a lateral direction;
a gate insulator on the semiconductor substrate, a gate electrode on the gate insulator;
a source electrode and a drain electrode on the semiconductor substrate such that a channel length is less than or equal to 100 nm, wherein at least one of the source electrode and the drain electrode forms a Schottky or Schottky-like contact to the semiconductor substrate; and
wherein the dopant concentration has a peak concentration of 10 18 cm −3 to 10 19 cm −3 located at a depth of 25 to 100 nm below the gate insulator.
2. The device of claim 1 , wherein the dopant concentration in the semiconductor substrate 0 to 10 nm below the gate insulator is 10 16 cm −3 to 10 17 cm −3 .
3. The device of claim 2 , wherein the dopant concentration has a peak concentration of 2×10 18 cm −3 located a depth of 50 nm below the gate insulator.
4. The device of claim 3 , wherein the dopant concentration at an interface between the gate insulator and the semiconductor substrate is 4×10 16 cm −3 .
5. The device of claim 1 , wherein the dopant concentration has a peak concentration of 2×10 18 cm − located a dept of 50 nm below the gate insulator. between the gate insulator and the semiconductor substrate is 4×10 16 cm −3 .