Semiconductor device and method for fabricating the same
The semiconductor device comprises gate electrodes 50 formed on a silicon substrate 32 with a gate insulation film 48 formed therebetween, source/drain diffused layers 66 n, 66 p formed in the silicon substrate 32 on both sides of the gate electrodes 50 , a skirt-like insulation film 58 formed on a lower part of the side wall of the gate electrode 50 and on the side end of the gate insulation film 48 , and a sidewall insulation film 60 formed on the exposed part of the side wall of the gate electrode 50 , which is not covered with the skirt-like insulation film 58 and the side surface of the shirt-like insulation film 58.
1. A method for fabricating a semiconductor device comprising the steps of:
forming a gate electrode over a semiconductor substrate with a gate insulation film formed therebetween;
implanting a dopant impurity into the semiconductor substrate with the gate electrode as a mask to form a first impurity diffused region in the semiconductor substrate on both sides of the gate electrode;
depositing a first insulation film over the semiconductor substrate and anisotropically etching the first insulation film to form the first insulation film on a side wall of the gate electrode;
implanting a dopant impurity into the semiconductor substrate with the gate electrode and the first insulation film as a mask to form a second impurity diffused region in the semiconductor substrate on both sides of the gate electrode;
partially removing the first insulation film, leaving the first insulation film in a skirt-like form at a lower part of the side wall of the gate electrode, the first insulation film covering an end of the first impurity diffused region nearer to the gate electrode; and
depositing a second insulation film over the semiconductor substrate and anisotropically etching the second insulation film to form the second insulation film on an exposed part of the side wall of the gate electrode, which is not covered by the first insulation film and on a side surface of the first insulation film.
2. A method for fabricating a semiconductor device according to claim 1 , which further comprises after the step of forming the gate electrode and before the step of forming the first impurity diffused region, the step of
depositing a third insulation film over the semiconductor substrate and anisotropically etching the third insulation film to form the third insulation film on the side wall of the gate electrode, and in which
in the step of forming the first insulation film, the first insulation film is further formed on the side wall of the gate electrode with the third insulation film formed on, and
in the step of partially removing the first insulation film, the third insulation film is partially removed together with the first insulation film, being left partially at a lower part of the side wall of the gate electrode.
3. A method for fabricating a semiconductor device according to claim 1 , further comprising after the step of partially removing the first insulation film and before the step of forming the second insulation film, the step of
implanting a dopant impurity into the semiconductor substrate on both sides of the gate electrode.
4. A method for fabricating a semiconductor device according to claim 1 , further comprising after the step of forming a second insulation film, the step of
implanting a dopant impurity into the semiconductor substrate with the gate electrode and the second insulation film as a mask to form a third impurity diffused region in the semiconductor substrate on both sides of the gate electrode.
5. A method for fabricating a semiconductor device according to claim 1 , wherein
the first insulation film is partially removed by wet etching.