Dual damascene process flow enabling minimal ULK film modification and enhanced stack integrity
View Patent ↗Interconnect structures possessing an organosilicate glass interlayer dielectric material with minimal stoichiometeric modification and optionally an intact organic adhesion promoter for use in semiconductor devices are provided herein. The interconnect structure is capable of delivering improved device performance, functionality and reliability owing to the reduced effective dielectric constant of the stack compared with that of those conventionally employed because of the use of a sacrificial polymeric material deposited onto the dielectric and optional organic adhesion promoter during the barrier open step done prior to ashing the patterning material. This sacrificial film protects the dielectric and optional organic adhesion promoter from modification/consumption during the subsequent ashing step during which the polymeric film is removed.
1. A method of forming an interconnect structure comprising:
providing a structure including a trench opening defining at least one via and line within an organosilicate glass (OSG) dielectric material, said structure including a patterned stack comprising a hard mask, an antireflective coating and a photoresist located on an upper surface thereof, and an unopened diffusion barrier located beneath said OSG dielectric;
providing an opening in said diffusion barrier which is beneath said at least one via, wherein during said providing the opening a sacrificial polymeric material is simultaneously formed on wall portions of said OSG dielectric;
removing said photoresist and said antireflective coating from said structure, wherein during said removing said sacrificial polymeric material is also removed; and
filling said trench opening with at least a conductive material.
2. The method of claim 1 wherein said providing said structure includes forming said via first and then forming said line.
3. The method of claim 1 wherein said providing an opening comprising a reactive ion etching process which includes organic chemistries.
4. The method of claim 3 wherein said sacrificial polymeric material comprises atoms of C and H.
5. The method of claim 4 wherein said sacrificial polymeric material further comprises F atoms.
6. The method of claim 1 wherein said removing said photoresist and said antireflective coating from said structure comprises an oxygen plasma process.
7. The method of claim 1 wherein said filling said trench opening includes forming a liner within the trench opening and forming said conductive material on said liner.
8. The method of claim 7 wherein said liner is removed from a bottom wall portion of said via prior to forming said conductive material.
9. The method of claim 1 further comprising providing an organic adhesion promoter between said OSG dielectric and said diffusion barrier.