Semiconductor package including a semiconductor device, and method of manufacturing the same
A method and apparatus of manufacturing a semiconductor device and the semiconductor device used in a semiconductor package are disclosed. The semiconductor device may include a main body having one or more supporting layers, a plurality of metal wires that may be formed as a plurality of inner connection pads and a plurality of outer connection pads, an outermost resin layer pattern formed on the surface of the main body, and including a plurality of openings exposing the plurality of outer connection pads, and a metal oxide layer disposed between the plurality of metal wires and the outermost resin layer pattern. The plurality of inner and outer connection pads may be formed on a surface of the main body.
1. A semiconductor device, comprising:
a main body including one or more supporting layers;
a plurality of metal wires that may be formed as a plurality of inner connection pads and a plurality of outer connection pads on a surface of the main body;
an outermost resin layer pattern formed on the surface of the main body, the outermost resin layer pattern including a plurality of openings exposing the plurality of outer connection pads; and
a metal oxide layer disposed between the plurality of metal wires and the outermost resin layer pattern, the metal oxide layer being chemically bonded with the outermost resin layer pattern.
2. The semiconductor device of claim 1 , wherein the supporting layers are formed from insulating materials, the insulating materials are stacked.
3. The semiconductor device of claim 2 , wherein the insulating materials is made from a resin.
4. The semiconductor device of claim 1 , wherein the plurality of metal wires formed as the plurality of inner connection pads penetrate into the supporting layers.
5. The semiconductor device of claim 1 , wherein the metal oxide layer is disposed on the plurality of metal wires formed as the inner connection pads.
6. The semiconductor device of claim 5 , wherein the metal oxide layer is disposed on the plurality of metal wires formed as the outer connection pads.
7. The semiconductor device of claim 1 , wherein the metal oxide layer is at least one of a CuO layer and a Cu 2 O layer.
8. The semiconductor device of claim 1 , wherein the plurality of inner and outer connection pads are formed on a top surface of the main body.
9. The semiconductor device of claim 1 , wherein the plurality of inner and outer connection pads are formed on a bottom surface of the main body.
10. The semiconductor device of claim 1 , wherein the plurality of inner and outer connection pads are formed on a top surface and a bottom surface of the main body.
11. The semiconductor device of claim 1 , wherein the outermost resin layer pattern is formed from a photo solder resist material.
12. The semiconductor device of claim 1 , wherein the outermost resin layer pattern is formed on a top surface of the main body.
13. The semiconductor device of claim 1 , wherein the outermost resin layer pattern is formed on a bottom surface of the main body.
14. The semiconductor device of claim 1 , wherein the outermost resin layer pattern is formed on a top surface and a bottom surface of the main body.
15. The semiconductor device of claim 1 , wherein the opening on the outermost resin layer pattern is formed by etching.
16. The semiconductor device of claim 1 , wherein the metal wire is formed of a copper material.
17. The semiconductor device of claim 1 , further comprising a plating layer formed on the plurality of outer connection pads.
18. The semiconductor device of claim 17 , wherein the plating layer is at least one of Au layer, Ni/Au layer, Ni/Au/Sn layer, and Ni/Au/Sn/Pb layer.
19. The semiconductor device of claim 1 , wherein the plurality of metal wires formed as the outer connection pads are electrically connected to a conductive member.
20. The semiconductor device of claim 19 , wherein the conductive member is at least one of a solder ball, a bonding wire and a bumper.
21. The semiconductor device of claim 1 , wherein the semiconductor device is a printed circuit board.